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2600S-900-01 Rev. C / January 2008

Appendix B: Frequently Asked Questions

Series 2600 System SourceMeter

Instruments User’s Manual

How do I make low-current measurements?

Reference

See Section 3 for more connection information, and Section 12 of the Series 2600
Reference Manual for command details.

Low-current connections

Low-current measurements (<1

μ

A) are subject to errors caused by leakage currents and leakage

resistances in the signal path For that reason, Model 2635 and 2636 SourceMeters are equipped
with triax connectors to minimize these problems. To assure accurate low-level measurements, the
integrity of the signal path must be maintained to the DUT, including using both low-noise triax
cables and a suitable test fixture.

shows typical connections for low-current measurements. The DUT in this example

could be a low-current semiconductor device, a high-megohm resistor, or any other passive or
active electronic device requiring low-current measurements. Note that the DUT is enclosed in
both a guard shield and a safety shield, which is necessary when hazardous voltages are used.
The inner shield (guard) of the HI triax cable is connected to the test fixture guard shield, and the
outer cable shield (chassis ground) is connected to the safety shield.

Figure B-7

Model 2635/2636 low-current connections

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Summary of Contents for SourceMeter 2601

Page 1: ...ries 2600 System SourceMeter User s Manual 2600S 900 01 Rev C January 2008 www keithley com A G R E A T E R M E A S U R E O F C O N F I D E N C E Series 2600 System SourceMeter User s Manual 2600S 900 01 Rev C January 2008 2600S 900 01 C Jan 2008 qxp 2 7 2008 10 21 AM Page 1 ...

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Page 3: ...oduct returned transportation prepaid Repaired or replaced products are warranted for the balance of the original warranty period or at least 90 days LIMITATION OF WARRANTY This warranty does not apply to defects resulting from product modification without Keithley Instruments express written consent or misuse of any product or part This warranty also does not apply to fuses software non rechargea...

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Page 5: ...the prior written approval of Keithley Instruments Inc is strictly prohibited TSP TSP Link and TSP Net are trademarks of Keithley Instruments Inc All Keithley Instruments product names are trademarks or registered trademarks of Keithley Instruments Inc Other brand names are trademarks or registered trademarks of their respective holders Cleveland Ohio U S A Document Number 2600S 900 01 Rev C Janua...

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Page 7: ...se with electrical signals that are rated Measurement Category I and Measurement Category II as described in the International Electrotechnical Commission IEC Standard IEC 60664 Most measurement control and data I O signals are Measurement Category I and must not be directly connected to mains voltage or to voltage sources with high transient over voltages Measurement Category II connections requi...

Page 8: ...nd common mode voltages Use standard safety precautions to avoid personal contact with these voltages The symbol on an instrument shows that the surface may be hot Avoid personal contact to prevent burns The symbol indicates a connection terminal to the equipment frame If this symbol is on a product it indicates that mercury is present in the display lamp Please note that the lamp must be properly...

Page 9: ...t Processor Interaction 3 1 What is a script 3 2 Factory scripts 3 2 User scripts 3 2 How do I run a script from the front panel 3 2 How do I interact with scripts using Test Script Builder 3 3 Running a factory script 3 3 Modifying a factory script 3 5 Running the user script 3 10 Deleting a user script and user tests 3 11 How do I use other programs 3 11 Using LabVIEW 3 11 Using Visual Basic 3 1...

Page 10: ...4 Service request programming example B 4 Polling for SRQs B 4 How do I store measurements in non volatile memory B 5 Front panel operation B 5 Remote programming B 5 How do I stack channels to output higher voltage B 6 How do I parallel channels to output higher current B 8 How do I make contact check measurements B 8 Contact check connections B 8 Contact check programming example B 9 How do I ma...

Page 11: ...ram test results 2 14 3 Figure 3 1 Pulse measure cycle for the PulseVMeasureI function 3 3 3 Figure 3 2 Importing a factory script project from the Series 2600 3 6 3 Figure 3 3 KIGeneral project imported into the Test Script Builder 3 7 3 Figure 3 4 Run configuration example Main tab shown 3 9 3 Figure 3 5 Run configuration example Script Attributes tab shown 3 10 3 Figure 3 6 LabVIEW source step ...

Page 12: ...This page left blank intentionally List of Figures Series 2600 System SourceMeter Instruments User s Manual iv Document Number 2600S 900 01 Rev C January 2008 ...

Page 13: ... Triax connector on ground module 1 9 1 Table 1 3 Model 2601 and 2602 source measure capabilities 1 10 1 Table 1 4 Model 2611 and 2612 source measure capabilities 1 10 1 Table 1 5 Model 2635 and 2636 source measure capabilities 1 10 B Table B 1 Commands for basic I O port B 3 List of Tables ...

Page 14: ...This page left blank intentionally List of Tables Series 2600 System SourceMeter Instruments User s Manual vi Document Number 2600S 900 01 Rev C January 2008 ...

Page 15: ...2 Model 2611 and Model 2612 Model 2635 and Model 2636 How do I power up the instrument Connect to line power Turn on power Set line frequency How do I make measurements Connect the DUT Select source and set source level Set compliance limit Select measurement function and range Turn output on Make measurements Turn output off How do I use the buffer Connect the DUT Set up source and measure functi...

