Scan Recipes - Creating and Editing a Scan Recipe
KLA-Tencor P-16+ / P-6 User’s Guide
3-60
KLA-Tencor Confidential
0142530-000 AB
3/13/09
2D Waviness Parameters
3
3D Roughness Parameters
3
Each of the roughness parameters available in the 3D Roughness Parameters option
box is described in
. (For more information Roughness, see
to
Roughness and Waviness Parameters
Table 3.25
2D Waviness Parameters
Parameter
Description
Average (W
a
)
This is the arithmetic average deviation of the absolute
values of the waviness profile from the mean line or
centerline also known as centerline average waviness).
The centerline divides profiles such that all areas above it
are equal to all areas below it. (ANSI)
RMS (W
q
)
The Root-Mean-Square (RMS) or geometric average
deviation of the waviness profile from the mean line
measured in the sampling length. (ANSI)
Peak (W
p
)
The distance between the mean line and the highest peak
within the sampling length. (ANSI)
Valley (W
v
)
The distance between the mean line and the lowest valley
within the sampling length. (ANSI)
Peak/Valley (W
t
)
The vertical distance between the highest peak and the
lowest valley in the sampling length leveled on the mean
line. Also known as W
max
, W
y
, Maximum Peak-To-Valley
Waviness. (ANSI)
Waviness Height (W
h
)
The difference in height in the waviness profile between
the left and right cursor positions. Analogous to the Height
data that always appears in the Summary box of the
Analysis window. (ANSI)
