tina48e1-c (2017-10) MPG400-401.om
3
Contents
Product Identification
2
Validity
2
Intended Use
2
Functional Principle
2
1
Safety 4
1.1
Symbols Used
4
1.2
Personnel Qualifications
4
1.3
General Safety Instructions
4
1.4
Liability and Warranty
5
2
Technical Data
6
3
Installation 9
3.1
Vacuum Connection
9
3.1.1
Removing the Magnet Unit (Only for Gauges With CF Flanges)
11
3.2
Electrical Connection
12
3.2.1
Use With an INFICON Controller
12
3.2.2
Use With Another Control Device
12
4
Operation 13
4.1
Measurement Principle, Measuring Behavior
13
5
Deinstallation 15
6
Maintenance 16
6.1
Adjusting the Gauge
16
6.2
Cleaning MPG400, Replacing Parts
18
6.2.1
Disassembling MPG400
18
6.2.2
Cleaning MPG400
19
6.2.3
Reassembling MPG400
20
6.3
Cleaning MPG401, Replacing Parts
21
6.3.1
Disassembling MPG401
22
6.3.2
Cleaning MPG401
23
6.3.3
Reassembling MPG401
24
6.4
Troubleshooting 25
7
Accessories 26
8
Spare Parts
26
9
Returning the Product
28
10
Disposal 28
Appendix 29
A:
Measuring Signal vs. Pressure
29
B:
Gas Type Dependence
30
ETL Certification
31
For cross-references within this document, the symbol (
→
XY) is used.
