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Maintenance works

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9.9

Turbomolecular pump TMH 071

The PFEIFFER turbomolecular pump requires a maintenance annually or every
4000 working hours. Please refer to the PFEIFFER operating instructions PM 800
504 BN/F and PT 0017 BN/B for more detailled informations. The maintenance work
should be performed by the INFICON service or an authorized INFICON service
partner.

9.10

Scroll Pump

Take the maintenance rates of the different scroll pump (IWATA, VARIAN) from the
maintenance plan in chapter

The maintenance of the scroll pump should be exclusively performed by the
INFICON service or an authorized INFICON service partner.

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Summary of Contents for UL5000

Page 1: ...Catalog No from software version T E C H N I C A L H A N D B O O K UL5000 Helium Leak Detector 550 500A 550 501A V 5 14 iina74e1 h 1408 Translation of the original handbook ...

Page 2: ...nt 15 1 4 2 Accessories and Options 16 1 4 2 1 Sniffer line SL200 16 1 4 2 2 Toolbox 16 1 4 2 3 Helium Bottle Holder 16 1 4 2 4 ESD Mat 16 1 4 2 5 RC1000 Remote control 17 2 Installation 18 2 1 Transportation 18 2 2 Working Location 20 2 3 Electrical Connections 21 2 3 1 Mains Power 21 2 3 2 Connections for the Data Acquisition Systems 23 2 3 2 1 Accessories 24 2 3 2 2 Digital Out 24 2 3 2 3 Digit...

Page 3: ...de 40 5 Operation of the UL5000 41 5 1 Display 41 5 2 The Screen in Run Up Mode 41 5 3 Display in stand by mode 41 5 3 1 Purging 42 5 4 The Screen in Measurement Mode 42 5 4 1 Call for Calibration 42 5 4 2 Speaker Volume 43 5 4 3 Status Line in the Display 43 5 4 4 Numerical Display Mode 44 5 4 5 Trend Mode 44 5 4 6 HYDRO S on off 44 6 Description of the Menu 45 6 1 Main Menu 45 6 2 View 47 6 2 1 ...

Page 4: ...6 4 Interfaces 64 6 6 4 1 Control Location 64 6 6 4 2 Recorder output 65 6 6 4 3 RS232 Protocol 66 6 6 4 4 Scaling Recorder Output 67 6 6 5 Miscellaneous 68 6 6 5 1 Time Date 68 6 6 5 2 Language 68 6 6 5 3 Leak rate filter 69 6 6 5 4 Mains Frequency 69 6 6 5 5 Service interval exhaust filter 69 6 6 5 6 Service message exhaust filter 70 6 6 6 Parameter save load 70 6 6 6 1 Save parameter set 71 6 6...

Page 5: ...8 9 2 INFICON Service 89 9 3 Key for Maintenance Schedule 89 9 4 Maintenance Plan 90 9 5 Maintenance groups 91 9 5 1 1500 hours maintenance 91 9 5 2 4000 hours maintenance 92 9 5 3 8000 hours maintenance 93 9 5 4 16000 hours maintenance 94 9 6 Description of the maintenance work 95 9 6 1 Opening the UL5000 95 9 7 Check Replace the filter cell 96 9 8 Replacing the Exhaust Silencer 98 9 9 Turbomolec...

Page 6: ...o modify the design and the specified data The illustrations are not binding 1 1 Notes on the Use of this Handbook 1 1 1 Safety Symbols Important remarks concerning operational safety and protection are emphasised as follows Caution Information on correct handling or use Disregard can lead to malfunctions or minor equipment damage Warning Information on preventing extensive equipment and environme...

Page 7: ...and the vacuum ranges are selected automatically The autoranging feature of the UL5000 covers the entire range or leak rates depending on the selected operating mode Not only the leak rate signal but also the pressure in the test sample inlet pressure P1 and the fore vacuum pressure P2 are used for control purposes Range switching between the main ranges is performed via valves Fine range switchin...

Page 8: ...nu has a tree architecture Default Status of the UL5000 when supplied by the factory GROSS GROSS is a measurement mode which allows high inlet pressure 1 to 15 mbar The smallest detectable leak rate is 1 10 6 mbar l s FINE FINE is the medium measurement mode with inlet pressure between 2 and 0 4 mbar Detection limit is 1 10 10 mbar l s ULTRA ULTRA is the most sensitive measuring range with inlet p...

Page 9: ...hone Fax Email Name Date and legally binding signature Companystamp 1 or not containing any amount of hazardous residues that exceed the permissible ex posure limits Process related contamination of product toxic no 1 yes caustic no 1 yes biological hazard no yes 2 explosive no yes 2 radioactive no yes 2 other harmful substances no 1 yes The service repair and or disposal of vacuum equipment and c...

Page 10: ... Blackburn Phone 44 1254 678 250 Fax 44 1254 698 577 Central America infoqro meisa com Italy davide giovanetti inficon com MEISA S a de C V Querètaro Phone 52 44 22 25 42 80 Fax 52 44 22 25 41 57 INFICON GmbH Castelnuovo Phone 39 045 6 40 25 56 Fax 39 045 6 40 24 21 China reach china inficon com Israel urimark mark tec co il INFICON LTD Hong Kong Phone 852 2862 8863 Fax 852 2865 6883 Mark Technolo...

