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IC6 Operating Manual

12. RATE RAMP 2

Rate control, desired rate changing. [New
Rate 2, Start Ramp 2, Ramp Time 2]

Active

Active

11

13. TIME POWER

Crystal failed; source maintained at
average control power and average rate
prior to crystal failure. [Failure Actions]

Active

Inactive

12

14. Manual

Manual is entered via front panel key or
remote communications command.

Thickness is incrementing if source shutter
is open. The source power is controlled by
the hand-held controller or remote
communications

Active or
Inactive

depending
on the state
when
manual is
entered.
Shutter can
be opened
or closed by
the operator
via remote
communi-
cations
during
manual.

Active

Shutter can
be opened
or closed by
operator via
remote
communi-
cations
during
manual.

13

15. (Non Deposit

Control) NonDep
CNTL

The state is entered after the pre-deposit (if
"Dep after Pre-dep" parameter set to no) or
via external stimulus (remote command,
digital input) or after deposit if "On Final
Thickness" set to Non-Deposit Control.
Thickness is not incrementing. The source
power is controlled to the desired rate by
the control loop.The state is ended via
external stimulus.

Inactive

Active

14

16. NonDep Hold

Non-deposit hold is entered when in
non-deposit control and there are no
available crystals to continue the control if
the time power option had been chosen.
Non-deposit hold can also be entered from
time power using the RL3 Remote
command. Thickness is not incrementing.
The source power is maintained at the
average control power prior to the crystal
failure. Both aggregate rate and power can
be adjusted via. remote communications.
The state is ended via external stimulus.

Inactive

Inactive

15

17. FEED RAMP

Source changing to Feed Power level.
[Feed Power, Feed Ramp Time]

Inactive

Inactive

16

18. FEED

Source maintained at Feed Power level.
[Feed Time]

Inactive

Inactive

17

Table 3-2 State descriptions (continued)

STATE

CONDITION

RELAY CONTACT

STATUS

REMOTE

COMM

ENCODES

Source
Shutter

Sensor
Shutter

«
...
85
86
87
88
89
...
»

Summary of Contents for IC6

Page 1: ...O P E R A T I N G M A N U A L IC6 Thin Film Deposition Controller IPN 074 505 P1E Cover Page ...

Page 2: ......

Page 3: ...www inficon com reachus inficon com 2012 INFICON O P E R A T I N G M A N U A L IC6 Thin Film Deposition Controller IPN 074 505 P1E Title Page ...

Page 4: ...ndows 95 and Microsoft are registered trademarks of Microsoft Corporation All other brand and product names are trademarks or registered trademarks of their respective companies Disclaimer The information contained in this Operating Manual is believed to be accurate and reliable However INFICON assumes no responsibility for its use and shall not be liable for any special incidental or consequentia...

Page 5: ...nts of EMC directive 2004 108 EC A Technical Documentation File is also available for review by competent authorities and will be maintained for a period of ten years after the date on which the equipment was last manufactured In additional to this file technical installation maintenance and application information concerning this equipment can also be found in the Operating Manual s for this prod...

Page 6: ...entative Steve Schill Thin Film Business Manager INFICON Inc ANY QUESTIONS RELATIVE TO THIS DECLARATION OR TO THE SAFETY OF INFICON S PRODUCTS SHOULD BE DIRECTED IN WRITING TO THE VICE PRESIDENT OF OPERATIONS AT THE ABOVE ADDRESS Revised 12 24 08 Rev B ...

Page 7: ...on Seller shall not be liable for any further damages which could have been avoided if Seller had been provided with immediate written notification THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHER WARRANTIES EXPRESS OR IMPLIED WHETHER OF MERCHANTABILITY OR OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE AS BUYER S EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLD HEREUNDER All ot...

Page 8: ......

Page 9: ...1 2 4 Main Power Connection 1 5 1 3 How To Contact INFICON 1 6 1 3 1 Returning Your IC6 1 6 1 4 IC6 Specifications 1 7 1 4 1 Measurement 1 7 1 4 2 Screens and Hierarchy 1 7 1 4 3 IC6 Features 1 8 1 4 3 1 Recipe Storage Datalogging 1 8 1 4 3 2 Sensor Parameters 1 8 1 4 3 3 Source Parameters 1 8 1 4 3 4 Material Parameters 1 9 1 4 3 5 Process Layer Parameters 1 11 1 4 3 6 General Global Parameters 1...

Page 10: ...9 1 6 6 Replacement Cables 1 19 1 7 Initial Power On Verification 1 20 Chapter 2 Installation and Interfaces 2 1 Location Guidelines 2 1 2 1 1 Sensor Types 2 1 2 1 2 Sensor Installation 2 1 2 1 3 IC6 Installation 2 4 2 2 Avoiding Electrical Interference 2 4 2 2 1 Verifying Establishing Earth Ground 2 4 2 2 2 Connections to Earth Ground 2 5 2 2 3 Minimizing Noise Pickup From External Cabling 2 6 2 ...

Page 11: ... Type Freq Display Description 3 13 3 3 3 4 1 TEST XIU 3 14 3 3 4 Sensor Screen 3 14 3 3 5 Source 3 16 3 3 6 Material 3 17 3 3 6 1 Overview Page 3 17 3 3 6 2 Source Page 3 17 3 3 6 3 Sensor Page 3 17 3 3 6 4 Pre Post Page 3 18 3 3 6 5 Deposit Page 3 18 3 3 6 6 Lib A Hf Lib Hf Sc Lib Sc Z Sub Displays 3 19 3 3 7 Process 3 19 3 3 7 1 Overview Page 3 19 3 3 7 2 Current Process 3 20 3 3 7 3 1 10 11 20...

Page 12: ...3 Xtal12 Crystal12 3 36 3 6 1 4 Generic Sensor Crystal Switching 3 37 3 6 2 Source Crucible Selection 3 37 3 6 2 1 Example Programming Turret Source Crucible Selection 3 38 3 6 3 Auto Z 3 39 3 6 4 Auto Tune Optimizing the Control Loop 3 40 3 6 5 Rate Watcher 3 40 3 6 6 Handheld Controller 3 40 3 6 6 1 Determining Soak Power with the Handheld Controller 3 41 3 6 7 Test Mode 3 41 3 6 7 1 Standard or...

Page 13: ...it Parameters 5 15 5 1 7 Deposit Page Parameters 5 16 Chapter 6 Process Set Up 6 1 Process Set Up Introduction 6 1 6 2 Overview Page 6 1 6 3 Curr ent Proc ess Page 6 2 6 4 Process Layers 1 10 etc 6 3 6 4 1 Layer Parameters 6 3 6 4 1 1 Layer Parameter Editing 6 3 6 4 1 2 Layer Parameters 6 4 6 5 Special Layer Parameter Features 6 5 6 5 1 Skip Deposit 6 5 Chapter 7 General Parameters 7 1 General Set...

Page 14: ...itions 9 16 9 5 Logic Statement Example 9 20 Chapter 10 Remote Communications 10 1 Remote Communication Configuration Overview 10 1 10 2 Physical Connections 10 1 10 2 1 RS 232C Serial Port 10 1 10 2 2 TCP IP Ethernet Port 10 2 10 2 2 1 Network Connection 10 2 10 2 2 2 How to Set Up the Network Protocol on the PC 10 2 10 3 Message Format 10 5 10 3 1 Protocol 10 5 10 3 1 1 Command Packet Host to IC...

Page 15: ... Material Name 10 36 10 4 19 Update Material Name 10 36 10 4 20 Query Output Name 10 36 10 4 21 Update Output Name 10 36 10 4 22 Query Process Layer Parameter 10 37 10 4 23 Update Process Layer Parameter 10 37 10 4 24 Query Sensor Parameter 10 38 10 4 25 Update Sensor Parameter 10 38 10 4 26 Query Output Type 10 40 10 4 27 Update Output Type 10 40 10 4 28 Query User Message 10 40 10 4 29 Update Us...

Page 16: ...21 Update Output Name 10 59 10 4 35 22 Query Output Type 10 59 10 4 35 23 Update Output Type 10 59 10 4 35 24 Query User Message 10 60 10 4 35 25 Update User Message 10 60 10 4 35 26 Query Logic Statement 10 60 10 4 35 27 Update Logic Statement 10 61 10 4 35 28 Status General 10 61 10 4 35 29 Status Layer 10 62 10 4 35 30 Status Sensor 10 62 10 4 35 31 Remote General Action 10 62 10 4 35 32 Remote...

Page 17: ...rameters 12 8 12 5 3 AutoTune Manual Display 12 9 12 5 4 AutoTune Tuning Display 12 10 12 5 5 AutoTune Description 12 10 12 6 Determining Cross Talk Calibration For Co Deposition 12 13 12 6 1 Procedure Set Up 12 14 12 6 1 1 Cross Talk Calibration Procedural Notes 12 14 12 6 1 2 Cross Talk Calibrate Parameters 12 16 12 6 2 Cross Talk Calibration MANUAL display 12 17 12 6 2 1 Function Key Selection ...

Page 18: ... 15 14 15 7 Troubleshooting Guide 15 16 15 7 1 Troubleshooting the IC6 15 17 15 7 2 Troubleshooting Transducers Sensors 15 20 15 7 3 Troubleshooting Computer Communications 15 24 15 8 Replacing the Crystal 15 27 15 8 1 Front Load 15 27 15 8 2 Cool Drawer 15 28 15 8 3 Shuttered and Dual Sensors 15 30 15 8 4 Bakeable Sensor 15 30 15 8 5 Sputtering Sensor 15 31 15 8 6 Crystal Snatcher 15 32 15 8 7 Cr...

Page 19: ...s 15 38 15 9 3 2 Incompatible Sensor Heads 15 38 15 9 4 Specifications 15 39 Chapter 16 Measurement and Control Theory 16 1 Basics 16 1 16 1 1 Monitor Crystals 16 2 16 1 2 Period Measurement Technique 16 4 16 1 3 Z match Technique 16 5 16 1 4 Active Oscillator 16 6 16 1 5 ModeLock Oscillator 16 7 16 1 6 Auto Z Theory 16 9 16 1 7 Control Loop Theory 16 11 Appendix A Material Table A 1 Introduction ...

Page 20: ...TOC 12 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...

Page 21: ...he IC6 is capable of automatically controlling the process in a precise and repeatable manner User interaction is accomplished via the IC6 front panel or remote communication and consists of selection or entry of parameters to define the process A complete system consists of a main electronics unit also called the IC6 sensor heads and a crystal interface unit XIU for each attached sensor These ite...

Page 22: ...ut For the purposes of this manual they are defined as follows NOTE Pertinent information that is useful in achieving maximum IC6 efficiency when followed CAUTION Failure to heed these messages could result in damage to the IC6 WARNING Failure to heed these messages could result in personal injury WARNING Risk Of Electric Shock Dangerous voltages are present which could result in personal injury ...

Page 23: ...in the IC6 case Dangerous voltages may be present whenever the power cord or external input relay connectors are present Refer all maintenance to qualified personnel CAUTION This IC6 contains delicate circuitry which is susceptible to transient power line voltages Disconnect the line cord whenever making any interface connections Refer all maintenance to qualified personnel ...

Page 24: ... cables must always have three conductors including a protective earth terminal WARNING Risk Of Electric Shock Never interrupt the protective earth circuit Any interruption of the protective earth circuit inside or outside the IC6 or disconnection of the protective earth terminal is likely to make the IC6 dangerous This symbol indicates where the protective earth ground is connected inside the IC6...

Page 25: ...he covers from the IC6 during normal operation There are no operator serviceable items within this IC6 Removal of the top or bottom covers must be done only by a technically qualified person In order to comply with accepted safety standards the IC6 must be installed into a rack system which contains a mains switch This switch must break both sides of the line when it is open and it must not discon...

Page 26: ...ur problem an explanation of any corrective action that you may have already attempted and the exact wording of any error messages that you may have received 1 3 1 Returning Your IC6 Do not return any component of your IC6 to INFICON without first speaking with a Customer Support Representative You must obtain a Return Material Authorization RMA number from the Customer Support Representative If y...