Page 16: ...and Figure 1 3 Safety symbols and terms The following symbols and terms may be found on the instrument or used in this manual The symbol on an instrument indicates that the user should refer to the operating instructions located in the manual The symbol on the instrument shows that high voltage may be present on the terminal s Use standard safety precautions to avoid personal contact with these vo...

Page 17: ...C LIMIT MEAS MODE 0 1 0000 LOAD RUN STORE RECALL 6 7 2 3 4 5 8 9 DISPLAY SPEED DIGITS REL FILTER SRC LIMIT MEAS MODE CONFIG OUTPUT CHAN A CHAN B ON OFF ON OFF LOCAL 1 2 3 4 5 KEITHLEY SourceMeter KEITHLEY SourceMeter Model 2601 Model 2611 and Model 2635 Model 2602 Model 2612 and Model 2636 s NOTE The Models 2601 2611 and 2635 have one SourceMeter channel Channel A and the Models 2602 2612 and 2636...

Page 18: ...peed by controlling the A D converter measurement aperture REL Channel A Controls relative which allows a baseline value to be subtracted from a reading FILTER Channel A Controls the digital filter which can be used to reduce reading noise Model 2602 2612 2636 only DIGITS Channel B Changes display resolution to 4 1 2 5 1 2 or 6 1 2 digits SPEED Channel B Sets the measurement speed by controlling t...

Page 19: ...iance value The can also be used to enable or disable the source edit mode When in a menu use the CURSOR keys or for menu item cursor control When displaying a menu value use the CURSOR keys for cursor control and turn the to change the value Pressing the opens a menu item or selects a menu option or value 6 Display indicators not shown EDIT Unit is in the source editing mode ERR Questionable read...

Page 20: ...0 60Hz 240VA MAX DIGITAL I O RS 232 TSP Link LINE FUSE SLOWBLOW 3 15A 250V CAT I S S LO LO HI HI G G G G CHANNEL A UL C US LISTED SourceMeter 4ZA4 CAT I S S LO LO HI HI G G G G CHANNEL B R WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY CAUTION FOR CONTINUED PROTECTION AGAINST FIRE H...

Page 21: ... internal cooling fan Keep vent free of obstructions to prevent overheating 5 Chassis ground Ground screw for connections to chassis ground 6 Low noise chassis ground Ground jack for connecting Output HI or LO to chassis 7 RS 232 Female DB 9 connector For RS 232 operation use a straight through not null modem DB 9 shielded cable for connection to the PC Keithley Instruments Model 7009 5 8 TSP Link...

Page 22: ...TYPE AND RATING WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING MADE IN U S A IEEE 488 LINE RATING 1...

Page 23: ...nternal cooling fan Keep vent free of obstructions to prevent overheating 5 Chassis ground Ground screw for connections to chassis ground 6 RS 232 Female DB 9 connector For RS 232 operation use a straight through not null modem DB 9 shielded cable for connection to the PC Keithley Instruments Model 7009 5 7 TSP Link Expansion interface that allows a Series 2600 and other TSP enabled instruments to...

Page 24: ... to 3 03A1 Measure DC voltage Measure DC current 1μV to 40 8V 1pA to 3 06A1 1 10A maximum available in pulse mode only Model 2611 and Model 2612 Basic DC source measure capabilities for the Models 2611 and 2612 are listed in Table 1 4 Table 1 4 Model 2611 and 2612 source measure capabilities Function Capabilities Source DC voltage Source DC current 1μV to 202V 1pA to 1 515A1 Measure DC voltage Mea...

Page 25: ...on power Turn on the instrument by pressing the front panel power switch to the on I position Assuming no errors occur the Series 2600 will power up as follows After a few seconds with the OUTPUT indicators and display pixels on the instrument model number and firmware revision levels are briefly displayed The node and the GPIB address are displayed briefly as follows KEITHLEY MODEL 26xx1 NODE 1 G...

Page 26: ...611 2612 or Figure 1 5 on page 1 15 Models 2635 2636 See Section 3 of the Series 2600 Reference Manual for complete information Step 2 Select source and set source level Perform the following steps to select the voltage source and set the source value to 10V 1 Press Channel A SRC to select the V Source as indicated by the V units in the source field on the display The flashing cursor indicates whi...

Page 27: ... a safety interlock circuit that prevents operation on the 200V range if the circuit is not energized This circuit is illustrated in Figure 1 5 on page 1 15 Refer to Section 10 of the Series 2600 Reference manual for more information Step 6 Make measurements 1 Observe the readings on the display Press TRIG if necessary to trigger the unit to begin taking readings For the single channel display mod...

Page 28: ...he metal chassis of the Series 2600 1 Frequency Variable Resistor FVR Isolates the SMUs from high frequencies on the chassis For DC to 60Hz the FVR is a virtual short zero ohms 2 DO NOT use the Chassis Screw terminal to make signal connections to external circuitry High frequency 1MHz on the chassis may result in higher noise at the output Chassis Screw terminal is connected to the metal chassis o...

Page 29: ...AY key Press DISPLAY key Press DISPLAY key Press DISPLAY key Source Measure display for SMU A and SMU B Top line displays the measure function V A W or W Bottom line displays the source function V or A and level Source Measure and Compliance Limit display for SMU A Top line displays the measure function V A W or W Bottom line displays the source function V or A and level and the compliance limit A...

