S530 Parametric Test System Administrative Guide
Section 5: Instrument specifications and documentation
S530-924-01 Rev. D / September 2017
5-3
Sourcing and measuring
The following instruments provide S530 source-measure capabilities
Model 2636B System SourceMeter Instrument
The 2636B Dual-Channel System SourceMeter
®
Instrument is a 6-1/2 digit, two-channel
source-measure unit (SMU) that simultaneously sources and measures voltage and current. You can
have up to six 2636B SMUs in the S530 system.
Figure 47: 2636B System SourceMeter Instrument
Features include:
Maximum current source-measure range: 10 A (pulsed)
Maximum voltage source-measure range: 200 V
Measurement resolution: 0.1 fA current, 100 nV voltage
Power: 200 W
Optional instrumentation
Keithley Test Environment (KTE) version 5.7.0 supports several optional instruments:
DMM7510 7½ Digit Graphical Sampling Multimeter
4220-PGU pulse card
4200-SCP2HR card (used for ring oscillator measurement)
The following diagrams show examples of how these instruments can be connected to the matrix.
The cards and columns of each instrument connection shown in the following diagrams may differ
from your actual system. The flexibility of the S530 configuration allows for various numbers and
combinations of instruments. Attempting to show examples of every possible scenario would be
prohibitive.
For high-voltage systems with two 707B switch matrices, the high-voltage connections for the
second matrix (not shown) are identical to the ones in the diagrams in this manual.
You will see graphics of the following examples:
S530 low-current using DMM7510
S530 high-voltage system using DMM7510
