KLA Tencor P-16+, User Manual

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0142530-000 AB KLA-Tencor Confidential 5-11
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide View Scan Window - 3D Screen Function
3D Location Column
5
The second column in the Scan Information field is the Location column. It contains
the coordinates and orientation of the scan starting point.
Table 5.12 presents a brief
description of each parameter. This information is identical with that for 2D scans.
Scan Information Field - 3D Sequence Recipe Column
5
3D Sequence Column
5
The first column in the Scan Information field is the
Sequence
column. It contains the
information regarding the sequence being used in the scan. The 3D sequence view
scan screen is the same as the 2D sequence as shown in
Table 5.1 .
3D View Scan Screen Tool Bar
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The tool bar buttons are provided for convenience. Many of their functions are
duplicated from other screen menu items in the menu bar.
In 3D sequences most of the buttons are not active. Note that while the scan is still
under way and when a sequence scan is paused, the XY view, Analysis Window,
Recipe Editor and Scan View screen icons are all disabled. All the buttons are located
in the tool bar at the top of the View Screen. (See
Figure 5.7 )
Table 5.12 View Scan Screen - 3D Location Information Column
Parameter Description
X The X coordinate of the scan origination point
Y The Y coordinate of the scan origination point
T The rotational value of the sample at the scan origination
point.
Figure 5.9 3D Scan Window - Scan Information Field
Sequence
Information
Scan Location
information
column.
Scan Recipe
information
column.
NOTE: During the scan, the buttons are grayed out and cannot be
accessed.