Page 11: ...8 112 Fax 49 221 56788 9112 Republic of South Africa vacuquip hotmail com Turkey jhj agramkow dk Vacuquip Randburg Phone 27 73 15 78 355 Agramkow Sonderborg Phone 45 741 236 36 Fax 45 744 336 46 Russia leakdetection service inficon com Ukraine leakdetection service inficon com INFICON GmbH Cologne Phone 49 221 56788 112 Fax 49 221 56788 9112 INFICON GmbH Cologne Phone 49 221 56788 112 Fax 49 221 5...

Page 12: ...t the manufacturer Rules for decontamination will be developed then If the leak detector already has been in contact with dangerous gases please fill the declaration of contamination and sent it back with the leak detector to INFICON When there are parts that have to be cleaned please fill the declaration of deconta mination too and send it to INFICON before you send the parts S TOP Danger Caution...

Page 13: ...g capability 25 m3 h 17 6 cfm 50 Hz Pumping speed Helium at the inlet EN 1518 30m h 21 1 cfm 60 Hz in vacuum mode GROSS mode 8 l s FINE mode 20 l s ULTRA mode 20 l s Detectable masses 2 3 and 4 Mass spectrometer 180 magnetic sector field Ion source 2 filaments Iridium Yttriumoxide Inlet port DN 40 KF Run up time after starting 4 min Caution To get down to the minimum detected leak rate range some ...

Page 14: ...ials in the event of complaints about damage Tipp For unpacking please use the wedge which is part of the packaging Power supply single phase model dependent Part no 550 500A 230 V 50 Hz Part no 550 501A 115 V 60 Hz Power consumption 1200 VA Type of protection IP20 Power cords EU USA UK 3 m Valves solenoid Dimensions L W H incl handle in mm 1068 525 1083 Dimensions L W H incl handle in inches 42 2...

Page 15: ...row 1 power cord fixture see arrow 2 Set of fuses see arrow 3 Set of tools see arrow 4 Bellow Clips 2 2 see arrow 5 Folder with documents Technical Handbook UL5000 Spare Parts List UL5000 hooks to wrap power cord with screws see arrow 6 Tool to open the UL5000 see arrow 7 O Ring with filter for use at applications with particles Tool box detachable ESD mat Fig 1 2 Accessories ...

Page 16: ... 1 4 2 3 Helium Bottle Holder The helium bottle holder allows you to carry a helium reservoir and a spray gun with the UL5000 Only small and midsize bottles max 10 l 200 bar will fit without influ encing the stability of the UL5000 1 4 2 4 ESD Mat This mat is put on the working surface of the UL5000 and is clamped and grounded by the inlet port ring It avoids electrical discharges between the work...

Page 17: ...a can easily be downloaded to a USB stick to save it An internal trigger can be set to provide a warning if the limit leak rates are exceeded An optical warning is shown on the display and an acoustic warning signal is sounded on the integrated loudspeaker or the connected headphones The RC1000 remote control is housed in a robust housing to enable ergonomic working Magnets on the underside of the...

Page 18: ... There are orange labels on the bottom part pointing to the screws Caution The UL5000 is not equipped with any crane eyes and must therefore not be transported using lifting equipment Caution The UL5000 must only be pushed along using the handle provided for this purpose Don t use the handle to lift Caution Your feet can be pinched Keep your feet away from the rollers Caution Your feet can be run ...

Page 19: ...re tightened to the chassis plate For operation of the UL5000 the screws should be loosened To loosen the screws first loosen the counter nut that is accessible from underneath Loosen the screws approximately 10 mm above the chassis plate anf tighten then the counter nuts again Fig 2 1 Fig 2 2 ...

Page 20: ...ired position and arrest the castors Fig 2 3 Warning The UL5000 is designed for indoor use only Caution Ensure a sufficient air cooling The air inlet as well as the air discharge openings must never be obstructed Caution The UL5000 can be locked by arresting the castors of the front wheels to avoid movements on skewness Caution Make sure that you can always reach the mains plug ...

Page 21: ...is purpose at the back side of the instrument S TOP Danger Caution Exhaust gases and fumes Exhaust gases and fumes from oil sealed pumps may be harmful to health For operation in poorly ventilated rooms an exhaust pipe should be connected to exhaust connection 5 depending on the application and gases used S TOP Danger Caution mains voltage Improperly grounded or fused products can lead to fatal in...

Page 22: ... coming out by using the power cord fixture as shown S TOP Danger Only 3 core mains cables having a protection ground conductor must be used Operation of the UL5000 where the ground conductor has been left unconnected is not permissible Fig 2 4 secure fixture power cord Fig 2 5 storing power cord ...

Page 23: ... remove the plastic pins at the plug accordingly the plug fits the socket Notice The connections for external devices are safely separated from the mains and safe low voltage 1 Accessories 2 Digital Out 3 Digital In 4 Recorder 5 RS232 6 Remote Control RC1000 Wireless Transmitter 7 Mains Socket 8 Mains Switch 9 Hole to mount cable hooks 10 Speaker 11 Vent 12 Purge Fig 2 6 Connections Caution The el...

Page 24: ...el 2 is exceeded or the machine is not in condition of measuring Zero active Is closed in case Zero function is running Ready Is closed in case machine is ready for measurement Emission on no error CAL active Closed when machine is in calibrating routine CAL Request Is opened in case of calibration request During external calibration an open output indicates that the external calibrated leak has t...