Page 30: ...ibed in How do I make measurements on page 1 12 set up source and measure functions Source function volts Source range 20V 2611 2612 2635 2636 or 40V 2601 2602 Source value 10V Measure function current Measure range auto Step 3 Configure the buffer 1 From the front panel press the STORE key The Count screen displays 2 Use the navigation wheel to select the number of readings and then press ENTER N...

Page 31: ... reading is stored at the first memory location The source value is positioned at the lower left side of the display The timestamp is positioned at the lower right side The first source measure reading stored in the buffer 000001 is time stamped at 00000000 001 seconds Subsequent readings are time stamped relative to when the time storage was started The interval between readings will depend on th...

Page 32: ...This page left blank intentionally 1 18 Return to Section Topics 2600S 900 01 Rev C January 2008 Section 1 Front and Rear Panel Operation Series 2600 System SourceMeter Instruments User s Manual ...

Page 33: ...t Builder Run Test Script Builder Open and close an instrument resource Save and clear console window Select command and language reference views How do I use TSB to make measurements Reset instrument Select source function and set output value Set compliance value and measure range Turn on output Make a measurement Print the result Turn off output How do I use other programs Using LabVIEW Using V...

Page 34: ... the Keithley Instruments Model 7007 to connect the Series 2600 IEEE 488 connector to the GPIB connector on the computer see Figure 2 1 RS 232 Use a shielded 9 pin RS 232 cable like the Keithley Instruments Model 7009 5 to connect the Series 2600 RS 232 connector to the serial port of the computer see Figure 2 2 Figure 2 1 GPIB cable GPIB Cable Side View Side View Connect one end of the cable to t...

Page 35: ...w The Series 2600 RS 232 parameters must agree with those of the computer serial port or the two devices will not be able communicate 1 Press MENU to view the main menu 2 Choose RS 232 then press ENTER 3 Choose the following options Select BAUD and then choose the desired option Choose BITS and then select the appropriate option Select PARITY and then choose the desired Choose FLOW CTRL and then s...

Page 36: ...cripts appear in the console Problems When a script is saved error checking is performed If a script error is detected an X will appear in the script at or near the corrupt line of code The Problems tab in the lower window pane will open automatically and provide a description of the error Tasks When writing a script a double dash is used to designate that the text that follows is a comment and no...

Page 37: ...n Topics 2 5 Series 2600 System SourceMeter Instruments User s Manual Section 2 Remote Operation Figure 2 3 Test Script Builder i SourceMeter Script Interaction Pane Script Development Pane Menu Bar Navigator Pane Control Icons nitial startup screen ...

Page 38: ...Series 2600 is set to 26 If using the GPIB interface board 0 and address 26 the resource setting should be GPIB0 26 INSTR Resource settings for other GPIB board numbers and primary addresses are available from the dialog box RS 232 Typically the COM1 serial port of the PC is used for RS 232 communications For COM1 use the ASRL1 INSTR resource setting Resource settings for other COM ports are avail...

Page 39: ... Maximize icon You can then quickly get information on all commands in the library TSL Click on the Language Help tab at the top then click the Maximize icon to quickly access details on the script language How do I use TSB to make measurements Reference See Remote source measure procedure in Section 4 and Section 12 of the Series 2600 Reference Manual for details on instrument commands The follow...

Page 40: ...press the Return key reset For a Model 2602 2612 or 2636 you can restore defaults of Channel A or Channel B respectively as follows smua reset smub reset Step 2 Select source function and set output value Enter the following commands to select the source voltage function set the source range to 20V Model 2611 2612 2635 2636 or 40V Model 2601 2602 and set the source value to 10V smua source func sm...

Page 41: ...ely print smua measure r print smua measure p Again readings will be displayed in the console window Step 7 Turn off output Send the following command to turn off the output when measurements are complete smua source output smua OUTPUT_OFF Figure 2 6 Source measure command sequence in console window Reset SourceMeter Select volts function Set source range to 40V Set source level to 10V Set current...

Page 42: ... LabVIEW The source measure example using LabVIEW is shown in Figure 2 7 The test steps are 1 Reset instrument 2 Select source voltage function 3 Set source output voltage 4 Turn on output 5 Take current measurement 6 Reset instrument The command sequence for this source measure example is shown below localnode prompts 0 Disable prompts reset Reset Series 2600 smua source func smua OUTPUT_DCVOLTS ...

Page 43: ...2600S 900 01 Rev C January 2008 Return to Section Topics 2 11 Series 2600 System SourceMeter Instruments User s Manual Section 2 Remote Operation Figure 2 7 LabVIEW source measure example block diagram ...

Page 44: ...Instruments internet site www keithley com Figure 2 8 Visual Basic example user interface Using the Series 2600 as a traditional GPIB instrument The following pseudocode describes how the Series 2600 will be configured and controlled to source voltage and measure current for this example Some of the settings are default values restored by resetting the instrument but they are included to show a ty...

Page 45: ...GPIB address of the instrument and is assigned the value of 26 Call send Addr localnode prompts 0 intStatus Call send Addr reset intStatus Call send Addr display screen display SMUA intStatus Call send Addr display smua measure func display MEASURE_DCAMPS intStatus Call send Addr smua source func smua OUTPUT_DCVOLTS intStatus Call send Addr smua source autorangev smua AUTORANGE_ON intStatus Call s...