Page 27: ...temperature and density Frequency Accuracy 2 ppm 0 50 C Measurement Frequency 10 Hz Measurement Technique ModeLock with Auto Z User Interface LCD and limited membrane keypad All parameters accessible through computer communications Multiple message areas for indication of states and detailed indication of abnormal and stop conditions 1 4 2 Screens and Hierarchy a Navigation Menu driven four soft k...

Page 28: ...o 9 9 s Pulse Off Time for Generic Sensor type 0 1 to 9 9 s Recorder Output 0 to 12 Recorder Function Rate Thickness RateDeviation Recorder Range 0 to 99999 1 4 3 3 Source Parameters Up to 6 sources may be controlled at the same time DAC Output 0 to 12 Source Shutter Output 0 to 38 Crucible Selection Turret is indexed to selected position on a Start Turret feedback is checked whenever a source is ...

Page 29: ...er 0 00 to 99 98 Maximum Power Option Continue Post Dep osition Stop Proc ess Suspend Mat erial can be selected for each Material individually Power Ramps 3 per Material Power Level 0 00 to 99 99 Rise Time 00 00 to 99 59 min s Soak Time 00 00 to 99 59 min s Auto Soak 2 Yes No Deposit After Pre Deposit Yes No Yes go to Deposit No go to Non Deposit Rate Control Control Delay Option None Shutter Cont...

Page 30: ...9 59 min s RateWatcher Sample and Hold Feature RateWatcher Option Yes No RateWatcher Time 00 00 to 99 59 min s RateWatcher Accuracy 1 to 99 Multipoint Yes No average up to 8 sensors Aggregate Multiply Yes No Sensor Failure Action Unused PostD e p osit Stop Susp e nd TimeP o w er Sensor Failure Trigger OnFail when this sensor fails or Last when the last sensor fails Sensor Weight 1 to 400 0 Sensor ...

Page 31: ...process can contain 200 layers Material 0 to 32 Final Thick ness 0 000 to 999 99 kÅ Thick ness Limit 0 000 to 999 99 kÅ Cruc ible 1 to 64 Co Dep osition Yes No Ratio C o ntr o l 0 to 999 9 if CoDep 1 4 3 6 General Global Parameters Active Process 1 to 50 Layer To Start 1 to 200 Run 1 to 9999 Auto Start Next Layer Yes No Max Concurrent Layer 1 to 6 Layers Displayed Auto 4 Layers 6 Layers Active Lay...

Page 32: ... XTAL History Yes No USB Datalog Format Log Off No datalogging Page Comma Thickness Eq uation 1 Up to 6 Source numbers can be specified each Source number can be used only once in the equation Thickness Eq uation 2 Up to 6 Source numbers can be specified each Source number can be used only once in the equation Thickness Eq uation 3 Up to 6 Source numbers can be specified each Source number can be ...

Page 33: ...ange 0 000 to 9999 kÅ Thickness Display Resolution 1 Å for 0 000 to 9 999 kÅ 10 Å for 10 00 to 99 99 kÅ 100Å for 100 0 to 999 9 kÅ 1 kÅ for 1000 to 9999 kÅ Rate Display Range 0 000 to 999 9 Å s Rate Display Resolution 0 001 Å s for 0 000 to 9 999 Å s if Rate Filter Time is 10 s or greater otherwise 0 01 Å s for 0 00 to 99 99 Å s 0 1 Å s for 100 0 to 999 9 Å s Power Display Range 0 00 to 99 99 Grap...

Page 34: ...to 0 V at 0 output Current rating 20 mA per channel Resolution 15 bits over full range 10 V Update Rate 10 Hz maximum dependent on source characteristics Recorder Output Functions Aggregate Rate Thickness or Rate Deviation Individual Sensor Rate Thickness or Rate Deviation or Source Power Recorder Output Ranges Rate 0 to up to 99999 Å s programmable Thickness 0 to up to 99999 Å programmable Functi...

Page 35: ...ays SPST 2 5 A relays rated 30 V dc or 30 V ac RMS or 42 V peak maximum 8 standard up to 16 optional with 2 additional I O cards D sub connector relays are normally open in the power off state but may be programmed to normally open or normally closed during operation Relay Ratings 100 VA inductive 2 5 A maximum of TTL Compatible Outputs 14 with optional I O card Internally pulled up to 5 V dc May ...

Page 36: ...r inputs and relays Operating Manual 074 5000 G1 CD ROM 1 4 10 Power Power 100 230 V ac 15 V ac 50 60 Hz 3Hz Maximum apparent power 150 VA Fuse use 250 V 4 Amp 5 x 20 Slow Blow 1 4 11 Operating Environment Usage Indoor only Temperature 0 to 50 C 32 122 F Humidity Up to 85 RH non condensing Altitude Up to 2000 meters Installation Overvoltage Category II per IEC 60664 Pollution Degree 2 per EN 61010...

Page 37: ...mm W x 330 mm D 1 4 15 Installation Clearance Requirements 1 4 15 1 Connector Clearances Front 1 0 in 25 mm minimum without USB 2 5 in 64 mm minimum dependent on size of USB storage device Rear 4 0 in 100 mm minimum 1 4 15 2 Cooling Clearances Rear 4 0 in 100 mm minimum Sides 1 4 in 7 mm minimum 1 4 16 Weight With all options 13 lb 5 9 kg 1 4 17 Cleaning Use a mild nonabrasive cleaner or detergent...

Page 38: ...To perform a power on verification see section 1 7 on page 1 20 6 For additional information or technical assistance contact INFICON refer to section 1 3 How To Contact INFICON on page 1 6 1 6 Parts and Options Overview 1 6 1 Base Configurations IC6 Control Unit 781 500 G1 North America 781 500 G2 Europe Ship Kit 781 020 G1 North America 781 020 G2 Europe Operating Manual on CD ROM 074 505 on 074 ...

Page 39: ... 15 ft and 6 in cable pkg 781 612 G15 4 Meter Oscillator 30 ft and 6 in cable pkg 781 612 G30 4 Meter Oscillator 50 ft and 6 in cable pkg 781 612 G50 4 Meter Oscillator 100 ft and 6 in cable pkg 781 612 G100 4 Meter Oscillator 15 ft and 20 in cable pkg 781 613 G15 4 Meter Oscillator 20 ft and 20 in cable pkg 781 613 G20 4 Meter Oscillator 50 ft and 20 in cable pkg 781 613 G50 4 Meter Oscillator 10...

Page 40: ...NING Risk Of Electric Shock There are no user serviceable components within the IC6 case Dangerous voltages may be present whenever the power cord or external input relay connectors are present Refer all maintenance to qualified personnel WARNING Risk Of Electric Shock Never interrupt the protective earth circuit Any interruption of the protective earth circuit inside or outside the IC6 or disconn...

Page 41: ...s the ON STBY button on the front panel A green pilot light should be seen next to the power switch 4 The fan at the back of the IC6 should be exhausting air 5 After the initial temporary boot up screen which can be viewed in Maintenance Sys Status see section 12 8 on page 12 22 the LCD monitor will display an image similar to the one shown in Figure 1 1 Figure 1 1 Operate Screen ...

Page 42: ...1 22 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...

Page 43: ...ocess the deposition material and the physical characteristics of the process chamber General guidelines for each sensor type produced by INFICON are outlined in the Sensor Data Sheets on the www inficon com website For specific recommendations consult your INFICON representative CAUTION The performance of this IC6 depends on the careful installation of the chosen transducer Improper installation ...

Page 44: ...with Water Tubes Or Customer Supplied Cajon Coupling Brazing Adapters Water In Water Out XIU Oscillator Instrument Chassis Source Source Shutter Pneumatic Actuator To Source Controller Source to Sensor 10 Minimum Sensor Shutter Air 80 PSI 110 PSI Max To Sensor Shutter IPN 750 420 G1 Shutter Solenoid Assembly ...

Page 45: ...lating it may become unstable Follow these precautions Mount the sensor to something rigid and fixed in the chamber Do not rely on the water tubes to provide support Plan the installation to insure there are no obstructions blocking the path between the sensor and the source Be certain to consider rotating or moving fixtures Install sensors so their central axis an imaginary line drawn normal to t...

Page 46: ...rounding and ensure safe and proper operation the IC6 must be operated with all enclosure covers sub panels and braces in place and fully secured with the screws and fasteners provided NOTE When using the IC6 with an RF sputtering system the cable between the IC6 and oscillator should be kept as far away from the RF transmission cable as possible Interference from the RF transmission cable may cau...

Page 47: ...rminal Extension cables must always have three conductors including a protective earth ground conductor WARNING Risk Of Electric Shock Never interrupt the protective earth ground intentionally Any interruption of the protective earth ground connection inside or outside the IC6 or disconnection of the protective earth ground terminal is likely to make the IC6 dangerous This symbol indicates where t...

Page 48: ...ed pairs for all connections Minimize cable lengths Avoid routing cables near areas that have the potential to generate high levels of interference For example large power supplies such as those used for electron beam guns or sputtering sources can be a source of large rapidly changing electromagnetic fields Placing cables as little as one foot away from these problem areas can significantly reduc...

Page 49: ... with the safety earth ground The IC6 is initially powered by AC line current The line voltage provided in your facility must be within the voltage range of 100 230 V ac 15 V ac 2 3 1 Routing XIU Cables The signals traveling on this cable are both analog and digital It is suggested that it not be routed near areas with high levels of electromagnetic interference even if its length must be somewhat...

Page 50: ...ter DAC card can be installed into the IC6 This card provides six additional DAC outputs numbered 7 through 12 for Thickness and or Rate as determined by the DAC Output Option parameters The pin assignments for DAC outputs 7 through 12 are shown in Table 2 2 A mating connector is included with the DACoption Table 2 1 Wiring to the controller Crucible Position Contact Status Relay 6 Relay 7 1 Open ...

Page 51: ...rate connectors for relay outputs and input lines A 25 pin D sub male connector is used for the eight relays A 15 pin D sub male connector is used for the input lines Mating connectors are provided in ship kits IPN 781 502 G1 and 781 503 G1 Refer to Figure 3 2 on page 3 3 for connector locations and Table 2 3 on page 2 10 for connector pin assignments Relay connections are rated at 30 V dc or 30 V...

Page 52: ...11 10 3 13 11 11 10 17 13 4 13 12 4 12 12 13 12 18 12 5 5 4 5 11 13 5 4 19 11 6 3 2 6 10 14 3 2 20 10 7 1 14 7 9 15 1 14 21 9 8 15 16 8 8 16 15 16 22 8 9 7 23 7 10 6 24 6 11 5 25 5 12 4 26 4 13 3 27 3 14 2 28 2 GND 1 GND 1 I O Board 3 Relay Pins TTL Output Pin 17 7 6 25 9 18 9 8 26 10 19 11 10 27 11 20 13 12 28 12 21 5 4 29 13 22 3 2 30 14 23 1 14 31 15 24 15 16 32 1 33 2 34 3 35 4 36 5 37 6 38 7 ...

Page 53: ... required for the host computer side connection Depending on the computer source all connections may not be necessary The length of the cable is limited to fifty feet according to published standards The IC6 interface operates as DCE Data Communication Equipment Pin assignments are for the IC6 connector Table 2 4 RS 232C pin connections Signal Name Pin EIA Name TX Transmit Data 2 BA RX Receive Dat...

Page 54: ...solated 24 V dc supply and the RS 232C remote communications port use a 9 pin D sub connector Care must be taken not to inadvertently connect the RS 232C remote communications cable to the 24 volt supply connector Also care must be taken not to inadvertently connect the 24 V dc supply cable to the RS 232C remote communications connector Table 2 5 24 V dc pin connections Pin Function 1 Return 2 Ret...

Page 55: ...s A keypad array with numerics 0 through 9 with telephone style assigned letters for parameter entry All numeric entries need to be followed by ENTER CLEAR is used to erase data entry errors If an illegal value has been entered CLEAR will erase the error message and re display the last valid data Pressing TOGL moves through selection options such as Yes or No or others such as sensor types Pressin...

Page 56: ...held Controller IPN 755 262 G1 For more information on the Handheld Controller see section 3 6 6 on page 3 40 9 Cursor Keys An array of five keys used to move the display cursor either up down left or right The MENU key is used to navigate through the IC6 displays The keys auto repeat the cursor will continue to move as long as the key is held down 10 Power This switch controls secondary power to ...