Page 25: ...low to high activate purge Change from high to low deactivate purge Clear Change from low to high confirm error message CAL Change from low to high When machine is in stand by mode start internal calibration In case machine is measurement mode start external calibration Premise external calibration test leak has to be open and leak rate signal is stable Change from high to low External calibration...

Page 26: ... of this hum interference is apparent it is recommended to operate the UL5000 and the chart recorder from the same mains phase If this is not possible you must make sure that the frame ground of both instruments is kept at the same potential 2 3 2 5 RS232 This RS232 C interface Fig 2 6 5 is wired as data communication equipment DCE and permits the connection of a personal computer PC for monitorin...

Page 27: ...n the test is finished If it is required the parts can be vented with a different gas i e fresh air dry air nitrogen at max 1050 mbar pressure In this case a vent hose has to be connected to the hose coupling Fig 2 6 10 2 4 4 Purge For purge modes it is recommended to use Helium free gases at atmospheric pressure Ambient air can be contaminated with Helium due to spraying or charging In this case ...

Page 28: ...1 1 10 9 mbar l s Trigger level 2 1 10 8 mbar l s Leak rate external test leak Vacuum 1 10 7 mbar l s Leak rate external test leak Sniffer 1 10 5 mbar l s Vent delay 2 seconds Automatic purge OFF Pressure unit mbar Minimum volume 0 Beep ON Maximum evacuation time 30 minutes Audio Alarm Type Trigger Alarm Maximum inlet pressure when sniffing 1 mbar Minimum Inlet pressure when sniffing 0 1 mbar Numb...

Page 29: ...by step to start the initial operation See Chapter 5 for a more detailed description 3 2 1 Startup and Measure 1 Unpack the UL5000 and inspect it for any external damage See Chapter 1 4 Unpacking 2 Connect the instrument to the mains power See Chapter 2 3 1 Mains Power 3 Switch on the leak detector by using the mains switch Fig 2 6 8 After power on a welcoming picture appears on the screen of the ...

Page 30: ... 1 2 is blanked off If not please mount a blind flange with O Ring on the inlet port 5 Press the START Button Fig 3 2 6 The inlet will be evacuated and the measured leak rate will be displayed a moment later This is the measurement mode If a test part was connected you would start spraying Helium to identify leaks Fig 3 1 Top view of the UL5000 Pos Description Pos Description 1 Control Panel 2 Inl...

Page 31: ...0 will go to Stand by If you press STOP a few seconds the inlet of the UL5000 will be vented 8 To finish the startup procedure please proceed with 16 For calibration proceed with 9 Fig 3 2 Control Panel Pos Description Pos Description 1 LC Display 8 Soft Key no 5 2 Soft Key no 1 9 Soft Key no 6 3 Soft Key no 2 10 Soft Key no 7 4 Soft Key no 3 11 Soft Key no 8 5 Soft Key no 4 12 MENU Button 6 START...

Page 32: ...vented now 3 2 3 Verification To verify the accuracy please proceed through the following steps A test leak is required If a test leak is not available please continue with 16 11 Remove the blind flange from the inlet port and connect the open helium test leak to the inlet port 12 Press the START Button Fig 3 2 6 again The inlet will be evacuated and the leak rate of the test leak will be measured...

Page 33: ...e UL5000 is a self contained unit in a metal housing on wheels This housing contains the entire vacuum system and the according power supplies On top of the unit is the inlet port and the display 4 2 1 Vacuum System The vacuum diagram below shows the major components inside the UL5000 The mass spectrometer is mainly composed of the ion source the magnetic sepa rator and the ion collector Fig 4 1 V...

Page 34: ...ump which in turn is backed up by a scroll pump Besides maintaining the pressure in the mass spectrometer the pump system is used to evacuate the test parts It is made sure that the pressure in the mass spectrometer is low enough under all circumstances The valves V1a V1b V2 V4a V4b control the gas flows when measuring Valves V5 and V8 are used to vent the system and the Turbo pump Valve V7 opens ...

Page 35: ...f the machine messages warnings and errors 4 2 2 2 START Button Pushing the START Button Fig 4 2 6 enables the UL5000 to start the measure procedure If the START button is pushed again in measurement mode the maximum leak rate indicator hold function is activated This indicator shows the maximum leak rate between START and next STOP Fig 4 2 Control Panel Pos Description Pos Description 1 LC Displa...

Page 36: ...result the displayed leak rate then is To reverse the ZERO function please keep the push button pressed for about 3 seconds After pressing ZERO the decreasing background is fitted to the course automatically So it is possible to recognize leaks even when the signal is decreasing rapidly Please also refer to the pictures below When the raw signal declines below the saved background value the backgr...

Page 37: ...ushing the MENU button again leads back to the screen of the previous working mode The software shows the last screen that was used before 4 2 2 6 Soft Keys The function of the eight Soft Keys Fig 4 2 2 5 and 8 11 depends on the current menu Only key 1 and 8 very often have the functions Back Cancel Softkey no 1 and OK Softkey no 8 Special Functions When inputs are allowed or when settings can be ...