Page 46: ...2 14 Return to Section Topics 2600S 900 01 Rev C January 2008 Section 2 Remote Operation Series 2600 System SourceMeter Instruments User s Manual Figure 2 9 Example program test results ...

Page 47: ...ipts How do I run a script from the front panel How do I interact with scripts using Test Script Builder Running a factory script Modifying a factory script Running the user script Deleting a user script and user tests How do I use other programs Using LabVIEW Using Visual Basic Section 3 Test Script Processor Interaction ...

Page 48: ...memory If stored in non volatile memory the script will not be lost when the instrument is turned off Keithley Instruments will be posting approved user scripts donated by registered users on its web site You will be able to download these user scripts into your Series 2600 Visit www keithley com for details How do I run a script from the front panel Reference See Factory scripts and User Scripts ...

Page 49: ...rement with the source at level volts Sets the smu to output bias volts for toff seconds Repeats the above sequence for points pulse measure cycles Figure 3 1 shows one pulse measure cycle for the function Figure 3 1 Pulse measure cycle for the level bias ton bias ton toff Current measurement PulseVMeasureI function Running a factory script Reference See Factory scripts in Section 2 of the Series ...

Page 50: ...values to print rb1 n is the ending index for this function n 3 and rb1 is the reading buffer smua nvbuffer1 Print time stamps The following command will print the time stamps for the three measured current readings printbuffer 1 rb1 n rb1 timestamps Example output 5 555555e 02 8 888888e 02 1 111111e 01 Print source values The following command will print the voltage source values for the three me...

Page 51: ...e Manual for more information on modifying a factory script A factory script can be imported from the Series 2600 into the Test Script Builder where it can be modified The modified script can then be loaded back into the Series 2600 and saved as a user script The following procedure will import the KIGeneral factory script into the Test Script Builder modify code for the SourceVMeasureI function l...

Page 52: ...ications are not open use the drop down menu to select a resource and click Open D In the Import Project From Instrument box click the KIGeneral project and then cllick Finish KIGeneral KIGeneral Step 2 Modifying the test code for the SourceVMeasureI function As shown in Figure 3 3 the test code for the script functions is contained in the tab for the main tsp script file The test code for all of ...

Page 53: ...ng 92bias display prompt 00 000 Seconds Enter BIAS Voltage 0 10 10 Saving the script After modifying the script file it must be saved by clicking the save icon on the toolbar of the Test Script Builder as follows Click to save the main tsp script file Figure 3 3 Project Navigator Test Code KIGeneral project imported into the Test Script Builder Step 3 Storing the script in non volatile memory of t...

Page 54: ...eneral You should change the name so the script is not confused with the factory script of the same name that resides in the Series 2600 Change the script Name to KIGeneralUser and click the Apply button 4 As shown in Figure 3 4 the main tsp file must be in the Load Order area of the Run box If it is in the Available Project Files area double click main tsp to move the file over 5 Click the Script...

Page 55: ...9 Series 2600 System SourceMeter Instruments User s Manual Section 3 Test Script Processor Interaction Figure 3 4 Changing the script Name from KIGeneral to KIGeneralUser also changes the name in the Configurations area Run configuration example Main tab shown ...

Page 56: ...e above command is executed any of the functions that make up the user script can be called in the same manner that factory script functions are called see Step 1 Call the function on page 3 3 Front panel operation To run the script from the front panel a test name has to be added to the USER TESTS submenu of the LOAD TEST menu Since the KIGeneralUser script is made up of eight functions a front p...

Page 57: ...d function Deleting a user script and user tests Deleting a user script A user script can be deleted from non volatile memory of the Series 2600 The following command will delete the KIGeneralUser user script script delete KIGeneralUser Deleting a user test After deleting a script you should also delete the test from the USER TESTS menu since it no longer exists The following command deletes the P...

Page 58: ...data_table Clear table reset Reset Series 2600 smua source output 1 Turn on source output for i 1 10 do Loop for 10 steps smua source levelv i Set source level mi smua measure i Take a current measurement table insert data_table mi Store measurement in table end End of loop smua source output 0 Turn off output print table concat data_table Print table of current values reset Reset instrument Figur...

Page 59: ...een included here Comments are identified by double dashes reset display screen display SMUA display smua measure func display MEASURE_DCAMPS smua source func smua OUTPUT_DCVOLTS smua source autorangev smua AUTORANGE_ON smua source levelv 5 smua source limiti 0 1 smua measure rangei 0 1 smua measure nplc 1 smua source output smua OUTPUT_ON ntimes 10 for i 1 ntimes do Perform following command s nt...

Page 60: ...line intStatus Send script line to Series 2600 strReturnMessage udfGetTspResponse strReturnMessage Left strReturnMessage 4 Select Case strReturnMessage Case Case TSP Continuation prompt TSP received script line successfully waiting for next line Ready prompt TSP received script successfully ready for next command Exit Do Case TSP Error prompt Error occurred handle as desired Use errorqueue command...

Page 61: ...nd the readings to the PC The results are displayed in the Data text box of the GUI as shown in Figure 3 8 TSP prompts are enabled prior to running the script The following command runs the script you can also use MeasCurrScript form of the command End If Get output from script Call send Addr MeasCurrScript run intStatus Do strReturnMessage udfGetTspResponse txtData Text txtData Text strReturnMess...