Page 57: ... dc or 30 V ac RMS or 42 V peak maximum and 14 TTL inputs 4 8 Relay x 14 Input I O Card optional Provides pin connection for 8 relays rated for 30 V dc or 30 V ac RMS or 42 V peak maximum and 14 TTL inputs 5 8 Relay x 14 Output I O Card optional Provides pin connection for 8 relays rated for 30 V dc or 30 V ac RMS or 42 V peak maximum and 14 open collector type outputs 6 Sensor Connectors Channels...

Page 58: ...on Connector standard Provides a 9 pin RS 232C communications port 11 For future expansion options 12 6 Channel DAC optional Provides recorder output for six channels 15 pin miniature D sub connector Outputs are programmable for recorder function 13 Fan Outlet Exhaust opening for the IC6 s miniature fan Do not block 14 24 Volt Supply standard Provides three 24 V dc supplies rated at 1 75 Amps See ...

Page 59: ...od of 1 to 99 minutes without a key press See section 7 9 AUDIO VISUAL Page Set Up on page 7 10 Pressing a key before the dimmer time elapses resets the dimmer interval to start over The default setting of 0 disables the dimmer function When the display is dimmed the START RESET and STOP keys remain active To restore the display to full brightness without stopping or starting the instrument do not...

Page 60: ...an Rate Below the graph is a message area consisting of five lines The Status Messages area see section 15 1 occupies the first four lines Transient Messages see section 15 5 and Input Error Messages see section 15 6 share the fifth line This area displays error messages custom user messages and system status information such as indicating the IC6 is in Test mode Status messages are displayed as l...

Page 61: ...ble Position During the OPERATE display the function keys below the screen function as explained in Table 3 1 Table 3 1 Operate display function keys Key Function Description F1 ZERO THICKNESS Pressing F1 resets the displayed thickness of the current layer and the sensor thickness values to zero F2 TOGGLE MANUAL Press F2 to put the layer in manual control so that the power level is controlled by t...

Page 62: ...tional screen if the system is configured for co deposition or multi layer deposition the operational screen will be divided to show information for all layers as shown in Figure 3 5 Figure 3 6 or Figure 3 7 Figure 3 5 Co deposition operate display Figure 3 6 4 layer display ...

Page 63: ... Figure 3 7 6 layer display 3 3 3 Sensor Information 3 3 3 1 Sensor Information Rate Xtal Display Description NOTE N A not available will be displayed in these fields for diabled features or for sensors not in use Figure 3 8 Rate Xtal display ...

Page 64: ...al being deposited as well as deposition conditions Crystal This field is subdivided into three categories current position Curr next position Next and Failed Information is displayed in these fields only if the sensor has more than one position Curr For a XtalTwo sensor the Curr field will show either 1 or 2 1 indicates the active crystal of the dual sensor head 2 indicates the inactive shuttered...

Page 65: ...he monitor crystal degrades to a point where it is difficult to maintain a sharp resonance and therefore the ability to measure the monitor crystal s frequency deteriorates When depositing dielectric or optical materials the life of a gold aluminum or silver quartz monitor crystal is much shorter as much as 10 to 20 This is due to thermal and intrinsic stresses at the quartz dielectric film interf...

Page 66: ...tialize a multi position sensor after replacing failed crystals The action is taken on the sensor indicated by the box cursor if the IC6 is in Ready Stop or all active layers are in Idle or Suspend Failed crystal numbers are shown in the Failed column under Crystal Generic Sensor Status showing which crystals are good and which are failed relative to the current position is displayed in the bottom...

Page 67: ...set to No in the Sensor menu the Z Ratio Type displayed on the Sensor Information screen will always be Matl Auto indicates the Auto Z parameter in the Sensor menu is set to Yes Auto Z continually calculates the Z Ratio for the as deposited film If the IC6 suddenly lost the ability to calculate Auto Z Auto would change to either Matl or Sens Matl has the same meaning as described above Sens indica...

Page 68: ...y This field is subdivided into two categories Fundamental and Anharmonic The Fundamental frequency will be shown for all working sensors If Auto Z is in effect for the sensor the Anharmonic frequency will also be shown Frequency value will be displayed 3 3 3 4 1 TEST XIU To test any XIU Crystal Interface Unit move the cursor onto the respective Sensor number Pressing F1 then initiates the XIU sel...

Page 69: ...rating Manual Figure 3 10 Sensor overview display Moving the cursor onto one of the sensor numbers and pressing F1 Select Sensor brings up the Sensor display See section 4 1 2 Sensor Parameters on page 4 2 for programming details ...

Page 70: ...rces Figure 3 11 Source overview display Once the right cursor key has been used to move to one of the six sources the Select Source function key will appear Pressing F1 will then display the source s parameter screen The Source display allows configuring the selected source See section 4 2 2 Source Parameters on page 4 5 for programming details ...

Page 71: ...ource page allows entering or editing Density Z Ratio Control Loop type and associated control loop parameters One of the six Source BNC analog control outputs is selected and the operating limits for that output such as Min and Max Power are defined here If desired a Recorder Output one of the unused standard six or optional additional six analog outputs can be selected for Rate Thickness Rate De...

Page 72: ...stalk when multiple materials are being co deposited After performing the Cross Talk calibration procedure entered from the Main Menu Maintenance screen the correct values will be imported here and shown See section 5 1 4 on page 5 6 Figure 3 13 Material sensor page 3 3 6 4 Pre Post Page Up to three pre deposition phases with rise times power levels and soak times can be specified Also Auto Soak 2...

Page 73: ...cess Set Up for programming detail and page displays 3 3 7 1 Overview Page The Process Overview display see Figure 3 14 shows all 50 processes Processes with layers are identified by an preceding the process name Cursoring to a Process and selecting it with F1 displays the layer sequence in the process Cursoring to a Process and pressing F2 makes that Process the active Process This process layer ...

Page 74: ...groups of 10 Layer parameters Final Thick ness Thick Limit Cruc ible number CoDep Yes No and related parameters are entered here With the cursor in the Material column enter the material number to use for the first layer To add to the layer sequence with the cursor in the Material column use the down arrow key to move to the empty line and enter the material number to use for that layer See sectio...

Page 75: ...o prevent accidental double Starts Layers Displayed maximum number of layers displayed on the Operate screen Active Layer Output specify the first of 8 consecutive outputs to indicate the number of the layer that will be executed when Start is executed If multiple layers are active the outputs will only indicate the lowest numbered one Run Number increments at the start of a process Thickness Eq 1...

Page 76: ...lay of messages can be turned on and off using Logic statements See section 7 5 MESSAGE Page Set up on page 7 6 3 3 8 5 Date Time Page Toggle between date formats and enter the current date and time Date Format Calendar Day Month Year System Time See section 7 6 DATE TIME Set Up on page 7 7 3 3 8 6 Test Page Allows executing the programmed layer sequence with a dummy rate signal Test On Off Time C...

Page 77: ...p on page 7 10 3 3 9 Digital I O The Digital I O displays show configuration of all inputs see Figure 3 17 and outputs see Figure 3 18 and allows configuring inputs and outputs on the three possible I O boards See Chapter 8 Digital I O for programming details Figure 3 17 All inputs display NOTE On All Input and All Output pages active inputs and outputs are displayed in a standard font Inactive in...

Page 78: ...ance The Maintenance display is organized into four subscreens Auto Tune Cross Talk Source Maint enance and Sys tem Status See Chapter 12 Maintenance and Calibration Procedures for programming details 3 3 12 Counter Timer See Chapter 13 Counters Timers 3 3 13 USB Storage Config allows saving and retrieving configuration files to and from the USB storage device Datalog shows datalog files on USB st...

Page 79: ... correction Therefore it is possible to simultaneously control six rates independent of each other or control up to three sets of two layers linked by co deposition with crosstalk correction and ratio control 3 4 1 Defining a Process The following procedure is used to define a process All steps do not necessarily have to be followed in the given order 1 Make sure the IC6 is in READY Some configura...

Page 80: ...AL screen are used Each distinct material used in the process must be defined If the same material is going to be used more than once in the process it needs to be defined only once The material definition includes rate density Z Ratio tooling soak power settings RateWatcher rate ramps time limits and whether to STOP on max power Control loop characteristics also relate to the material Also one so...

Page 81: ...T pressed once will continue the process from the point at which it was stopped If STOP occurred during a Rate Ramp and the layer is continued without a RESET the setpoint rate on entering Deposit will be replaced with the rate in effect when the STOP occurred It may be desireable to adjust the SOAK POWER 2 level based on data log history prior to continuing the stopped layer Subsequent STARTs wil...

Page 82: ...begin the next layer unless Auto Start Next layer has been enabled Repeat until the process is complete 4 If at some point there is a need to interrupt or discontinue the process press STOP This will close the sensor and source shutters set the power to zero and freeze the display The process can be restarted where it left off by pressing START The pre deposition phases will be repeated To complet...

Page 83: ...ttempt to enter DEPOSIT using some of the same sensors a STOP sensor conflict will occur 3 4 4 Co deposition Co deposition pertains strictly to depositing two layers at the same time and correcting for any crosstalk due to material from one source arriving at the sensor dedicated to the other source A co deposition is defined on the Layer Definition page of the Process screen Yes is entered for th...

Page 84: ...e on page 7 1 3 4 6 Automating a Process A process can be automated so that a complete process can be executed without having to press START between all the layers A process can be automated by any of the following three methods Setting Auto Start Next in the GENERAL PROCESS page to Yes will cause a complete process to run by pressing START once Remote communication control An external computer co...

Page 85: ...LD 2 INPUT SHUTTER DELAY SHUTTER DELAY SHUTTER DELAY CONTROL DELAY YES YES NO MPWR SET LAYER TO START YES YES A A NO NO NO NO NO YES YES YES YES NO START or AutoStart Next Yes READY IDLE INCREMENT LAYER NUMBER IF NOT READY OR STOP STATE WAS TIME POWER USED IDLE RAMP TIME FEED TIME FEED RAMP ON FINAL THK DECISION DATA LOG UPDATE THICKNESS FINAL TIME ELAPSED XTAL FAIL TIME ELAPSED FINAL THK XTAL FAI...

Page 86: ...e 2 4 PRECON SOAK Source is maintained at precondition power level for the precondition soak time PreCon Soak Time PreCon Soak Power Inactive Inactive 3 5 RISE 1 Source is rising to Soak Power 1 level Rise Time 1 Inactive Inactive 4 6 SOAK 1 Source is being maintained at Soak Power 1 level Soak Time 1 Soak Power 1 Inactive Inactive 5 7 RISE 2 Source is rising to Soak Power 2 level Rise Time 2 Inac...

Page 87: ...via external stimulus remote command digital input or after deposit if On Final Thickness set to Non Deposit Control Thickness is not incrementing The source power is controlled to the desired rate by the control loop The state is ended via external stimulus Inactive Active 14 16 NonDep Hold Non deposit hold is entered when in non deposit control and there are no available crystals to continue the...

Page 88: ...ensor x in the Sensor page of the Material screen and must have a shutter output assigned in the Sensor page of the Sensor screen The manual Switch Crystal function is not available in this configuration To calibrate the Backup Sensor temporarily set it to be the Sensor All multi position and shuttered sensors require the Pneumatic Actuator Control Valve part number 750 420 G1 and a feedthrough wi...

Page 89: ... XtalTwo switch fails or the Backup sensor or the last good crystal of a XtalSix Xtal12 or Generic fails In either case a TIME POWER SUSPEND POST DEPOSIT or STOP will occur depending on the failure option chosen A crystal switch can be manually executed via the front panel handheld controller remote communications or logic statements when the system is configured for a multi position sensor NOTE W...

Page 90: ...r one second opened for one second closed for one second then opened for each position The first one second closure will advance the CrystalSix carousel into an intermediate position between two crystals Opening the closure for one second allows the ratchet mechanism to relax whereupon the second contact closure advances the next crystal into the proper position 3 6 1 3 Xtal12 Crystal12 On power u...