Page 38: ...it you need to change To change a digit to a specific number press the corresponding pair of numbers A submenu opens and the desired number can be selected The submenu closes automatically and the next digit of the total number now is inverted Having reached the last digit all corrections have to be confirmed by OK Soft Key no 8 Example To change the trigger level 5 0 x 10 9 mbar l s to 3 x 10 9 m...

Page 39: ... remains constant or increases only slowly The following diagrams show the gas flow during evacuation and during the modes GROSS FINE and ULTRA The condition for the evacuation process described is maintained until the inlet pressure p1 has dropped below 15 mbar Now valve V2 opens Possibly present helium may now flow upstream against the pumping direction of the turbo molecular pump into the mass ...

Page 40: ...fer Mode In sniff mode a sniffer line preferably the INFICON standard sniffer line 14005 is connected to the inlet port When pressing the START Button the system starts to pump air through the sniffer line Due to the constant gas flow through the sniffer line the software will range through GROSS into FINE mode and stay there The inlet pressure will not drop further down By measuring the inlet pre...

Page 41: ... background leak rate will further reduce As soon as the leak rate is low enough in respect to your requirements you may start spraying Helium to search for possible leaks When you are finished please press STOP and hold the button a few seconds to vent the part under test 5 1 Display The display is used to either show leak rate signals or program specific set ups and get information by means of t...

Page 42: ...ent modes Numerically combined with a bargraph Fig 5 1 Trend mode leak rate versus time Fig 5 2 In the lower right corner of the display next to the Soft Key no 8 you will find a symbol that allows to switch between the display modes by pressing Soft Key no 8 See Chapter 5 4 4 Numerical Display Mode and refer to chapter 5 4 5 for explana tions of the different display modes Access to calibration S...

Page 43: ...ut can exceed a level of 85dB A Do only expose to the audio alarm for a short time or use ear protection Symbol of display Meaning Explanation Volume level See Chapter 5 4 2 Speaker Volume S1 Trigger 1 If the trigger values are exceeded these signs are inverted White on black background S2 Trigger 2 see Trigger 1 Detected mass Number of dots indicates the mass number 4 dots Helium 2 dots Hydrogen ...

Page 44: ...rtical lines a solid line for trigger 1 and a dotted line for trigger 2 In addition the inlet pressure is displayed in smaller figures above the bargraph 5 4 5 Trend Mode In trend mode the leak rates are displayed over time Fig 5 2 In addition the actual leak rate and inlet pressure also are displayed digitally The time axis can be defined in the menu See Chapter 6 2 3 The intensity axis y axis is...

Page 45: ...ndicated by a dot and printed in italics The next page gives an overview of the entire menu architecture Fig 6 2 Fig 6 1 The Main Menu Key No Name Description 1 Back Return to the previous screen 2 View Display settings like scaling contrast system background Please refer to Chapter 6 2 3 Mode Selection of different working modes like Vacuum Gross only Sniff Please refer to Chapter 6 3 4 Trigger A...

Page 46: ...t leak Machine factor Booster TMP mode Zero Background Background Suppression Calculate Inlet Area Background Zero Mass Interfaces Control Location Recorder output RS232 Protocol Scaling Recorder Output Miscellaneous Time Date Language Leak rate filter Mains Frequency Service interval exhaust filter Service message exhaust filter Parameter save load Save parameter set Load parameter set Monitoring...

Page 47: ...ak rates may change easily over several decades Fig 6 3 The View Menu Key No Name Description 1 Back Return to the main menu 2 Scale linear logarithmic Settings for bargraph and trend mode Please refer to Chapter 6 2 1 3 Display range auto manual Manual or automatic scaling Please refer to Chapter 6 2 2 4 Time axis Time axis in trend Please refer to Chapter 6 2 3 5 Contrast Display contrast Please...

Page 48: ... axis Main Menu View Time axis The length of the time axis in trend mode can be changed in steps of 16 960 s Softkey 2 Manual The upper limit of the displayed range can be set manually Softkey 3 Arrow down Decrease the upper limit if manual is chosen The minimum value is 10 11 mbar l s Softkey 6 Automatic The limit of the displayed range will be chosen automatically Softkey 7 Arrow up Increase the...

Page 49: ...ed for a long time will show a background in the 10 11 mbar l s range Under normal conditions the background level is in the 10 10 mbar l s or low 10 9 mbar l s range When pressing START the current internal background is subtracted from all further measured signals automatically Thus it is made sure that only the net leak rate from the part under test is measured Switch off the UL5000 and turn it...

Page 50: ...es Main Menu View Decimal places The number of the decimal places of the displayed leak rate can be chosen The default setting is 1 Two decimals are especially useful when the I CAL leak rate filter Please refer to Chapter 6 6 5 3 is used 6 2 7 Lower display limit Main Menu View Lower display limit This parameter defines the lower leak rate limit in the measurement ranges This is valid for vacuum ...

Page 51: ...e used Vacuum mode with the possibility to use HYDRO S HYDRO S improves your time to test Water vapor desorption in a test object generates an unwanted background signal HYDRO S separates and eliminates this signal from the helium signal so testing can begin sooner After changing to this mode a new calibration necessary Please refer to Chapter 6 6 1 4 HYDRO S automatic ON 5 Not used in this menu 3...