Page 62: ...rn to Section Topics 2600S 900 01 Rev C January 2008 Section 3 Test Script Processor Interaction Series 2600 System SourceMeter Instruments User s Manual Figure 3 8 GUI after running the non function script GPIB ...

Page 63: ...oes not perform multiple current measurements but rather it creates a function named MeasCurr which performs one or more current measurements when it is called The number of measurements depends on the value of ntimes which is passed to the function when it is called Figure 3 9 shows the GUI Graphical User Interface after loading and running the script Note that the Data text box does not contain ...

Page 64: ... Call Function GPIB command button In this example the function performs ten current measurements and sends the readings to the PC because ntimes is set to 10 when the function is called The results are displayed in the Data text box as shown in Figure 3 10 Note that it would be just as easy to take one or 100 readings simply by calling the function with a different value for ntimes e g MeasCurr 1...

Page 65: ... print errorqueue next intStatus strReturnMessage udfGetTspResponse txtStatusDesc Text txtStatusDesc Text strReturnMessage vbCrLf Get output from function End If Take appropriate action based on error message 2600S 900 01 Rev C January 2008 Return to Section Topics 3 19 Series 2600 System SourceMeter Instruments User s Manual Section 3 Test Script Processor Interaction Figure 3 10 GUI after callin...

Page 66: ...This page left blank intentionally 3 20 Return to Section Topics 2600S 900 01 Rev C January 2008 Section 3 Test Script Processor Interaction Series 2600 System SourceMeter Instruments User s Manual ...

Page 67: ...gn node numbers 4 2 Reset the TSP Link 4 3 Check the state of the TSP Link system 4 3 How do I use the expanded system 4 3 Accessing resources of TSP Link nodes 4 3 Using node N 4 3 Using the alias localnode 4 4 Running scripts in a TSP Link system 4 4 Section 4 Controlling Multiple Series 2600s TSP Link ...

Page 68: ...US LISTED SourceMeter 4ZA4 WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY WARNING NO INTERNAL OPERATOR SERVICABLE PARTS SERVICE BY QUALIFIED PERSONNEL ONLY CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING CAUTION FOR CONTINUED PROTECTION AGAINST FIRE HAZARD REPLACE FUSE WITH SAME TYPE AND RATING IEEE 488 CHANGE IEEE ADDR...

Page 69: ...ute is used to determine whether or not the TSP Link reset routine was completed successfully The returned value online indicates that the reset was successful for all instruments nodes in the system The value offline indicates that the reset has failed A few typical reasons for a reset failure include the following Two or more instruments in the system have the same node number There are no other...

Page 70: ... Node 1 is the Master in a TSP Link system To send a command to Node 1 you can use node 1 or localnode as follows node 1 smua reset Resets SMU A of the Master Node 1 localnode smua reset Resets SMU A of the Master Node 1 Running scripts in a TSP Link system For remote programming only a script stored in the Master can be run Scripts in the Slaves cannot be accessed See How do I interact with scrip...

Page 71: ...s appendix Topic Models 2601 2606 System SourceMeter Specifications A 2 Models 2611 2612 System SourceMeter Specifications A 9 Models 2635 2636 System SourceMeter Specifications A 15 Series 2600 System SourceMeter Specifications A 23 ...

Page 72: ...ution Accuracy 1 year 23 C 5 C rdg volts Typical noise peak peak 0 1Hz 10Hz 100 000mV 5ȝV 0 02 250ȝV 20ȝV 1 00000V 50ȝV 0 02 400ȝV 50ȝV 6 00000V 50ȝV 0 02 1 8mV 100ȝV 40 0000V 500ȝV 0 02 12mV 500ȝV Temperature coefficient 0 C 18 C and 28 C 50 C 0 15 accuracy specification C Maximum output power and source sink limits 2 40 4W per channel maximum 40 4V at 1 0A 6 06V at 3 0A four quadrant source or s...

Page 73: ... 4 0mA 150ȝA Temperature coefficient 0 C 18 C and 28 C 50 C 0 15 accuracy specification C Maximum output power and source sink limits 2 40 4W per channel maximum 1 01A at 40 0V 3 03A at 6 0V four quadrant source or sink operation Current regulation Line 0 01 of range Load 0 01 of range 100pA Voltage limit compliance 4 Bipolar voltage limit compliance set with a single value Minimum value is 10mV A...

Page 74: ...range Values below for Iout Rload 1V unless noted 3A 10mA ranges 80ȝs typical current less than 2 5A Rload 1 5ȍ 1mA range 100ȝs typical 100ȝA range 150ȝs typical 10ȝA range 500ȝs typical 1ȝA range 2 5ms typical 100nA range 25ms typical DC floating voltage Output can be floated up to 250VDC from chassis ground Remote sense operating range 1 Maximum voltage between HI and SENSE HI 3V Maximum voltage...

Page 75: ...G 0 015 8mV Temperature coefficient 0 C 18 C and 28 C 50 C 0 15 accuracy specification C Current Measurment Accuracy Range Display resolution7 Voltage burden8 Accuracy 1 year 23 C 5 C rdg amps 100 000nA 1pA 1mV 0 05 100pA 1 00000ȝA 10pA 1mV 0 025 300pA 10 0000ȝA 100pA 1mV 0 025 1 5nA 100 000ȝA 1nA 1mV 0 02 25nA 1 00000mA 10nA 1mV 0 02 200nA 10 0000mA 100nA 1mV 0 02 2 5ȝA 100 000mA 1ȝA 1mV 0 02 20ȝ...

