Inficon XL3000flex, Translation Of The Original Operating Instructions

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6 | Operation INFICON
64 / 108 XL3000flex-Operating-instructions-jina83en1-07-(2105)
3
Start test:
Control unit: Functions > CAL > Test ext.
LD protocol: 4, Parameter 5
ASCII protocol: *CAL:PROOFEXT
IO1000 compare figure in "External Calibration Configuration and Start".
ð Request to "close calibration leak"
4 Sniffer mode: Remove sniffer line from calibration leak.
ð Leak rate signal decreases.
5 Confirm measured background value is stable:
Control unit: "OK"
LD protocol: 11, Parameter 1
ASCII protocol: *CAL:CLOSED
IO1000 compare figure in "External Calibration Configuration and Start".
ð
Test is completed if:
Control unit: Result is displayed
LD protocol: As with the other steps, the status must be queried
ASCII protocol: As with the other steps, the status must be queried
IO1000 compare figure in "External Calibration Configuration and Start".
6.3.4.5 External calibration with sniffer line SL3000XL
Low flow and high flow must be calibrated separately.
For calibration we recommend our test leak with catalogue number 12322 for forming
gas applications or 12237 for helium applications.
To ensure optimum calibration, the calibration leak must meet the following
requirements:
For calibration at Low-flow:
• Helium: Leak rate > 1 x 10
-5
mbar l/s
• 100 % H
2
: Leak rate > 1 x 10
-4
mbar l/s
• Forming gas (95/5): Leak rate > 2 x 10
-3
mbar l/s
For calibration at High-flow:
• Helium: Leak rate > 1 x 10
-4
mbar l/s
• 100 % H
2
: Leak rate > 1 x 10
-3
mbar l/s
• Forming gas (95/5): Leak rate > 2 x 10
-2
mbar l/s