Page 52: ...igger 2 are displayed inverted if the leak rate exceeds becomes higher than the programmed value Relay Output The relays on the I O interface Fig 2 6 2 will switch See Chapter 2 3 2 2 Digital Out for further details Alarm Loudspeaker Trigger level 1 defines at which level the various alarm types react See Chapter 6 4 6 Audio alarm type Fig 6 5 The Trigger Alarms Menu Key No Name Description 1 Back...

Page 53: ...oudness is the minimum speaker volume that cannot be exceeded to even lower values Thus it is avoided that the actual volume is accidentally reduced to a value that is below the noise level of the environment The actual volume can be adjusted between 15 maximum and the value defined as minimum loudness Softkey 2 Arrow down Decrease the minimum loudness The minimum value is 0 Softkey 3 Arrow down D...

Page 54: ...ump down in a chamber test system it might be necessary to block an alarm for some time after pressing START This delay time of the alarm can be changed After pressing START the loudspeaker is activated as soon as the leak rate drops below trigger level 1 or after the entered alarm delay time has elapsed This setting is only active for the audio alarm types SETPOINT and TRIGGER ALARM See Chapter 6...

Page 55: ...h Example The Trigger level 1 is 4 10 7 mbar l s So the window where the tone changes reaches from 4 10 8 mbar l s up to 4 10 6 mbar l s 6 4 6 2 Leak rate prop The frequency of the accoustic output is proportional to the reading on the bargraph display The frequency ranges from 200 Hz to 1300 Hz See Chapter 6 2 1 Scale linear logarithmic for the definition of the number of decades Softkey 2 Pinpoi...

Page 56: ...s proportional to the leak rate Fig 6 7 6 4 6 4 Trigger alarm As soon as the leak rate increases above trigger level 1 a multi tone signal is gene rated The tone does not vary with the leak rate 6 5 Calibration Main Menu Calibration See Chapter 7 for a detailed description of the calibration Fig 6 8 Fig 6 7 Setpoint Fig 6 8 The Calibration Menu Softkey 4 internal Softkey 8 external ...

Page 57: ... Description 1 Back Return to the main menu 2 Vacuum settings Settings of vacuum system related functions See Chapter 6 6 1 3 Zero Background See Chapter 6 6 2 4 Mass Switching between helium and hydrogen See Chapter 6 6 3 5 Interfaces See Chapter 6 6 4 6 Miscellaneous See Chapter 6 6 5 7 Parameter save load See Chapter 6 6 6 8 Monitoring functions Choose functions of protection of the UL5000 in w...

Page 58: ...ng to standby mode Softkey 2 Automatic purge Purging Refer to Chapter 6 6 1 1 Softkey 3 Vent delay Please refer to Chapter 6 6 1 2 Softkey 4 Booster TMP mode Please refer to Chapter 6 6 1 7 Softkey 5 Vacuum ranges See Chapter 6 6 1 3 Softkey 6 Leak rate internal test leak Please refer to Chapter 6 6 1 5 Softkey 7 Machine factor Please refer to Chapter 6 6 1 6 Softkey 8 Booster TMP mode Please refe...

Page 59: ...The inlet port will be vented with a time delay of 1 second Softkey 4 After 1 5 seconds The inlet port will be vented with a time delay of 1 5 seconds Softkey 6 after 2 seconds The inlet port will be vented with a time delay of 2 seconds Softkey 7 No vent The inlet port cannot be vented with the STOP button Softkey No 2 ULTRA ONLY In this mode the UL5000 remains in the area ULTRA after running und...

Page 60: ...Softkey 7 enable If HYDRO S automatic is enabled the UL5000 switches HYDRO S on and off at the following conditions HYDRO S is switched on if ZERO is off and p1 0 3mbar and Leak rate is between 2 10 10 mbar l s and 3 10 10 mbar l s and HYDRO S was not switched on manually The lower detecting limit for HYDRO S is 1 10 10 mbar l s Softkey 3 disable HYDRO S is disabled Leak rate higher than 3 10 10 m...

Page 61: ...de See Chapter 4 2 2 7 Numerical Entries for the description of the entry Adjust the machine factor to the value 400 when using the helium sniffer QUICK TEST 6 6 1 7 Booster TMP mode Main Menu Settings Vacuum settings Booster TMP mode 6 6 2 Zero Background Main Menu Settings Zero Background The kind of background suppression inside the UL5000 and the function of the Zero button can be selected Sof...

Page 62: ...ion can be started by pressing softkey no 8 The procedure of the calculation takes about 2 minutes the status is displayed during the process The helium back ground is indicated as the measured ion current in the mass spectrometer If the above perequisites are met you can also calculate the inlet area background by choosing the button CAL function Notice It is recommended to update the inlet area ...

Page 63: ...nal is not stable enough to detect a leak of the programmed value of Trigger 1 The function I Zero enables the ZERO button only at stable leak rate signals This is displayed in the status bar through the STABLE signal By the standard Zero function the actual background value will subtracted when pressing ZERO At falling background signals smaller leaks could be missed because the subtracted backgr...

Page 64: ...the Digital In connector See Chapter 6 6 4 2 The START STOP and ZERO buttons at the control panel are locked Softkey 3 RS232 The UL5000 is controlled via RS232 interface by an external computer In this mode the UL5000 can not be controlled via keyboard The START STOP and ZERO button at the machine are deactivated Softkey 5 Local PLC The UL5000 is controlled via the Digital In connector or the STAR...

