KLA Tencor P-16+, User Manual

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0142530-000 AB KLA-Tencor Confidential 4-17
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide XY View Screen - Using Die Grid Navigation (Optional Feature, P-16+ only)
Once a die grid pattern is loaded, the Die Grid Navigation Window appears in the
Teach Scan screen (except in calibration procedures), Teach Sequence Site screen,
and Teach Blob Analysis screen.
Die Grid windows (see Figure 4.12 ) differ from standard Teach windows in three
aspects:
Š Die Grid Navigation Window —replaces the Sample Navigation Window. (See
Figure 4.1 .) Click in the desired die grid to quickly move the corresponding die
into the field of view in the Video Display Window.
Š Die Window —for positioning a feature in the field of vision within the die
itself. Click in the desired region to quickly move that area of the die into the
field of view.
Š
Grid information area —contains wafer and current die coordinates, wafer
diameter, and die size.
Figure 4.12 Teach Die Grid Screen with Loaded Die Grid
Die Window : This is a
surface representation of
each die on the grid.
Die Grid Navigation Window:
This is a representation of the
current die grid loaded in the
system. Click any die to move
the associated die on the current
wafer to the scan location
.
Grid Information
Area
Current
Die Scan Position
: The die
currently being scanned is highlighted.
Current position of
the die feature
being scanned.