Page 76: ...easurement time to memory for 60Hz 50Hz 9 Accuracy 1 year 23 C 5 C rdg ohms Fast 1 1 2 ms 5 10 Medium 4 5 ms 5 1 Slow 36 42 ms 5 0 3 Additional Meter Specifications Load impedance Stable into 10 000pF typical Common mode voltage 250VDC Common mode isolation 1G 4500pF Over range 101 of source range 102 of measure range Maximum sense lead resistance 1k for rated accuracy Sense input impedance 10G 9 ...

Page 77: ...interface Connector 25 pin female D Input Output pins 14 open drain I O bits Absolute maximum input voltage 5 25V Absolute minimum input voltage 0 25V Maximum logic low input voltage 0 7V 850ȝA max Minimum logic high input voltage 2 1V 570ȝA Maximum source current flowing out of digital I O bit 960ȝA Maximum sink current at maximum logic low voltage 0 7V 5 0mA Absolute maximum sink current flowing...

Page 78: ...n Directive 89 336 EEC EN 61326 1 Safety Conforms to European Union Directive 73 23 EEC EN 61010 1 and UL 61010 1 Dimensions 89mm high 213mm wide 460mm deep 3 1 2 in 8 3 8 in 17 1 2 in Bench configuration with handle feet 104mm high 238mm wide 460mm deep 4 1 8 in 9 3 8 in 17 1 2 in Weight 2601 4 75kg 10 4 lbs 2602 5 50kg 12 0 lbs Environment For indoor use only Altitude Maximum 2000 meters above s...

Page 79: ... Programming resolution Accuracy 1 year 23 C 5 C rdg volts Typical noise peak peak 0 1Hz 10Hz 200 000mV 5ȝV 0 02 375ȝV 20ȝV 2 00000V 50ȝV 0 02 600ȝV 50ȝV 20 0000V 500ȝV 0 02 5mV 300ȝV 200 000V 5mV 0 02 50mV 2mV Temperature coefficient 0 C 18 C and 28 C 50 C 0 15 accuracy specification C Maximum output power and source sink limits 2 30 603W per channel maximum 20 2V at 1 515A 202V at 101mA four qua...

Page 80: ... Accuracy same as voltage source Overshoot 0 1 typical step size 10 to 90 of range resistive load see Current source output settling time for additional test conditions Additional Source Specifications Transient response time 70ȝs for the output to recover to 0 1 for a 10 to 90 step change in load Voltage source output settling time Time required to reach 0 1 of final value after source level comm...

Page 81: ...g time for additional test conditions Pulse Specifications Region Maximum current limit Maximum pulse width7 Maximum duty cycle8 1 100mA at 200V DC no limit 100 1 1 5A at 20V DC no limit 100 2 1A at 180V 8 5ms 1 3 9 1A at 200V 2 2ms 1 4 10A at 5V 1ms 2 2 Minimum programmable pulse width 7 200ȝs NOTE Minimum pulse width for settled source at a given I V output and load can be longer than 200ȝs See ...

Page 82: ...ccuracy11 12 Range Display resolution13 Input resistance Accuracy 1 year 23 C 5 C rdg volts 200 000mV 1ȝV 10G 0 015 225ȝV 2 00000V 10ȝV 10G 0 02 350ȝV 20 0000V 100ȝV 10G 0 015 5mV 200 000V 1mV 10G 0 015 50mV Temperature coefficient 0 C 18 C and 28 C 50 C 0 15 accuracy specification C 11 Add 50ȝV to source accuracy specifications per volt of HI lead drop 12 De rate accuracy specifications for NPLC ...

Page 83: ... 100ȝA 1mV 0 4 25mA Temperature Coefficient 0 C 18 C and 28 C 50 C 0 15 accuracy specification C Contact Check17 Speed Maximum measurement time to memory for 60Hz 50Hz 17 Accuracy 1 year 23 C 5 C rdg ohms Fast 1 1 2 ms 5 10 Medium 4 5 ms 5 1 Slow 36 42 ms 5 0 3 Additional Meter Specifications Load impedance Stable into 10 000pF typical Common mode voltage 250VDC Common mode isolation 1G 4500pF Ove...

Page 84: ...m source current flowing out of digital I O bit 960ȝA Maximum sink current at maximum logic low voltage 0 7V 5 0mA Absolute maximum sink current flowing into digital I O pin 11mA 5V Power supply pin Limited to 600mA solid state fuse protected Safety interlock pin Active high input 3 4V at 24mA absolute maximum of 6V must be externally applied to this pin to ensure 200V operation This signal is pul...

Page 85: ...alibration period one year 2 SOURCE SPECIFICATIONS VOLTAGE SOURCE SPECIFICATIONS Specifications Category Specifications RANGE PROGRAMMING RESOLUTION ACCURACY 1 Year 23 C 5 C rdg volts TYPICAL NOISE peak peak 0 1 Hz 10 Hz 200 000 mV 5 µV 0 02 375 µV 20 µV 2 00000 V 50 µV 0 02 600 µV 50 µV 20 0000 V 500 µV 0 02 5 mV 300 µV Voltage Programming Accuracy1 200 000 V 5 mV 0 02 50 mV 2 mV Temperature Coef...