Page 65: ... can be recorded The signals p1 and p2 have the characteristics of the Pirani gauge TPR265 see chart in appendix Softkey 1 Cancel Return to the previous menu without any changes of the present settings Softkey 2 Arrow up Adress recorder output 1 or 2 Softkey 3 Arrow down Adress recorder output 1 or 2 Softkey 5 Help Softkey 6 Arrow up Behaviour recorder output For further information see keywords b...

Page 66: ...6 10 10 10 10 LR in channel 1 4 2 0 2 10 10 10 10 Softkey 3 Diagnostics Gives the chance to read parameters e g during maintenance Softkey 4 Printer Manual Leak rates measured by this function can be sent to RS232 printers or PC The measured value can be displayed via hyperterminal programs The baudrate of this printer function is set to 9600 8N1 Connected data loggers must be set to these paramet...

Page 67: ...ting to a computer Notice The calibration function of the Leak Ware is not appropriate to operate with the UL5000 Please execute the function STORE DATE in the operating mode Single Part Measurement for starting the record of the measured values Softkey 7 ASCII Gives the chance to use the UL5000 via a RS232 terminal Softkey 2 Arrow up Adjust decade of the upper limit value Softkey No 3 Arrow down ...

Page 68: ...ered language can be selected by pressing Softkey 3 and 7 The default setting is english Selectable languages English German French Italian Spanish Polish Chinese Mandarin Japanese Katakana Korean Notice The default setting can be resetted by pressing the softkey 2 and 6 simultaneously during run up of the leak detector Softkey 2 Time Date See Chapter 6 6 5 1 Softkey 3 Language See Chapter 6 6 5 2...

Page 69: ...ains Frequency Main Menu Settings Miscellaneous Mains Frequency The mains frequency takes the different pumping speed of the scroll pump into account The frequency of the mains power supply can be selected The default setting is 50 Hz for 230 V and 60 Hz for 115 V 6 6 5 5 Service interval exhaust filter Here you can enter the service interval of the exhaust filter Softkey 3 Fixed A filter with a f...

Page 70: ...s to save and load individual settings or reload the default settings Softkey 3 Off Softkey 5 Help Softkey 7 On Warning If the service messages are ignored and the exhaust is not replaced a risk for overheating the pump motor exists Softkey 2 Save as PARA SET 1 See Chapter 6 6 6 1 Softkey 3 Save as PARA SET 2 See Chapter 6 6 6 1 Softkey 4 Save as PARA SET 3 See Chapter 6 6 6 1 Softkey 5 Load defau...

Page 71: ... a corresponding message will appear when 30 minutes have elapsed after power on or if the temperature of the UL5000 has changed by more than 5 C 9 F since the last calibration Particle protection Main Menu Settings Monitoring functions Particle protection This mode can be switched on and off If switched on the UL5000 will not start pumping down before the inlet has not dropped below 1 mbar I e it...

Page 72: ...mped with the UL5000 The control signal of the Pirani may vary at other gases than air Therefore it may be necessary to adjust the switching points Pressure limits for sniff mode Main Menu Settings Monitoring functions Pressure limits for sniff mode This function is automatically activated in sniff mode The pressure limits define an upper and lower limit of the inlet pressure The upper limit is 2 ...

Page 73: ...on the desired reaction time for the gross leak message and secondly on the volume of the test sample and the effective pumping speed Caution If the evacuation time was set to endless the oil level of the mechanical pump should be checked more often Softkey No 2 Decreasing maximum evacuation time until p1 100 mbar Within this period of time the inlet pressure at the test flange must have dropped b...

Page 74: ...lves manually are possible in this menu only For further information please refer to Service Menu iipa74e1 b Fig 6 12 The Information Menu Softkey 2 View settings The current settings will be displayed on 4 pages e g trigger levels test leak mass date and time Softkey 3 View internal data Information on measured internal data is provided on 4 screens Softkey 4 Vacuum diagram The vacuum diagram of ...

Page 75: ...tkey 2 Access to CAL function Please refer to Chapter 6 8 1 Softkey 3 Access to Trigger Alarme menu Please refer to Chapter 6 8 2 Softkey 7 Change Device PIN Please refer to Chapter 6 8 3 Softkey 8 Change Menu PIN Please refer to Chapter 6 8 4 Softkey 3 Off The calibration function is only available at the main menu If the Menu PIN See Chapter 6 8 4 is activated you need this PIN to start a calibr...

Page 76: ...t 0000 the UL5000 will ask for this PIN directly after power on Without device PIN the UL5000 does not even switch on the pumps Notice Under all circumstances memorize the PINs The PIN can only be reset by INFICON s service organization 6 8 4 Change Menu PIN Main Menu Access Control Change Menu PIN The access to the menu can be restricted by entering or changing the personal identification number ...

Page 77: ...rformed at least once a day Otherwise the frequency of calibration depends on the frequency of use Notice To get an optimized calibration the machine has to warm up at least 20 minutes before use Test leaks for calibration should not have a range lower than 1 10 9 mbar l s to ensure a stable calibration signal 7 2 The calibration routines There are 3 ways to get into the calibration routine In Sta...

Page 78: ...al Calibration is selected it is assumed that the UL5000 is connected to a component under test if not please go to Automatic Internal Calib ration After starting the Manual Internal Calibration the UL5000 pumps down the test part if not already under vacuum and opens the internal leak standard Depending on the volume of the part it may take some time for the helium signal to stabilize Therefore t...