Page 91: ...ection feature is not available for the Generic sensor After a crystal switch sequence the IC6 will attempt to find the resonant frequency for the crystal in this position If the IC6 does not find a good resonant frequency for this crystal it will again pulse the Crystal Switch Output and attempt to find a resonant frequency at the next position The maximum number of attempts to find a good resona...

Page 92: ...ible number selected by the active layer Relays are defined sequentially with the first relay containing the least significant bit LSB The greater the number of crucibles selected the greater the number of relays required The number required is based on binary encoding actual coding is binary 1 with 00 representing position 1 and 11 representing position 4 Any unused sequence of relays may be used...

Page 93: ... a person would remove a good monitor crystal and then reinsert the same crystal Whenever a crystal fail occurs the last valid crystal frequencies are stored in the IC6 Upon inserting a coated monitor crystal the measured frequencies for this crystal will fall outside of the allowed range for new crystals These frequencies are then compared with the stored values to determine if this crystal is th...

Page 94: ...ter will close for a designated amount of time The shutter will once again be opened to validate and adjust the power level This procedure is repeated throughout the deposition Two Material Deposit parameters RateWatch Time and RateWatch Accuracy control this function See section 5 1 7 Deposit Page Parameters on page 5 16 3 6 6 Handheld Controller An optional Handheld Controller IPN 755 262 G1 see...

Page 95: ...er Use a percent or more lower than this for the Soak Power 1 parameter Determining Soak 2 After 30 60 seconds of Soak 1 using the Handheld Controller again slowly increase the power a percent at a time until the desired Deposition Rate is reached Use a percent or two less than this number for the Soak Power 2 parameter 3 6 7 Test Mode Test can be turned on or off in the General Test display page ...

Page 96: ...tiate between configuration files screen shots and datalogging files All files must be contained in the appropriate directory Storage retrieval from sub directories is not allowed for screen shots and datalog files The IC6 supports the writing of filenames using alphanumeric characters selected using the cursor keys Characters A through Z and numbers 0 through 9 inclusive are available The IC6 has...

Page 97: ... USB storage device will be automatically named using the process number and run number The format of the filename is PXXRXXXX IDL If the USB storage device already contains a file with the same filename as the new datalog information the new datalog information will be appended to the old file At each source shutter close the datalog information will be appended to the file when saved to USB unti...

Page 98: ...sted via the remote status layer command the values are sent in the binary format only Year Integer Month Integer Day Integer Hour Integer Minute Integer Process x x process number or in data log files the name if the name is programmed Run Number X Integer Layer x Integer Material x x is the material number or in data log files the name if the name is programmed Process Time seconds Integer Layer...

Page 99: ... see Table 3 3 The Crystal history contains the history of every crystal in every sensor used in the layer In the Remote status command SL17 the crystal history for all twelve crystals in all eight sensors is returned If the Data Log Xtal History Parameter is set to no all zeros are sent in the remote status command SL17 Table 3 3 is extended as necessary to show all crystals in a sensor Table 3 3...

Page 100: ...external or internal equipment malfunction If the values do not agree IC6 takes the following action If the DAC output is assigned for Source control Stop the process Display Source Fault message Set this Source Output to zero If the DAC output is assigned for Recorder use Set this output to zero Display Recorder Fault message Both types of faults remain active until a RESET is performed ...

Page 101: ... CH4 and the associated sensors will be Sensor 3 and Sensor 4 etc Each sensor connection requires an external oscillator XIU package Sensor Set Up is initiated by moving the cursor to the Sensor heading on the Main Menu and pressing MENU To return to the Main Menu display press MENU again 4 1 1 Sensor Display Navigation The Sensor Overview display see Figure 4 1 shows the current configuration of ...

Page 102: ... selected the Switch Out parameter appears Additional parameters appear for a Generic type This parameter cannot be changed while executing a process SWITCH OUT 0 to 38 This parameter appears when the sensor type is not Single It designates which of the 38 outputs is to be used as the Crystal Switch output for this sensor Values 1 through 38 correspond to the appropriate output Value 0 indicates t...

Page 103: ...ll be obtained for use in computing thickness with this sensor No indicates that the Z Ratio established in Material Definition is used Yes indicates that the Auto Z calculation feature of the system is used Auto Z cannot be enabled on a crystal which is unable to Auto Z Refer to section 3 6 3 on page 3 39 for details on why a crystal is unable to Auto Z The default value is No for the Material Z ...

Page 104: ...Up is initiated by moving the cursor to the Source heading on the Main Menu and pressing MENU You may return to the Main Menu display by pressing MENU again 4 2 1 Source Navigation The Source Overview page shows the current configuration of all six sources Figure 4 3 Source overview page To make changes use the left right cursor to move to the appropriate source then press F1 Select Source to disp...

Page 105: ...ptional DAC outputs card SHUTTER OUTPUT 0 to 38 This parameter designates which of the 38 outputs is to be used as the Source Shutter relay Values range from 0 through 38 0 indicates that a shutter is not used and values 1 through 38 correspond to the appropriate relay or open collector type output The default value is 0 If a value other than 0 is entered the relay chosen as the Source Shutter rel...

Page 106: ...es range from 0 to 37 The default is 0 and indicates the Crucible Output is inactive The value entered into this parameter indicates which of the outputs begins the sequence of outputs used as crucible control outputs For example a Four 1 entered into the Number of Crucibles parameter and a 1 entered into the Crucible Output parameter will designate output relays 1 and 2 as crucible control output...

Page 107: ...lay time processing continues immediately Permissible values are 2 to 180 seconds The default value is 5 seconds CAUTION The IC6 will proceed to the Pre Condition state after the Turret Delay time expires This could result in damage to your equipment if the crucible is not in position after expiration of the Turret Delay time 4 3 DAC Output Selection Rules The six standard DAC outputs DAC1 to DAC ...

Page 108: ... the first of two co deposited layers b Aggregate Rate Thickness on the Secondary Layer the second of two co deposited layers c Sensor Rate Thickness on the Primary Layer from sensors 1 to 8 d Sensor Rate Thickness on the Secondary Layer from sensors 1 to 8 For a Sensor s Recorder Output to be active it must be associated with an active Material ...

Page 109: ...al heading on the Main Menu and pressing MENU To return to the Main Menu screen press MENU again 5 1 1 Material Screen Overview Page The Material Overview display see Figure 5 1 shows all 32 available materials Materials are initially shown as Material 1 to Material 32 Use the right arrow cursor to move into the material table Material parameters can be copied from one material number to others fo...

Page 110: ...ary A Hf display The three Material Libraries Lib A Hf Lib Hf Sc and Lib Sc Z provide an alphabetic list of materials by chemical name along with their density and Z Ratio Once a material is selected from the library listing by moving the cursor to it press F1 Define Material The correct chemical formula and library name density and Z Ratio values will now be imported to this Material and the Mate...

Page 111: ...on DENSITY 0 100 to 99 999 gm cc This parameter is specific to the material being deposited onto the Crystal It is one of two parameters that relate the mass loading on the crystal to a thickness If a material is chosen from the Material Library the density is automatically entered The default value is 1 000 Z RATIO 0 100 to 15 000 This parameter is specific to the material being deposited It is o...

Page 112: ...a high frequency 100 Hz and sputtering and resistive sources PROCESS GAIN 0 010 to 999 990 Å s pwr This parameter determines the change in Power for a given rate deviation dRate dPower The larger the Process Gain value the smaller the change in power for a given rate error Process Gain is calculated by dividing the change in rate caused by the corresponding change in power The default value is 10 ...

Page 113: ... running MAXIMUM POWER 0 01 to 99 99 This parameter is used to set the maximum permissible power level The control voltage output will not exceed this limit The default value is 90 00 MAX POWER OPTION Continue 0 Post Dep 1 Stop Proc 2 Suspend Mat 3 This parameter provides a safety feature 0 Continue Allows the layer to continue in its current state 1 PostDeposit The layer will proceed to the progr...

Page 114: ...t is Zero RECORDER RANGE 0 to 99999 Selects the full scale value in the appropriate units Å s for Rate and Å for Thickness Default value is 100 Full scale values are fixed at 50 Å s for Rate Deviation depending on what was selected on the Operate screen and 100 for Power 5 1 4 Material Screen Sensor Parameters Page MATERIAL NUMBER 1 to 32 Change the number to edit or create a different material MU...

Page 115: ...g deposition This multiplier is used only during the layer in which the crystal failure occurs After this layer is finished the multiplier is cleared Use of AGGREGATE MULTIPLY affects calculation of the aggregate rate as shown in Table 5 1 Assume all Sensor Weights are the same Table 5 1 Aggregate multiplier effect Condition of the deposition Sensor 1 Rate Å Sensor 2 Rate Å Sensor 3 Rate Å Sensor ...

Page 116: ...ggregate rate results Xtal Fail 10 10 4 10 1 25 If during the deposition the use of the aggregate multiplier is turned off the aggregate rate reverts back to Xtal Fail 10 10 4 8 not used If the layer has not finished the use of AGGREGATE MULTIPLY may be turned back on and the previously calculated multiplier in this case 1 25 will continue to be used Table 5 1 Aggregate multiplier effect continued...

Page 117: ... is attempted a sensor conflict error will occur and the IC6 will enter the STOP state If one layer is in either a pre Deposit or post Deposit state and the other layer in Deposit the layer in Deposit has use of the sensor Once both layers are started a sensor cannot be enabled if it is used by the other material SENSOR FAILURE TRIGGEROnFail 0 Last 1 Determines when the Failure Action is initiated...

Page 118: ...rystalTwo switch Default value is 100 If the sensor type is XtalSix CrystalSix or Xtal12 Crystal12 XTAL POSITION FIRST 0 to 6 12 for Xtal12 XTAL POSITION LAST 0 to 6 12 for Xtal12 If all available positions are to be used for this material set both values to 0 Otherwise enter values to select the set of positions to use for this material Permissible values for a CrystalSix are 0 to 6 0 to 12 for a...

Page 119: ...entered automatically using the cross talk calibration feature of the IC6 See section 12 5 on page 12 5 for a discussion of cross talk calibration QUALITY PERCENT 0 to 99 and 0 5 Å s Quality Percent selects the permissible rate deviation in percent of the measured rate relative to the desired rate The default value is 0 which disables the function QUALITY COUNTS 0 to 99 This sets the number of mea...

Page 120: ...stal Fail can be cleared by installing a new crystal or pressing the F3 key to Clear S Q counts on the Sensor Information screen This action must be repeated for each sensor used by cursoring to the appropriate sensor number 5 1 5 Pre Post Screen Deposit Page Parameters MATERIAL NUMBER 1 to 32 Change the number to edit or create a different material NOTE The first power ramp consisting of Pre Cond...

Page 121: ... Power 2 level over the time period RISE TIME 2 The default value is 0 RISE TIME 2 00 00 to 99 59 min s This parameter sets the time period in which the IC6 linearly ramps the power level from Soak Power 1 to Soak Power 2 The default value is 00 00 SOAK TIME 2 00 00 to 99 59 min s This parameter sets the time period for which the IC6 holds the power level at Soak Power 2 The default value is 00 00...

Page 122: ...0 5 Å s of the desired deposition rate for 5 seconds before the IC6 will enter the DEPOSIT state opening the source shutter and thus exposing the substrate to a well controlled rate of evaporant flux If the required rate control accuracy cannot be achieved within 60 seconds the process will STOP Control 2 Control delay suspends DEPOSIT control loop action on the source control power for the time i...

Page 123: ...Final Thickness the IC6 will enter the Feed Ramp state for the specified time Control voltage is ramped from the power level at the end of the DEPOSIT state to the Feed Power level Feed Power is held constant until the end of Feed Time At the end of Feed Time the IC6 will proceed to the Idle ramp state Source and sensor shutter are inactive FEED POWER 0 0 to 99 99 This is one of three parameters u...

Page 124: ... the Deposit state and take a layer to the post Deposit state This specifies the rate at which the deposition is to be controlled during the DEPOSIT and NON DEPOSIT CONTROL states The Rate is calculated based on The rate information acquired by the sensor s in use based on the density and Z Ratio values entered for this material The tooling factors that correct for any relative difference in flux ...