Page 86: ... 8 mA 70 µA Current Programming Accuracy 1 50000 A4 50 µA 0 06 4 mA 150 µA Temperature Coefficient 0 15 accuracy specification C For temperatures 0 18 C 28 50 C Maximum Output Power and Source Sink Limits4 30 3 W per channel maximum 1 515 A 20 V 101 mA 200 V Four quadrant source or sink operation Current Regulation Line 0 01 of range Load 0 01 of range 100pA Voltage Limit Compliance5 Bipolar volta...

Page 87: ...typical 20 V 110 µs typical Voltage Source Output Settling Time 200 V 700 µs typical Time required to reach 0 1 of final value after source level command is processed on a fixed range Values below for Iout Rload 2 V unless noted Current Range Settling Time 1 5 A 1 A 120 µs typical Rload 6 100 mA 10 mA 80 µs typical 1 mA 100 µs typical 100 µA 150 µs typical 10 µA 500 µs typical 1 µA 2 ms typical 10...

Page 88: ...oot into a 200 K load 20 MHz BW Current Source Range Change Overshoot 5 of larger range 300 mV Rload 60 nA typical See CURRENT SOURCE OUTPUT SETTLING TIME for additional test conditions PULSE SPECIFICATIONS Specifications Category Specifications Minimum Programmable Pulse Width7 200 µs Note Minimum pulse width for settled source at a given I V output and load can be longer than 200 µs Pulse Width ...

Page 89: ...Y RESOLUTION 10 VOLTAGE BURDEN 11 ACCURACY 1 Year 23 C 5 C rdg amps 100 00 pA12 13 1 fA 1 mV 0 15 120 fA 1 00000 nA12 14 10 fA 1 mV 0 15 240 fA 10 0000 nA 100 fA 1 mV 0 15 3 pA 100 000 nA 1 pA 1 mV 0 06 40 pA 1 00000 øA 10 pA 1 mV 0 025 400 pA Current Measurement Accuracy 10 0000 øA 100 pA 1 mV 0 025 1 5 nA 8 Add 50µV to source accuracy specifications per volt of HI lead drop 9 De rate accuracy sp...

Page 90: ...0 03 1 5 mA 1 50000 A 10 µA 1 mV 0 05 3 5 mA Time required to reach 0 1 of final value Current Range Settling Time Current Measure17 Settling Time 1 mA 100 µs typical Temperature Coefficient 0 15 accuracy specification C For temperatures 0 18 C 28 50 C ADDITIONAL METER SPECIFICATIONS Specifications Category Specifications Load Impedance Stable into 10 000 pF typical Common Mode Voltage 250 VDC Com...

Page 91: ...ach TSP enabled instrument Digital I O Interface See 2601 02 GENERAL specifications for circuit diagram Connector 25 pin female D Input Output Pins 14 open drain I O bits Absolute Maximum Input Voltage 5 25 V Absolute Minimum Input Voltage 0 25 V Maximum Logic Low Input Voltage 0 7V 850 µA max Minimum Logic High Input Voltage 2 1V 570 µA Maximum Source Current flowing out of Digital I O bit 960 µA...

Page 92: ...strumentation 10kΩ Coil Resistance 145Ω 10 Read by firmware INTERLOCK Pin on DIGITAL I O connector Rear Panel Chassis Ground To output stage 220V Supply 220V Supply Power Supply 100 V to 240 VAC 50 Hz 60 Hz manual setting 240 VA max Cooling Forced air Side intake and rear exhaust One side must be unobstructed when rack mounted Warranty 1 year EMC Conforms to European Union Directive 2004 108 EEC E...

Page 93: ... 58 48 58 48 57 48 57 48 57 48 Maximum Single Measurement Rates operations per second for 60Hz 50Hz A D converter speed Trigger origin Measure to GPIB Source measure to GPIB Source measure pass fail to GPIB 0 001 NPLC Internal 1110 1000 880 880 840 840 0 01 NPLC Internal 950 900 780 760 730 710 0 1 NPLC Internal 390 345 355 320 340 305 1 0 NPLC Internal 57 48 56 47 56 47 Maximum measurement range ...

Page 94: ...into non volatile reading buffers Programming Embedded Test Script Processor TSP accessible from any host interface Responds to individual instrument control commands Responds to high speed test scripts comprised of instrument control commands and Test Script Language TSL statements e g branching looping math etc Able to execute high speed test scripts stored in memory without host intervention Mi...

Page 95: ...without timestamp and source setting 100 000 samples Battery Backup Lithium ion battery backup 30 days of non volatile storage Typical battery life is 1 year Factory TSP Scripts See www keithley com for Keithley supported application specific scripts System Expansion The TSP Link expansion interface allows TSP enabled instruments to trigger and communicate with each other See figure below Each Sou...

Page 96: ...This page left blank intentionally A 26 Return to Section Topics 2600S 900 01 Rev C January 2008 Appendix A In this appendix Series 2600 System SourceMeter Instruments User s Manual ...

Page 97: ...I generate a service request B 4 Setting up a service request B 4 Service request programming example B 4 Polling for SRQs B 4 How do I store measurements in non volatile memory B 5 Front panel operation B 5 Remote programming B 5 How do I stack channels to output higher voltage B 6 How do I parallel channels to output higher current B 8 How do I make contact check measurements B 8 Contact check c...