Page 79: ...eak rate printed on the test leak and compare it with the leak rate at the display If the leak rates are not identical press Edit leak rate Soft Key no 4 and correct the value If the leak rates are okay press START Soft Key no 8 Fig 7 1 External Calibration Step 1 No action required Fig 7 2 External Calibration Step 2 The bargraph display shows a signal which must not vary much If so please press ...

Page 80: ...hnical handbook 1408 No action required Fig 7 4 External Calibration Step 4 No action required Fig 7 5 External Calibration Step 5 Close the external leak standard and confirm with OK Soft Key no 8 Fig 7 6 External Calibration Step 6 ...

Page 81: ...e g after changing the system confi guration or not e g because of a maloperation Notice When calibration is started via SPS or RS232 no testing for plausibility is performed When calibrating internal it is also monitored if the newly calculated factor of calib ration is higher than 10 or lower than 0 1 In this case a warning see W81 resp W82 in Chapter 8 2 is displayed and the calibration will be...

Page 82: ...essing OK Key no 8 After that the UL5000 can be used again possibly with some restrictions As long as a warning status exists the status line shows a warning triangle See Chapter 5 4 3 The warning messages can be displayed in STANDBY by pressing the button shows up when warning message occured Error Messages Errors are events which force the UL5000 to interrupt its measurement operations In this c...

Page 83: ... expired W18 Exhaust filter service interval expired The service interval for the exhaust filter is expired W21 EEPROM write timeout EEPROM defective MC 68 defective W22 EEPROM parameter queue overflow EEPROM defective MC 68 defective E23 24V of the OPTION socket is too high The tension 24V at socket OPTION is too high E24 24V at socket OPTION is too low Fuse F2 on the I O board has blown E25 Rece...

Page 84: ...tial exceeds its nominal value by over 10 The actual anode potential exceeds its nominal value by 10 The nominal value can be displayed in the service menu MSV is faulty E41 The anode potential has dropped below its nominal value by over 10 The actual anode potential has dropped below its nominal value by 10 The nominal value can be displayed in the service menu Air inrush MSV is faulty E42 Nomina...

Page 85: ...revacuum pump will be longer Temperature sensor is faulty E56 Inlet pressure p1 too low U 0 27 V Pressure sensor faulty Change thermovac sensor that measures p1 E58 Foreline pressure p2 too low U 0 27 V Pressure sensor faulty Change thermovac sensor that measures p2 E60 p2 10mbar after 5 minutes since power on PV 3 8 mbar after t 5 minutes since switching on Run up time of the forevacuum pump is t...

Page 86: ...between opened and closed calibrated leak is less than 10 mV Calibrated leak has not been closed properly W79 Signal of test leak is too small Calibrated leak is too small or has not been opened Preamplifier voltage 10 mV W80 Please calibrate machine newly The automatic request of calibration is activated See Chapter 7 2 1 1 and has fulfilled at least one of the conditions 30 minutes are passed si...

Page 87: ...se check your settings Writing access was interrupted Please check all adjustments An update of software was done In this case the notice can be ignored When warning comes up again after powering up the EEPROM might be faulty W86 AC DC factor too low Calibration conditions not maintained Value of leak rate not entered correctly Test leak faulty W87 AC DC factor too high Calibration conditions not ...

Page 88: ...g message at the display of the UL5000 The message will be displayed until the maintenance rate is met The 1500 hours maintenance can vary depending on the application of the leak detector I Repair level I Customer II Repair level II Customer with technical training III Repair level III INFICON service engineer Warning Please observe the security remark in this chapter Warning Make sure the tools ...

Page 89: ...n reproduced on the next to the last page of this handbook Please attach this form to the equipment or enclose it with the equipment This Declaration of Contamination is required to meet German Law and to protect our personnel INFICON must return any equipment without a Declaration of Contami nation to the sender s address 9 3 Key for Maintenance Schedule Warning Presumed Risk If it is to be assum...

Page 90: ...1671 TS 620 Exchange the scrollmodule X III 200001665R TMH 071 Replace the lubricant reservoir X II u III 200000577 Exchange of bearings X III Valve bloc Clean the valves replace seals for valves 2 X III 200000594 Take apart the valve bloc and clean it 2 X III 200000593 Replace filters for vent and purge line 1 X1 I II III 200000683 Adjust the Pirani X III Silencer Exchange the silencer X1 I II II...

Page 91: ...e can be performed by an operator or a maintenance person The filter cell in front of the fans should be checked and replaced if dirty By operating under worth conditions the maintenance rates can be appropriatly reduced Replace the silencer at the exhaust of the leak detector Notice An obstructed silencer can lead to damaging the scroll pump Work to be performed Required materials P N Check and o...

Page 92: ...nnual refurbishing of the internal Helium standard leak is recommended and an other certificate will be delivered The internal Helium standard leak can be refurbished at INFICON GmbH in Cologne exclusively The maintenance work will take approximately 3 hours Work to be performed Required materials P N Replace the Lubricant Reservoir of the Turbomolecular Pump TMH 071 every 2 years Lubricant Reserv...

