Inficon RSH-600, Operating Manual, Page: 15 / 27

2 – 4
RSH-600 Operating Manual
2.3 Crystal Sensor Installation
Install the sensor as far as possible from the evaporation source (a minimum of
30.5 cm (12 in.)) while still being in a position to accumulate thickness at a rate
proportional to accumulation on the substrate.
Figure 2-3 shows proper and
improper methods of installing sensors.
Figure 2-3 Sensor installation guidelines
To guard against spattering, use a source shutter to shield the sensor during the
initial soak periods. If the crystal is hit with even a minute particle of molten material
it may be damaged and stop oscillating. Even in cases when it does not completely
stop oscillating, it may immediately become unstable, or shortly after deposition
begins instability may occur.
Plan the installation to ensure that there are no obstructions blocking a direct path
between the sensor and the source. Install sensors in such a manner that the
center axis of the crystal is aimed directly at the source to be monitored. Verify that
the angle of the sensor location (with reference to the source) is well within the
evaporant stream.