Page 98: ...T setting for the fastest measurements but measurement accuracy will be reduced For best accuracy use the HI ACCURACY setting but speed will be reduced To compromise between accuracy and speed use the MED or NORMAL setting Disabling auto zero to increase speed In certain measuring situations disabling auto zero can increase measurement speed but accuracy will drift with time To disable auto zero s...

Page 99: ... 1 Commands for basic I O port Command Description digio readbit bit digio readport digio writebit bit data digio writeport data Read one digital I O input line Read digital I O port Write data to one digital I O output line Write data to digital I O port How do I trigger other instruments Reference See Triggering in Section 4 Remote digital I O commands in Section 11 and Section 12 of the Series ...

Page 100: ...ent s intended to generate the SRQ In general the steps used will be as follows Clear all status registers to prevent anomalous events from generating an SRQ Set bits in the appropriate operation questionable measurement enable or transition register s Set the proper summary bit in the service request enable register At least one bit in this register must always be set but the exact bit s to be se...

Page 101: ...ence will clear the buffer of all readings and configure the buffer to store timestamps and source values smua nvbuffer1 clear smua nvbuffer1 collecttimestamps 1 smua nvbuffer1 collectsourcevalues 1 NOTE Setting collecttimestamps to 0 and collectsourcevalues to 0 will disable the storage of timestamps and source values Step 2 Perform measurements The following command sequence sets the measure cou...

Page 102: ... channel is 202V Higher voltage can be output by stacking connecting in series channels Stacking channels requires that all SMU channels except one float off earth ground Figure B 3 shows two Model 2602s configured with the four channels connected in series to output up to 161 6V 40 4V per channel Additional channels can be added stacked but the LO terminal of any SMU channel in the stack must nev...

Page 103: ...wer cord WARNING Connect metal safety shield to Safety Earth Ground using 18 AWG or larger wire Note On the 2602 1 connect Channel A LO to the Chassis at the rear panel LOs for the other channels must be isolated from Chassis NOTE Each stacked channel adds approximately 100μA of common mode current that is seen by the channels below it Therefore in the example above Model 2602 1 Chan A will measur...

Page 104: ...2636 1 Chan B Chan A 2602 2 2612 2 or 2636 2 DUT I1 I2 I3 I4 IT I1 I2 I3 14 How do I make contact check measurements Reference See Contact check measurements in Section 4 and command information in Section 12 of the Series 2600 Reference Manual for contact check details Contact check connections The contact check function1 prevents measurement errors due to excessive resistance in the force or sen...

Page 105: ...tact check measurement against the threshold is then made If it fails a more accurate contact check measurement is made and the test is aborted Otherwise the output is turned on and the test continues Figure B 6 Model 2635 2636 contact check connections smua reset Restore defaults smua contact speed smua CONTACT_FAST Set speed to fast smua contact threshold 10 Set threshold to 10Ω if not smua cont...

Page 106: ... problems To assure accurate low level measurements the integrity of the signal path must be maintained to the DUT including using both low noise triax cables and a suitable test fixture Figure B 7 shows typical connections for low current measurements The DUT in this example could be a low current semiconductor device a high megohm resistor or any other passive or active electronic device requiri...

Page 107: ...ut voltage to 100V and then measure and display both the current through the device as well as the resistance smua reset Restore defaults smua source func smua OUTPUT_DCVOLTS Set source to DCV smua source rangev 200 Select 200V source range smua source levelv 100 Output 100V DC smua measure rangei 1e 9 Select 1nA range smua source limiti 1e 9 Set current limit to 1nA smua source output smua OUTPUT...

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Page 109: ...ors 1 5 Display modes 1 13 DUT connections 1 12 F Factory scripts 3 2 Front panel summaries 1 2 G GPIB interface 2 2 B 2 H How do I interact with scripts using 3 3 How do I parallel channels to output higher current B 8 How do I run a script from the front panel 3 2 How do I set up the TSP Link system 4 2 How do I stack channels to output higher voltage B 6 How do I store measurements in non volat...

Page 110: ...b 1 5 RS 232 interface 2 2 B 2 Running a factory script 3 3 Running a user script 3 10 S Safety symbols and terms 1 2 Saving a script 3 7 Script Development pane 2 4 Service request Generating B 4 Polling for B 4 Programming example B 4 Setting up B 4 Source Selecting 1 12 Setting functions 1 16 Setting level 1 12 Source measure capabilities 1 7 Model 2601 2602 1 10 Model 2611 2612 1 10 Model 2635...

Page 111: ...o Unstable Will not read applied input Overload Calibration only Certificate of calibration required Data required attach any additional sheets as necessary Show a block diagram of your measurement system including all instruments connected whether power is turned on or not Also describe signal source Where is the measurement being performed factory controlled laboratory out of doors etc What powe...

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Page 114: ... of Keithley Instruments Inc All other trademarks and trade names are the property of their respective companies A G R E A T E R M E A S U R E O F C O N F I D E N C E Keithley Instruments Inc Corporate Headquarters 28775 Aurora Road Cleveland Ohio 44139 440 248 0400 Fax 440 248 6168 1 888 KEITHLEY www keithley com ...

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