Page 125: ...e in Time Power and Non Deposit Hold states if a crystal fails It also determines the duration of the RateWatcher Sample period see RateWatcher Sample and Hold Feature on page 5 19 When the Averaging Time parameter value is 0 then a 2 5 second average ignoring the most recent 0 5 second is the averaging interval The status message ABBR EVIATED AVERAGE is generated if the averaging interval has not...

Page 126: ...es the time period over which to ramp the rate from the original rate to New Rate 1 The default value is 00 00 RAMP 2 RATE 0 000 to 999 9 Å s Ramp 2 Rate is provided to effect an aggregate rate change while depositing a Layer The aggregate rate is ramped linearly from the original Ramp 1 Rate setpoint to the New Rate 2 value over the time interval Ramp 2 Time It is allowed to ramp to a higher or a...

Page 127: ...racy requirement the RateWatcher Acceptance Time Interval is reset to zero If the deposition rate meets the RateWatcher Accuracy requirement for the duration of the Acceptance Window Time the sensor shutter is closed and RateWatcher enters Hold phase for the RateWatcher Time duration Finally after the Hold Time has elapsed RateWatcher will enter a 5 second Delay phase During the Delay phase the cr...

Page 128: ...s seconds The default value is 00 00 which disables the function During a Rate Ramp the Sample and Hold feature is inactive the crystal shutter is open and the rate is controlled by the crystal RateWatcher ACCURACY 1 to 99 During the rate sampling period the deposition rate is measured by the crystal source power control is active When the rate is within the desired accuracy continuously for five ...

Page 129: ... defined material refer to Chapter 5 Material Set Up Final Thickness Thickness Limit and Crucible Number The co deposition capability of the IC6 allows establishing material ratio and cross sensitivity relationships Processes are defined by sequencing layers Layers must be defined sequentially starting with Layer 1 Defined layers may be inserted deleted or copied using the layer editing feature La...

Page 130: ...nd of process to activate another process move the cursor to the process number and press F2 Set Active Process To edit or create a process move the cursor to that process number and press F1 Select Process 6 3 Curr ent Proc ess Page The Current Process page see Figure 6 2 shows the layer sequence for the process NAME 15 characters max The default will be Process The default name is returned as a ...

Page 131: ...ag Layer will set a tag marker Tag markers are used to indicate the start and end layers to be copied or deleted The Layers font color will change to green when the layer is tagged The message One Layer Tagged will appear in the status message area Moving the cursor to different layers will include those layers in the tag Pressing F1 Tag Layer a second time will set the end tag marker The tag will...

Page 132: ...nTag Layer will remove the tag markers and redisplay the layer s in standard font color Returning to the Main Menu will also remove the tag marker s When a tag is removed the Times To Be Copy parameter will reset to a value of one and the parameter will no longer be visible Tags can only be set within a single process Tags are not allowed between processes 6 4 1 2 Layer Parameters MATERIAL 0 to 32...

Page 133: ... first Layer will continue in DEPOSIT until reaching its own Final Thickness RATIO C O NTR O L 0 0 to 999 9 This parameter is used with the co deposition feature It establishes a Master Slave relationship between the two sources being co deposited The first layer is always the Master with the second layer s rate being controlled at the specified ratio of the master s setpoint rate Default value is...

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Page 135: ...oke the General display see Figure 7 1 You may return to the Main Menu display by pressing MENU again 7 2 General Screen Process Page Figure 7 1 General Process display Select a parameter for entry by positioning the box cursor at the desired value following the parameter description New values are input from the front panel followed by pressing the Enter key input Values are cleared by pressing t...

Page 136: ...source an error message will be displayed AUTO START NEXT Yes 1 No 0 Yes enables automatically starting the next layer in the process when the previous layer reaches the Idle state unless that layer is the last layer in the process Default is No NOTE If Auto Start Next is Yes the following logic statements will be triggered only at the end of the process not at the end of each layer Idle Layer End...

Page 137: ...d as a starting point The default value is 1 THICKNESS EQUATION 1 2 3 0 to 654321 Each of the three thickness equations can be set up to sum the thickness of the specified sources Each source can only be used once in an equation and can be used in all three equations For example 12 means sum the thickness of sources 1 and 2 1234 sums the first four sources Thickness equations are designed to be us...

Page 138: ...d press F1 Message RS 232 Test Failed or RS 232 Test Passed will appear If the loop back connector is not available jumper pins 2 and 3 to perform the test Contact INFICON Service if the RS 232 Test Failed message appears DATALOG XTAL INFO Yes 1 No 0 This parameter selects whether to output the crystal use history in addition to the standard set of datalog information Default is No RS 232 BAUD RAT...

Page 139: ... and line feed d10 h0A are inserted at the end of each line of data The Dlog information is transmitted when the source shutter closes at the end of Deposit or following a Stop or a Suspend while in Deposit The default is Standard 0 If the Ethernet option is installed the following parameters will be shown IP ADDRESS nnn nnn nnn nnn Use the up and down cursor keys to scroll through the address and...

Page 140: ...on and off under control of logic statements Up to four messages can be displayed in the message area Newer messages will displace older ones IC6 status messages have priority and will also displace user messages Move the cursor key to one of the 10 message lines Then use the alphanumeric keys in cell phone fashion to enter characters Use 0 for a space A second press on 0 enters numeric 0 To edit ...

Page 141: ... Manual 7 6 DATE TIME Set Up Figure 7 5 General screen date time page DATE FORMAT MM DD YYYY DD MM YYYY Default is MM DD YYYY Use the TOGL key to select DD MM YYYY CALENDAR DAY 1 to 31 MONTH 1 to 12 YEAR 2000 TO 2099 SYSTEM TIME HH MM ...

Page 142: ...ion is determined as shown in equation 1 1 Relays inputs source and recorder outputs operate normally during Test Mode but Crystal fails are ignored unless Advanced Test is set to On TIME COMPRESSED Yes 1 No 0 When in Test Mode this feature allows a faster than real time execution of the Process This is useful when testing a long Process A value of Yes increases the speed of execution 10 to 1 The ...

Page 143: ...ock Code on the General Lock page The lock code can also be cleared by pressing CLEAR on power up however if no lock code has been programmed this will reset all parameters to their default values NOTE Program lock codes are not stored on and retrieved from the USB port FILE ACCESS CODE 1 to 9999 The File Access Code allows configuration file retrieval from the USB port when the Program Lock Code ...

Page 144: ...ack signifying keyboard interaction LCD DIMMER TIME 0 to 99 min Determines the time before the backlight is turned off to conserve display life Default is 0 minutes which disables the dimmer function NOTE The backlight is ON when a process is running It is only OFF when time elapsed since last key press and in READY or IDLE and end of process exceedes the LCD Dimmer Time setting ...

Page 145: ...o Digital I O and pressing Menu The I O Map display for board 1 is shown in Figure 8 3 Upon entry the cursor will be placed at the last referenced output or input number 8 2 All Input Page Figure 8 1 All input page All input names assigned by the IC6 or by the user are shown to facilitate system diagnosis Darker font color designates inputs that are currently active ...

Page 146: ...IC6 Operating Manual 8 3 All Output Page Figure 8 2 All output page All output names assigned by the IC6 or by the user are shown to facilitate system diagnosis Darker font color designates inputs that are currently active ...

Page 147: ...a name Names created by the IC6 cannot be edited To enter or edit a user name move the cursor onto the appropriate input or output and use the keyboard in cell phone fashion to create or edit the name 8 4 1 Output Type Output Types may be defined as normally open NO or normally closed NC Relay and TTL output types are changed by positioning the cursor on an output type and pressing the TOGL key fo...

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Page 149: ...n numerical sequence starting with logic statement 1 Programming is accessed by moving the cursor to the Logic heading of the main menu and pressing MENU Single or multiple actions may be triggered by inputs or the fulfillment of a user specified logical condition Inputs are only processed when they or the statement they are used in undergo a transition and on IC6 power up Single or multiple compl...

Page 150: ...o zero Fourteen TTL inputs and eight relay outputs are standard An additional fourteen inputs and eight relay outputs are available with an optional I O card With a second optional I O card eight more relays and fourteen open collector outputs are available The IC6 has the capacity for 100 logic statements 9 2 Editing the Logic Statements Logic Set Up is initiated by moving the cursor to the Logic...

Page 151: ...o that group Individual statements in that group can then be edited by moving the cursor to the statement number and pressing F1 Edit see Figure 9 3 Figure 9 2 Logic 1 4 page From the Logic Overview display a logic statement can also be selected for editing by positioning the cursor at the desired statement number and pressing F1 Select See Figure 9 2 ...

Page 152: ...9 4 IPN 074 505 P1E IC6 Operating Manual 9 2 2 Logic Statement Editing Figure 9 3 Logic event IF selection Figure 9 4 Logic action Then selection ...

Page 153: ...returns the statement to the way it was before editing was started Save Exit key will save the statement and re display the four statement screen with the select menu When the cursor is on the lower half event or action list of the page the following function keys are active If Then F1 key will return the cursor to the IF THEN statement with the cursor returning to the highlighted element in the l...

Page 154: ...nated by ccc pressing TOGL will toggle the ccc between a logical AND and a logical OR For those Events which are layer material or source specific an additional operator can be selected This is the ON operator and pressing the TOGL key will now toggle between AND OR and ON 9 2 3 1 ON Operator The ON operator is designed for use in multi layer applications to link an event to a particular layer mat...

Page 155: ...IT both the DEPOSIT and the PRE DEPOSIT Events would be TRUE The presence or absence of an input s leading edge detection on the transition from high to low or low to high is used to evaluate the event condition Inputs are not re evaluated if held level at either the high or low state IF events can be connected using logic connectors refer to section 9 2 3 AND OR and ON Logic Connectors on page 9 ...

Page 156: ...d time span The condition remains true until the input arrives or a Reset is done CRUC SWITCH Sets the logic condition to be true while switching crucibles The condition remains true until the turret delay time has expired or the turret input arrives or a Reset is done DEPOSIT Sets the logic condition to be true at the beginning of the Deposit state The condition remains true until the end of the ...

Page 157: ...iggered at the End of Process and not between each subsequent layer IN DEPOSIT Sets the logic condition to be true at the beginning of the Deposit state and includes Time Power and Rate Ramps It is also true while in Manual and the Source Substrate shutter output is active The condition is cleared when entering the post deposit state or when a STOP RESET or a STOP START sequence is executed IDLE R...

Page 158: ...e Life value is less than for at least 5 seconds Numeric inputs for sensor range from 0 through 8 0 for any sensor MANUAL Sets the logic condition to be true when the Manual state is entered The condition remains true until leaving the Manual state and when a STOP RESET or a STOP START sequence is executed MATERIAL Sets the logic condition to be true whenever a Layer containing Material is in the ...

Page 159: ...mains true until the state is exited for example when a Stop command is given POST DEPOSIT Sets the logic condition to be true at the beginning of the Feed state or the beginning of the Idle Ramp state The condition remains true until a START command is received or until a STOP RESET sequence is executed NOTE If Auto Start Next is enabled and there are no states Feed Feed Ramp Idle Ramp between De...

Page 160: ...e logic condition to be true at the end of the specified process when Idle is entered The condition remains true until a START or a STOP RESET command is received Numeric inputs range from 0 to 50 with 1 through 50 indicating the respective active process and 0 indicating any process RATE 0 1 This condition will evaluate true when the actual deposition rate is less than 0 1 Å s for more than 5 sec...

Page 161: ...ing this material will immediately proceed to the Rise 2 state RISE 2 Sets the logic condition to be true at the start of Rise Time 2 The condition remains true until the end of Rise Time 2 The condition is also cleared when entering the Manual state and when a STOP RESET or a STOP START sequence is executed SENSOR Sets the logic condition to be true whenever a Layer containing the Sensor is in th...

Page 162: ...ugh 6 STATEMENT This Event can be used to test a logic statement transition and the appropriate Action is taken when the statement designated becomes true A true statement is indicated by three small asterisks below the statement number Numeric inputs range from 1 through 100 STOP Sets the logic condition to be true as long as the IC6 is in STOP The condition remains true until a RESET or a START ...

