In this section:
Introduction .............................................................................. 1-1
Systems documentation ........................................................... 1-1
System description ................................................................... 1-1
Introduction
If you have any questions after reviewing this information, please contact your local Keithley
Instruments office, sales partner, or distributor. You can also call the corporate headquarters of
Keithley Instruments (toll-free inside the U.S. and Canada only) at 1-800-935-5595, or from outside
the U.S. at +1-440-248-0400. For worldwide contact numbers, visit the
Systems documentation
Documentation for your system is available at
. Following is a list of documentation
for your system, including the document part numbers.
S535 Wafer Acceptance Test System Administrative Guide (S535-924-01)
S535 Wafer Acceptance Test System Reference Manual (S535-901-01)
Keithley Test Environment (KTE) Programmer's Manual (S500-904-01)
System description
The Keithley Instruments S535 Wafer Acceptance Test System is a configurable, instrument-based
system for wafer acceptance testing and semiconductor parametric characterization and testing.
Section 1
S535 system