Page 93: ...has not been replaced then after 12000 working hours the scroll module must be exchanged The maintenance work will take approximately 6 0 hours Work to be performed Required materials P N Exchange the scroll module IWATA ISP 500B Scroll module for IWATA ISP 500B 200000217R Replace the Tip Seal Varian TS 620 Tip Seal 2000001671 Restore the Lubricant Reservoir TMH 071 Lubricant Reservoir for TMH 071...

Page 94: ...k will take approximately 10 0 hours Work to be performed Required materials P N Exchange the scroll module IWATA ISP 500B Scroll module for IWATA ISP 500B 200000217R Exchange the scroll module Varian TS 620 Scroll module for Varian TS 620 200001665R Replace TMH 071 Turbo pump TMH 071 200000569R Take apart the valve bloc and clean it Replace the seals for valves Set of seals for valve bloc Set of ...

Page 95: ...t port Remove the side covers by using the wedge Fig 9 1 Push down the wedge to release the side covers The location for the wedge is marked with two dot marks at the top side of the side covers See Fig 9 1 2 Open the both side covers in the same way S TOP Danger The protective conductor screw at the chassis plate should not be loosened The operator is not protected against electric shock by worki...

Page 96: ...ctor Required tool Wedge Accessories Required material Spare Filter cell P N 200000685 Please refer to section 9 6 1 to open the unit Catch the filter cell by using your two fingers Fig 9 2 a and pull it out of the guide plate You can also press the filter to the front with an appropriate tool throw the ejection drilling Fig 9 2 3 located at the back side Fig 9 1 Opening the UL5000 Pos Description...

Page 97: ... black arrow Notice The white surface of the filter cell which is marked with clean air side must show towards the fans Push the filter cell into the guide plate and close the UL5000 by pressing the side cover Fig 9 2 Replace the filter cell Pos Description Pos Description a Filter handle 2 Guide plate of the filter cell 1 Filter cell 3 Ejection drilling a a 2 1 3 ...

Page 98: ... of the exhaust and tight it Unscrew the hexagon screw from the bottom side of the plexiglas cabinet and drain off using an adequate vessel Please turn in and tighten the screw after draining Check the oil level of the rotary vane pump D16 Band fill it up if necessary Fig 9 3 Replacing the exhaust silencer Pos Description Pos Description 1 Silencer 4 Reducing piece 2 Silencer adapter 5 Centering r...

Page 99: ...ions PM 800 504 BN F and PT 0017 BN B for more detailled informations The maintenance work should be performed by the INFICON service or an authorized INFICON service partner 9 10 Scroll Pump Take the maintenance rates of the different scroll pump IWATA VARIAN from the maintenance plan in chapter 9 4 The maintenance of the scroll pump should be exclusively performed by the INFICON service or an au...

Page 100: ...s 14 E Electrical Connections 21 Exhaust 27 exhaust filter 68 external calibration 78 F FINE 39 FINE only 59 G GROSS 39 H Hand Set 23 26 Helium leak rate 13 Humidity 14 I I CAL 69 INFICON Service 10 information 74 Inlet area background suppression 61 Inlet port 13 27 Inlet pressure 13 Installation 18 Ion source 13 ion source 34 L language 68 Leak rate 13 loud speaker 43 M Machine factor 61 mainten...

Page 101: ... pump 39 service 74 Service Center 10 service contract 9 Setpoint 55 sniff mode 40 sniffer line 33 40 Sniffer mode 13 START Button 30 Startup 29 STOP Button 31 Storage temperature 14 T Temperature ambient 14 storage 14 time axis 44 Time Date 68 Transportation 18 trend mode 44 Trigger 43 Trigger alarm 55 turbo pump 39 turbomolecular pump 34 Type of protection 14 U ULTRA 39 ULTRA only 59 V Vacuum Di...

Page 102: ...102 Declaration of Conformity iina74e SIX fm technical handbook 1408 Declaration of Conformity ...

Page 103: ...Declaration of Conformity 103 iina74e SIX fm technical handbook 1408 ...

Page 104: ... 498 D 50968 Cologne Germany UNITED STATES TAIWAN JAPAN KOREA SINGAPORE GERMANY FRANCE UNITED KINGDOM HONG KONG Visit our website for contact information and other sales offices worldwide www inficon com Dokument iina74e1 h 1408 ...

Page 105: ...Declaration of Conformity 105 iina74e SIX fm technical handbook 1408 ...

Page 106: ...er_level_1_sub png 150 dpi 38 Bilder Evacuation png 300 dpi 39 Bilder gross mode png 300 dpi 39 Bilder fine mode png 300 dpi 40 Bilder ultra mode png 300 dpi 40 Bilder UL5_measurement_mode_1 png 150 dpi 42 Bilder exclamation mark WMF 43 Bilder UL5_graph png 150 dpi 44 Bilder UL5_Main_menu png 150 dpi 45 Bilder UL5_view_menu png 150 dpi 47 Bilder UL5_mode_menu png 150 dpi 51 Bilder UL5_trigger_and_...

Page 107: ...lder UL5_CAL_press_OK_stable png 150 dpi 81 Bilder UL5_CAL_complete png 150 dpi 81 Bilder exclamation mark WMF 82 Bilder open ul5000 drw 96 Bilder change filter_chassis drw 97 Bilder change silencer drw 98 Bilder ul5000 07 06 2011 engl pdf 102 ...

Page 108: ...3 iina74e1RL fm technical handbook 1408 ...

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