0142530-000 AB
KLA-Tencor Confidential
3-61
3/13/09
KLA-Tencor P-16+ / P-6 User’s Guide
Scan Recipes - Creating and Editing a Scan Recipe
Each parameter option can be calculated in two different ways:
Full Scale:
With this checkbox selected, the parameter are calculated using data
from the entire scan.
Boxed:
With this checkbox selected, the parameter are calculated using data
from within the box that is defined in the 3D Cursors parameters window in the
Recipe Editor. (See
Figure 3.46
3D Roughness Parameters
Either or both of the options
for each parameter can be
chosen.
.
Table 3.26
3D Roughness Parameters
Parameter
Description
RMS Deviation (S
q
)
Root-Mean-Square Deviation of the Surface. The
root-mean-square value of the surface departures within the
sampling area.
Arithmetic Mean
Deviation (S
a
)
Arithmetic Mean Deviation of the Surface. The arithmetic mean of
the absolute values of the surface departures above and
below the mean plane within the sampling area.
Skewness (S
sk
)
The measure of asymmetry of surface deviations about the
mean plane. It effectively describes the shape of the surface
height distribution.
