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RSH-600 Operating Manual
Chapter 1
Introduction
1.1 Introduction
The RSH-600 rotary sensor is designed for the most demanding processes
employing very thick films and several different materials. See
Switching the crystal without venting the system makes it possible to run
automatically with continuous deposition. The fixed position of the crystal being
measured also makes it unnecessary to change the tooling factor.
RSH-600 can be used to deposit a different material on each of six crystals
providing greater measurement accuracy. Upon completion of deposition of one
material, the deposition controller may be programmed to switch crystals for the
next material. Switching crystals may also be actuated manually.
The RSH-600 sensor holds six crystals in a thermally shielded, water cooled
housing, insuring excellent crystal performance in temperature environments up to
300ºC. Crystals are housed in an easily removable Teflon
®
and stainless steel
crystal holder.
Crystal position is switched by applying a one second pulse to a 110/115 V (ac) or
24 V (dc) pneumatic valve. A 7-pin connector provides an indication of the number
of the active crystal. This may be used to interface with a thin film controller for
automatic crystal switching operation. Refer to the controller operating manual for
programming instructions.
Figure 1-1 RSH-600 and sensor head options