Page 163: ...expressed in seconds sss s 0 to 999 9 XFER SENS IN USE Sets the logic condition to be true while a transfer sensor is in use The condition remains true until a transfer sensor is no longer active XTAL FAIL Sets the logic condition to be true as long as there is a Crystal Fail on sensor In the case of a multi position sensor a Crystal Fail occurs when the last available crystal fails and no backup ...

Page 164: ...the Ready state and a Start command is executed while CLOCK HOLD is active the IC6 will progress to the first pre deposit state with a non zero state time If the IC6 is in the Crucible Switch state waiting for Turret Feedback Input and CLOCK HOLD is activated when the turret positioned input is activated the IC6 will progress to the next pre deposit state having a non zero state time The IC6 is pr...

Page 165: ...esignated Material will pause execution and maintain PreCondition power until Pre Cond Soak Hold is turned OFF Commands from Remote Comm and Logic will be independent RESET This action is identical to pressing the RESET button on the front panel RWS INHIBIT ON OFF 0 Any Material to 32 When active ON this will prevent the designated Material from exiting the RateWatcher Hold state If Sample is alre...

Page 166: ...lowed Cannot be done from Ready Idle Stop Crystal Switch Suspend or Crucible Switch When in Ready or Stop use the Start action START INHIBIT ON OFF This feature when active prohibits the START of a layer It does not inhibit the START DEPOSIT function Once Start Inhibit is ON a layer cannot be started until the START INHIBIT is deactivated set to OFF Commands from Remote Comm and Logic will be inde...

Page 167: ...crystals Commands from Remote Comm and Logic will be independent ZERO DEPOSIT TIME 0 any material to 32 This action will zero the Layer Deposit time for the designated Material being deposited If two or more materials are in deposit simultaneously the time will zero for all materials If an output is triggered on a Time Limit the output will remain triggered even after resetting the Layer Time ZERO...

Page 168: ...ght arrow key to move to the statements 5 Place the cursor on any blank logic statement using the up and down cursor keys 6 Press F1 EDIT 7 Press F1 EVENT ACTION 8 Cursor to LAYER END Press F3 INSERT In the upper left of the screen LAYER END will appear after IF 9 Cursor to PROCESS END Press F3 INSERT PROCESS END ccc LAYER END will appear after IF 10 Press F1 IF THEN 11 Cursor down to THEN Press F...

Page 169: ...P1E IC6 Operating Manual 19 To return to the OPERATE display press Menu To run the multilayer process press START once As each layer ends the IC6 will automatically issue another START until the LAST LAYER has completed ...

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Page 171: ...one of two types of data communications hardware ports Standard equipment includes a bit serial RS 232C port Optionally a TCP IP port may be added Both RS 232C and TCP IP ports can be used simultaneously Both the host and server must have the same form of communications equipment and complementary set up For serial communications baud rates must match and so must the data word format The word form...

Page 172: ...e IP address an address which defines the computer on the Internet automatically from a server To communicate directly with the IC6 the Internet protocol IP on the PC must be configured manually and an ethernet crossover cable for example IPN 600 1211 P5 must be connected between the PC and the IC6 Some PC s will auto configure and work with either straight or crossover cable Instructions are prov...

Page 173: ...Connection to be changed right click and select Properties See Figure 10 2 Figure 10 2 Local area connection properties On the General tab select Internet Protocol TCP IP and press the Properties button See Figure 10 3 Figure 10 3 Internet protocol TCP IP properties ...

Page 174: ...e IC6 The IC6 is shipped from INFICON with a pre assigned address of 10 211 72 203 To communicate directly with the IC6 from a PC the PC must also be assigned an address that starts with 10 211 72 but cannot be set to 10 211 72 203 The example in Figure 10 4 uses the address 10 211 72 100 for the PC Figure 10 4 Entering the IP address and subnet mask Click OK to all open dialogs to close out the I...

Page 175: ...F 0x46 when Source Maintenance Cross Talk Calibrate and Auto Tune modes are enabled TCP IP will always operate using the Standard protocol command set It is not affected by the RS 232 Protocol selection 10 3 1 Protocol Key Enclosed element further defined below or above if repeated use Optional Element I Or x x One or more of x included 10 3 1 1 Command Packet Host to IC6 Message length message ch...

Page 176: ...te Command Sub group 1 ASCII byte used with some command groups to further specify commands Command Sub groups for command Q and U C Source G General I Input Name K Process Name L Logic M Material N Material Name O Output Name P Process S Sensor T Type of Output V User Message Command Sub groups for command R and S G General L Layer S Sensor Command ID 1 binary byte Defines specific command within...

Page 177: ...and Response Command Response Packet Error Code NOTE Number of command responses equals number of commands sent If CCB MSB is set indicating a command packet error the response message will be a single packet response error If the CCB MSB is clear the command packet was parsed and a valid command packet format was detected Checksum 1 byte sum modulo 256 of all bytes including CCB Timer and Respons...

Page 178: ... message Unrecognized command in the packet M too many commands Only 100 allowed O Response length is larger than response buffer 10 3 1 3 Timeouts If more than 3 seconds pass between characters of a command packet the IC6 will time out No response packet is sent the IC6 will clear its buffers and assume any future characters are the beginning of a new packet 10 3 2 Data Type Codes All parameters ...

Page 179: ...le values Usually two to five values are allowed As the user toggles through the list the encoded text is displayed on the screen The value stored is an integer 10 3 2 4 INTEGER Integers are 32 bit words Although they are stored as signed integers all our current parameters have a lower limit greater than or equal to 0 10 3 2 5 LOCKCODE The lock code parameter is displayed as XXXX The value is sto...

Page 180: ...ameter group Depending on the actual hardware configuration the response to some Query commands may be an E error code indicating there is no data available Each command has one to three arguments Update commands are used to change a specified parameter to a new value or condition Some parameters are order dependent in that they cannot be updated prior to certain other parameters There is a specif...

Page 181: ...very command requires a remote code and may require a value Command variations include RG Affects system or IC6 level conditions RL Affects conditions for a specified layer 10 4 3 HELLO Command H Command ID given in hex format Hex form example for H1 including length and checksum 0200480149 Response 10 4 4 Query Source Parameter Command QC Command ID Source number Command ID Byte See Table 10 5 So...

Page 182: ...t as a recorder output 2 0x02 Source Shutter Output 0 38 0 Integer 0 not defined Update not allowed if source is running The same output can be used for multiple shutters If multiple shutters have the same output the name will list on the I O all source numbers assigned to that output 3 0x03 Number of Crucibles 0 5 0 Encode 0 1 1 4 2 8 3 16 4 32 5 64 Update not allowed if source is running 4 0x04 ...

Page 183: ...r General Parameters Table 10 6 General parameters QG UG Cmnd ID Name Units Range Low Limit High Limit Default Data Type Notes Update Restrictions and Display Notes 1 0x01 Active Process 1 50 1 Integer Update not allowed if process is running 2 0x02 Layer To Start 1 200 1 Integer Cannot be greater than number of layers in active process If process change causes this conflict then value will be cha...

Page 184: ...0x0d Time Compressed 10x time acceleration 0 1 0 Encode 0 No 1 Yes Gray font when Test Off 14 0x0e Advanced Test Crystal Fails active 0 1 0 Encode 0 Off 1 On 15 0x0f Audio Feedback 0 1 0 Encode 0 No 1 Yes 16 0x10 LCD Dimmer Time Minutes 0 99 0 Integer 0 Always On Non 0 Minutes till off 17 0x11 Date Format 0 1 0 Encode 0 mm dd yyyy 1 dd mm yyyy 18 0x12 USB Datalog Format 0 2 0 Encode 0 Log Off 1 Pa...

Page 185: ...g Page 1 Dlog Comma 24 0x18 DAC 1 Scale 0 1 10 0 10 0 REAL_3X1 Update not allowed if process is running 25 0x19 DAC 2 Scale 26 0x1a DAC 3 Scale 27 0x1b DAC 4 Scale 28 0x1c DAC 5 Scale 29 0x1d DAC 6 Scale 30 0x1e DAC 7 Scale 31 0x1f DAC 8 Scale 32 0x20 DAC 9 Scale 33 0x21 DAC 10 Scale 34 0x22 DAC 11 Scale 35 0x23 DAC 12 Scale Table 10 6 General parameters continued QG UG Cmnd ID Name Units Range Lo...

Page 186: ... Polarity 40 0x28 DAC 5 Polarity 41 0x29 DAC 6 Polarity 42 0x2a DAC 7 Polarity 43 0x2b DAC 8 Polarity 44 0x2c DAC 9 Polarity 45 0x2d DAC 10 Polarity 46 0x2e DAC 11 Polarity 47 0x2f DAC 12 Polarity 48 0x30 Source DAC Required 0 1 1 Encode 1 Yes 0 No Table 10 6 General parameters continued QG UG Cmnd ID Name Units Range Low Limit High Limit Default Data Type Notes Update Restrictions and Display Not...

Page 187: ...or Stop NOTE UI changes are not allowed while a process is running The UI command will not allow updating a name set by hardware designation unless it is identical to the defined hardware name 10 4 10 Query Process Name Command QK Process Number Process Number Byte 1 50 Response Process Name Process Name String Up to 15 characters null terminated The string returned will be a blank if the default ...

Page 188: ...minator ETX 0x03 Indicates end of then Note 1 For definition of event and action codes see section 10 4 14 on page 10 20 for the Event list and section 10 4 15 on page 10 24 for the Action list The codes sent via communications would be the number listed there If the event is to be negated the event code will be negated as well For example the code for external input is 0x41 To indicate not extern...

Page 189: ...e next 5 After event code with its numerals there may or may not be a 6 Next must be either a connector or a space 7 If a space move on to Action Terms 8 If connector start next event go to point 3 above NOTE The last term cannot have a connector Action Terms Up to five action codes make up the action terms Each code will be followed by a numeric if it is required There are no connectors passed wi...

Page 190: ... None Just header and trailer Logic changes are not allowed while a process is running or if the IC6 is in a stop 10 4 14 IC6 Event List Events used in the Logic Statement IF section Logic codes are used in the remote communication query and update commands The Logic codes start at 0x41 because there are formatting codes for connectors parentheses etc used in the logic statements that are ASCII co...

Page 191: ...56 0xAA Feed 0x57 0xA9 Idle Ramp 0x58 0xA8 Idle 0x59 0xA7 Suspend 0x5A 0xA6 Stop 0x5B 0xA5 Final Thick 0x5C 0xA4 Thick Limit 0x5D 0xA3 Thick Sum XXX See Note 4 Equation 1 3 Thickness xxx xxx 0 999 9 0x5E 0xA2 Time Limit 0x5F 0xA1 Process XXX Process 1 50 0x60 0xA0 Layer XXX Layer 1 200 0x61 0x9F Material XXX Material 1 32 0x62 0x9E Sensor XXX Sensor 1 8 0x63 0x9D Table 10 7 Event list continued Ev...

Page 192: ...s See Note 1 Timer 1 20 Time in Tenths of Seconds 0 999 9 0x6A 0x96 Count limit Counter 1 20 Counter value 0 999 0x6B 0x95 Statement Logic Statement 1 100 0x6C 0x94 Xtal Fail Sensor 0 any 0 8 0x6D 0x93 Xtal Switching Sensor 0 any 0 8 0x6E 0x92 Max Power 0x6F 0x91 Min Power 0x70 0x90 Not Used 0x71 0x8F BkupSens In Use 0x72 0x8E Ion Assist Dep 0x73 0x8D Auto Z Fail Sensor 0 any 0 8 0x74 0x8C Table 1...

Page 193: ...via remote communications as tenths of seconds Seconds are entered by keyboard as whole numbers Note 2 The time is entered via remote communications as whole minutes 99 hours 5940 minutes so 99 hours 59 minutes 5999 minutes maximum The time entered by keyboard is in hours and minutes Note 3 Maximum number of minutes is 59 The entry of 00 65 is invalid That time can be entered as 01 05 Note 4 Thick...

Page 194: ...Logic Code Extern Out On XXX Output 1 38 0x41 Extern Out Off XXX Output 1 38 0x42 Select Process XXX Process 1 50 0x43 Stop 0x44 Start 0x45 Reset 0x46 Suspend XXX Material 0 32 0x47 Zero Deposit Time XXX 0x48 Zero Thick XXX 0x49 Trig Fnl Thick XXX 0x4A Continue Dep XXX 0X4B Start Deposit XXX 0x4C Go to NonDep XXX 0x4D Go to PostDep XXX 0x4E Increment Count XXX Counter 1 20 0x4F Clear Counter XXX 0...

Page 195: ...bit On XXX 0x61 RWS Init iate Off XXX 0x62 RWS Initiate On XXX 0x63 Message On XXX See Note 1 Message 1 10 0x64 Message Off XXX See Note 1 0x65 Note There are ten User Messages available for the user to construct These messages can be displayed and cleared via logic actions User Messages are constructed on the General page Message screen Note Remote Comm and Logic will be independent Methods used ...

Page 196: ... of value depends on command ID see Data Type column in Table 10 9 Response None Just header and trailer Table 10 9 Material parameters QM UM Cmnd ID Name Units Range Low Limit High Limit Default Data Type Notes Update Restrictions and Display Notes 1 0x01 Density g cc 0 1 99 999 1 0 REAL_5X3 2 0x02 Z Ratio 0 1 15 0 1 0 3 0x03 Master Tooling 1 0 999 9 100 0 REAL_4X1 4 0x04 Control Loop 0 2 0 Encod...

Page 197: ...9 0 Time Time Note Times are displayed as mm ss Times are stored as seconds The maximum number of seconds is 5999 This would be displayed as 99 59 14 0x0e PreCond Soak Time seconds mm ss 0 5999 0 0 99 59 0 Time 15 0x0f Soak Power 1 0 0 99 99 0 0 REAL_4X2 16 0x10 Rise Time 1 seconds mm ss 0 5999 0 0 99 59 0 Time See Time Note 17 0x11 Soak Time 1 seconds mm ss 0 5999 0 0 99 59 0 Time See Time Note 1...

Page 198: ...9 Shutter Delay Accur 1 99 5 Integer Gray font unless Delay option is set to shutter or both 26 0x1a Transfer Sensor 0 8 0 Integer 0 No transfer sensor Gray font unless delay option is set to shutter or both and transfer service is not set to 0 Update not allowed if material is running 27 0x1b Transfer Tooling 1 0 999 9 100 0 REAL_4X1 28 0x1c Feed Power 0 0 99 99 0 0 REAL_4X2 29 0x1d Feed Ramp Tim...

Page 199: ...ot allowed if material is running 38 0x26 On Final Thickness 0 2 1 Encode 0 Continue 1 Post Dep 2 NonDepCont 39 0x27 Ramp 1 Rate Å s 0 999 9 0 REAL_ 4F31 40 0x28 Start Ramp 1 KÅ 0 999 999 0 REAL_ 4F31 Value must be less than Start Ramp 2 thickness value if Start Ramp 2 thickness value is non zero 41 0x29 Ramp 1 Time seconds mm ss 0 5999 0 0 99 59 0 Time See Time Note 42 0x2a Ramp 2 Rate Å s 0 999 ...

Page 200: ... Visible only if Multipoint is set to Yes 50 0x32 Sensor 1 Failure Action 0 4 2 Encode 0 Unused 1 PostDp 2 Stop 3 Suspnd 4 TimePw Visible only if Multipoint is set to Yes At least one must be non zero when multipoint set to Yes Update not allowed when transfer or backup sensor is running 51 0x33 Sensor 2 Failure Action 0 4 0 52 0x34 Sensor 3 Failure Action 53 0x35 Sensor 4 Failure Action 54 0x36 S...

Page 201: ...Failure Trigger 63 0x3f Sensor 6 Failure Trigger 64 0x40 Sensor 7 Failure Trigger 65 0x41 Sensor 8 Failure Trigger 66 0x42 Sensor 1 Weight 1 400 0 100 0 REAL_4X1 Visible only if Multipoint is set to Yes Gray font is Failure Action 0 not used 67 0x43 Sensor 2 Weight 68 0x44 Sensor 3 Weight 69 0x45 Sensor 4 Weight 70 0x46 Sensor 5 Weight 71 0x47 Sensor 6 Weight 72 0x48 Sensor 7 Weight 73 0x49 Sensor...

Page 202: ...ing 82 0x52 Sensor 1 CrystalTwo Tooling 1 0 999 9 100 0 REAL_4X1 Visible only if Multipoint is set to Yes Gray if crystal type not Crystal2 83 0x53 Sensor 2 CrystalTwo Tooling 84 0x54 Sensor 3 CrystalTwo Tooling 85 0x55 Sensor 4 CrystalTwo Tooling 86 0x56 Sensor 5 CrystalTwo Tooling 87 0x57 Sensor 6 CrystalTwo Tooling 88 0x58 Sensor 7 CrystalTwo Tooling 89 0x59 Sensor 8 CrystalTwo Tooling Table 10...

Page 203: ...kness KÅ 98 0x62 Sensor 1 Xtal Position First 0 12 0 Integer Visible only if Multipoint is set to Yes Gray font if Sensor Type is Single CrystalTwo or Generic 99 0x63 Sensor 2 Xtal Position First 100 0x64 Sensor 3 Xtal Position First 101 0x65 Sensor 4 Xtal Position First 102 0x66 Sensor 5 Xtal Position First 103 0x67 Sensor 6 Xtal Position First 104 0x68 Sensor 7 Xtal Position First 105 0x69 Senso...

Page 204: ...running 115 0x73 Failure Action 1 4 2 Encode 1 PostDp 2 Stop 3 Suspnd 4 TimePw Visible only if Multipoint is set to No Update not allowed when transfer sensor or backup sensor is running 116 0x74 CrystalTwo Tooling 1 0 999 9 100 0 REAL_4X1 Visible only if Multipoint is set to No Gray font if Sensor Type is not CrystalTwo 117 0x75 Xtal Position First 0 12 0 Integer Visible only if Multipoint is set...

Page 205: ... 124 0x7c Stability Total Hz 0 9999 0 Integer 1 24 are excluded 125 0x7d Recorder Output 0 12 0 Integer 0 No recorder Not allowed to be the same as a source DAC 126 0x7e Recorder Function 0 3 0 Encode 0 Filtered Rate 1 Thick 2 RateDev 3 Power Gray font if recorder output set to 0 127 0x7f Recorder Range 0 99999 100 Integer Gray font if recorder output is set to 0 or Recorder Function is Power or R...

Page 206: ...l terminated Response None Just header and trailer 10 4 20 Query Output Name Command QO Output Number Output Number Byte 1 38 Response Output Name Output Name String Up to 15 characters null terminated 10 4 21 Update Output Name Command UO Output Number Output Name Output Number Byte 1 38 Output Name String Up to 15 characters null terminated Response None Just header and trailer Output Names may ...

Page 207: ... Value Command ID Byte See Table 10 10 Process Number Byte 1 50 Layer Number Byte 1 to 200 Parameter Value Integer Float Type of value depends on command ID see Data Type column in Table 10 10 Response None Just header and trailer Table 10 10 Process layer parameters QP UP Cmnd ID Name Units Range Low Limit High Limit Default Data Type Notes Update Restrictions and Display Notes 1 0x01 Material 0 ...

Page 208: ...le 10 11 Response None Just header and trailer 4 0x04 Crucible Cruc 1 64 1 Integer Update not allowed if active process is running 5 0x05 Co Deposition CoDep 0 1 0 Encode 0 No 1 Yes When this layer is set to yes the next layer will not display Gray font if next layer is empty OR next layer is set to Yes OR this layer is the last layer Update not allowed if active process is running No update if th...

Page 209: ...er 0 not defined Gray font if Sensor Type Single Update not allowed if the sensor is running Not accepted if output in use by other hardware 4 0x04 Auto Z 0 1 0 Encode 0 No 1 Yes 5 0x05 of Positions 1 12 1 Integer Visible only when Sensor Type 4 Update not allowed if the sensor is running 6 0x06 of Pulses 1 10 1 Integer 7 0x07 Pulse On Time Seconds 0 1 9 9 1 REAL_3X1 8 0x08 Pulse Off Time Seconds ...

Page 210: ... changes are not allowed while a process is running 10 4 28 Query User Message Command QV User Message Number User Message Number Byte 1 10 Response User Message User Message String Up to 19 characters null terminated 10 4 29 Update User Message Command UV User Message Number User Message Name User Message Number Byte 1 10 User Message Name String Up to 19 characters null terminated Response None ...

Page 211: ...active layers The following bytes are which layer s is are active 3 0x03 Output status 5 Byte Byte Byte Byte Byte Each bit represents an output bit set means output active MSB of first byte is output 1 MSB of the fifth byte is output 33 4 0x04 Input status 4 Byte Byte Byte Byte Each bit represents an input Bit set means input active MSB of first byte is input 1 MSB of the fourth byte is input 25 5...

Page 212: ...e are no designators the first byte returned will be zero 8 0x08 Cause of Stop 1 Byte See encodes in section 15 4 on page 15 7 If not currently in Stop will return Data Not Available error 9 0x09 Transient Messages 1 Byte See encodes in section 15 5 on page 15 9 10 0x0a Sensor Status 8 Byte Byte Byte Byte Byte Byte Byte Byte One byte for each sensor Range between 0 and 5 0 Good Crystal and active ...

Page 213: ...our minute and the seconds 17 0x11 System Configuration What boards are present 2 Byte Byte Bit 0x0001 Measurement Bd 1 0x0002 Measurement Bd 2 0x0004 Measurement Bd 3 0x0008 Measurement Bd 4 0x0010 I O Board 1 0x0020 I O Board 2 0x0040 I O Board 3 0x0080 Optional DAC Board 0x0100 Temperature Control Board 1 0x0200 Temperature Control Board 2 0x0400 Ethernet Board 0x0800 Reserved 0x1000 Reserved 0...

Page 214: ... active layer If the requested layer is inactive an error will be returned Response See Data Returned in Table 10 13 Table 10 13 Status layer SL Command ID Description Number of bytes in the response Data Returned Notes 0 0x00 N A 1 0x01 Filtered Rate 4 or 24 Float Å S 2 0x02 Displayed Rate 4 or 24 Float Å S Averaged over one second 3 0x03 Source Power Output 4 or 24 Float 4 0x04 Thickness 4 or 24...

Page 215: ...e Deviation power output trend Varies with of data points Integer Float Float Number of bytes in the response Average values from the operate screen graph Format of each data point 15 0x0f State before Suspend 1 or 6 Byte See encodes in section 3 5 on page 3 32 If not currently in Suspend will return No Data Error 16 0x10 Data Log 76 or 456 Multiple pieces of information See section 3 6 10 on page...

Page 216: ...Byte Byte Byte Byte Byte One byte for each sensor Range between 0 and 12 Number of good crystals on a CrystalTwo Crystal6 or Crystal12 Sensor Returns either a 0 current crystal failed or a 1 current crystal good for a Singlesensor The command is not intended to be used for Generic sensor returns NO_DATA 2 0x02 Crystal Position 1 or 8 Byte or Byte Byte Byte Byte Byte Byte Byte Byte One byte for eac...

Page 217: ...rmonic Frequency 8 or 64 Long or Long Long Long Long Long Long Long Long One long integer for each sensor Unconverted to convert to Hz multiply by 0 000873114913702011 8 0x08 Anharmonic Activity 4 or 32 Integer or Integer Integer Integer Integer Integer Integer Integer Integer One Integer for each sensor Range 0 999 9 0x09 New crystal Frequency 16 or 128 Long Long or Long x16 Returns the Fundament...

Page 218: ...Float Float Float Float Float kÅ Returns sensor thickness 13 0x0d Sensor Raw Rate 4 or 32 Float or Float Float Float Float Float Å s Returns sensor raw rate If sensor is not in use response will be 0 Å s Table 10 14 Status sensor continued SS Command ID Description Number of bytes in the response Data Returned Notes ...

Page 219: ...el RG 3 command 5 0x05 Set Logic Statement Statement Number to True Byte Range is 1 100 Only does something if logic statement event Computer Control set Otherwise ignored 6 0x06 Clear Logic Statement Statement Number to False Byte Range is 1 100 Only does something if logic statement event Computer Control set Otherwise ignored 7 0x07 Crystal Fail Inhibit On Byte Range is 0 8 0 All Crystal Fail o...

Page 220: ...on Material Byte Material Range is 0 32 0 all materials 20 0x14 Soak Hold 1 off Material Byte Material Range is 0 32 0 all materials 21 0x15 Soak Hold 2 on Material Byte Material Range is 0 32 0 all materials 22 0x16 Soak Hold 2 off Material Byte Material Range is 0 32 0 all materials 23 0x17 Switch Sensor Sensor to Crystal Byte Byte Sensor Range 1 8 Crystal Range 0 to maximum allowed crystals for...

Page 221: ...Removes all layers of the specified process 29 0x1d Soak Hold Pre Con on Material Byte Material Range is 0 32 0 All Materials 30 0x1e Soak Hold Pre Con off Material Byte 31 0x1f Start Inhibit On Disallows a Start command to be executed 32 0x20 Start Inhibit Off Allows a Start command to be executed 33 0x21 RateWatcher Sampling Inhibit On Material Byte Will immediately cause the Deposit state to le...

Page 222: ...ame Material Material Library Entry Byte Byte Give material number Material 1 32 the name corresponding to material entry Library Entry 0 254 Library entries range from 0 Ag to 254 ZrO2 with numbers correcponding to the alphabetical listing in the library The density and Z Ratio will be changed accordingly Table 10 15 Remote general continued RG Command ID Meaning Action Value Notes Table 10 16 Re...

Page 223: ...l go to Time Power if the previous state was Non Deposit Hold otherwise is not allowed 6 0x06 Go to Manual Source shutter does not change position Cannot be done if in STOP Suspend or Crucible Switch or there is not a good crystal 7 0x07 Set Power Level Float Range is 0 99 99 Only allowed if in Manual Time Power or Non Deposit Hold State If the value is greater than the Max Power or less than the ...

Page 224: ...od command CCB 00 Indicates no errors in the command packet Timer Tick Increments 10 times second ASCII Name and version Each byte represents an ASCII character Combine these characters to get IC6 Version 0 14 The H1 command response is a string of ASCII characters Null terminator for ASCII character string Length character Hex number of bytes in the message excluding length character and checksum...

Page 225: ...nse 030000C506CB 10 4 35 6 Query Material Parameter Z Ratio 2 Material 1 Command Format QM Command ID Material Number QM2 1 Command QM2 1 0400514D0201A1 Response 070000F10648E1BA3E18 10 4 35 7 Update Material Parameter Control Loop 4 Material 1 PID 2 Command Format UM Command ID Material Number Parameter Value UM4 1 2 Command UM4 1 2 0800554D040102000000A9 Response 0300000D0613 10 4 35 8 Query Sen...

Page 226: ...ommand Format QC Command ID Source Number QC2 1 Command QC2 1 04005143020197 Response 0700003F060000000045 10 4 35 11 Update Source Parameter Number of crucibles 3 Source 1 4 crucibles 1 Command Format UC Command ID Source Number Parameter Value UC3 1 1 Command UC3 1 1 080055430301010000009D Response 03000054065A 10 4 35 12 Query Process Layer Parameter Process 1 Layer 1 Command Format QP Command ...

Page 227: ...Update Process in this case Checksum 1 byte hex sum of complete message excluding length characters In this case 00 39 06 3F so the checksum shown is 3F Be sure to add in hex Timer Tick Increments 10 times second CCB 00 Indicates no errors in the command packet Length character Hex number of bytes in the message excluding length character and checksum In this case the message consists of 3 bytes 0...

Page 228: ... Command UN 1 SILVER 0A00554E0153494C5645520079 Response 030000E806EE 10 4 35 16 Query Process Name Process 1 Command Format QK Process Number QK 1 Command QK 1 0300514B019D Response 080000C906474F4C4400F5 10 4 35 17 Update Process Name Process 1 GOLD Command Format UK Process Number Process Name UK 1 GOLD Command UK 1 GOLD 0800554B01474F4C4400C7 Response 0300007D0683 10 4 35 18 Query Input Name I...

Page 229: ...ponse 0B0000E206534855545445520017 10 4 35 21 Update Output Name Output 1 SHUTTER Command Format UO Output Number Output Name UO 1 SHUTTER Command U0 1 0B00554F015348555454455200D4 Response 030000E306E9 10 4 35 22 Query Output Type Output 1 Command Format QT Output Number QT 1 Command QT 1 0300515401A6 Response 040000BF0600C5 10 4 35 23 Update Output Type Output 1 Normally Closed 1 Command Format ...

Page 230: ...onse 0A0000C80648454C4C4F210063 10 4 35 25 Update User Message Message 1 HELLO Command Format UV User Message Number User Message Name UV 1 HELLO Command UV 1 HELLO 0A0055560148454C4C4F210041 Response 030000CD06D3 10 4 35 26 Query Logic Statement Statement 1 Command Format QL Statement Number QL 1 Command QL 1 0300514C019E Response 090000B00605410120450365 ...

Page 231: ...tement in this case Set of elements Using the events and actions list from the IC6 manual construct the required logic statement In this case 41 External Input 01 specifies input 1 20 space which means the action fill follow 45 Start Length character Hex number of bytes in the message excluding length character and checksum In this case the message consists of 9 bytes 55 4C 45 03 The low end of th...

Page 232: ...Crystal Life 0 Sensor 1 Command Format SS Command ID Sensor SS0 1 Command SS0 1 040053530001A7 Response 040000C10600C7 10 4 35 31 Remote General Action Start 0 Command Format RG Command ID Action Value RG0 Command RG0 030052470099 Response 030000D706DD 10 4 35 32 Remote Layer Action Open Source Shutter 8 Command Format RL Command ID Layer Number Action Value RL8 Command RL8 0400524C0801A7 Response...

Page 233: ...onvert each byte to its binary equivalent you can do this using a scientific calculator to produce the 32 bit float response Rearrange the 32 bits making up the float response into packets of 1 8 and 23 bits representing the Sign Exponent and Mantissa respectively Rewrite the current value in binary scientific notation The Sign 0 means that the sign of the decimal number is positive Using a scient...

Page 234: ...dd the exponents so for example 2 2 x 23 21 etc 23 22 2 2 2 4 2 5 2 10 2 12 2 16 2 17 2 18 2 19 2 20 Expand the exponents in their decimal form 8 4 0 25 0 0625 0 03125 0 0009765625 0 000244140625 0 0000152587890625 0 00000762939453125 0 000003814697265625 0 0000019073486328125 0 00000095367431640625 Compute the sum and round appropriately In this case this is the Z Ratio of sensor 1 12 34500026702...

Page 235: ... contribute to layer to layer thickness variances and cannot be addressed by a single point controller First a deposition source never has the idealized cosine flux distribution Second the flux distribution is dynamic changing as the deposition progresses The IC6 when using more than one sensor for each material calculates an aggregate rate and uses it for rate control and thickness termination Th...

Page 236: ...11 2 IPN 074 505 P1E IC6 Operating Manual Figure 11 1 The essential advantage of multi point deposition sensing ...

Page 237: ...ated from a combination of the above information into a weighted average If a sensor fails during deposition a sudden change in the aggregate rate may occur due to this sensor s rate information being lost An aggregate multiplier is calculated to correct for this sudden change The aggregate multiplier is based on the average deposition prior to sensor failure An average aggregate rate is calculate...

Page 238: ...R The tooling factor is comprised of two parts The MASTER TOOLING parameter located in the upper block of the Material Sensor Set Up display is used to scale the aggregate rate and thickness to the substrate When Multipoint is set to Yes additional parameters including the SENSOR TOOLING parameter appear in the Sensor Set Up display area as shown in Figure 11 2 on page 11 3 MASTER TOOLING 10 0 to ...

Page 239: ...signates which of the DAC outputs is to be used as a recorder output 0 indicates there is not a DAC identified with this particular material Values 1 through 6 correspond to the six DAC BNC outputs on the back of the IC6 labeled DAC 1 to DAC 6 DAC outputs 7 to 12 require the optional DAC outputs card SENSOR RECORDER FUNCTION Rate Thick RateDev This parameter determines the function of the Sensor s...

Page 240: ...s on an individual layer maintain a layer in rate control but with the source substrate shutter closed and without incrementing the thickness NonDepCntl 12 DAC outputs providing flexibility to record rate power and thickness associated with sensors sources and materials ability to transition from deposit to non deposit control using remote communications or logic statements three thickness equatio...

Page 241: ...iguration NOTE The same method applies to any smaller set of simultaneous layers Instrument IC6 with 3 measurement boards for six simultaneous layers or 2 measurement boards for four simultaneous layers and optional DAC Outputs card Figure 11 3 6 Layer display Figure 11 4 4 Layer display ...

Page 242: ...ecorder Output requires DAC Option board and no DAC outputs to be assigned to sources in each material source page 3 Assign a unique sensor 1 to 6 to each of the six materials Set the Failure Action for each sensor to Suspend TimePw PostDp or Stop Stop causes all active layers to stop suspend only stops the associated layer 4 Enter Pre Post parameters for each material 5 Enter Deposit parameters f...

Page 243: ...ters See Chapter 7 General Parameters 1 Set Layer to Start to 1 2 Set Source DAC Required to No 3 Set Auto Start Next to No 4 Set Max Concurrent Layer to 6 5 Set up Thickness Eq 1 2 and 3 if desired to use in a logic statement 11 4 6 Logic Functions Table Table 11 1 Logic functions table Cygnus is Channel number IC6 IF Events see section 9 3 on page 9 7 Rise Soak n Rise Soak n ON Layer Material or...

Page 244: ... deposit etc 11 4 7 2 Suspend Once a layer is suspended it can only be restarted with a Start from the front panel RG 0 command or a logic statement All suspended layers will be started together 11 4 7 3 Idle Once a layer is in Idle it can only be restarted after all active layers reach Idle and end of process THEN Actions see section 9 4 on page 9 16 Start Start starts the first layer in Ready an...

Page 245: ... tooling factor can be experimentally established by following the guidelines in section 12 3 on page 12 2 In the IC6 if the Z Ratio is not known it could be estimated from the procedures outlined in section 12 4 on page 12 3 or typically the Auto Z function can be used to determine the Z Ratio 12 2 Determining Density NOTE The bulk density values retrieved from the Material Library are sufficient...

Page 246: ...g Tooling 1 Place a test substrate in the system s substrate holder 2 Make a short deposition and determine actual thickness 3 Calculate tooling from the relationship shown in equation 2 2 where Tm Actual thickness at substrate holder Tx Thickness reading in the IC6 TFi Initial tooling factor 4 Round off percent tooling to the nearest 0 1 5 When entering this new value for tooling into the program...

Page 247: ...rials in thin film form are very close to the bulk values However for high stress producing materials Z values of thin films are slightly smaller than those of the bulk materials For applications that require more precise calibration the following direct method is suggested 1 Establish the correct density value as described in section 12 2 on page 12 1 2 Install a new crystal and record its starti...

Page 248: ...k frequency 6045000 Hz z Z Ratio of deposited film material Zq Specific acoustic impedance of quartz 8765000 MKS units p density of deposited film g cc For multiple layer deposition for example two layers the Z value used for the second layer is determined by the relative thickness of the two layers For most applications the following three rules will provide reasonable accuracies If the thickness...

Page 249: ... to ensure good AutoTune results and good source control careful consideration should be given to eliminating system noise thermal shorting and any other factors that result in rate instabilities 2 Verify that the Material Source parameters are correct and that at least one sensor has been assigned to the Material to be autotuned Choose the source s voltage range that best suits the material and e...

Page 250: ...PT or F4 REJECT the new control loop values Accepting the changes replaces the old parameters with the new values while rejecting the changes leaves the old values in place 8 An AUTOTUNE failure means the IC6 was unable to consistently measure the system s response characteristics NOTE To ensure a successful AutoTune there are a few items to be considered A well conditioned source is imperative Be...

Page 251: ... 12 1 AutoTune overview The default condition is Auto Tune Disabled To enable Auto Tune move the cursor onto the Disabled box and press TOGL then ENTER The parameter value should now show Enabled To return to the Main Menu display disable the Auto Tune function by setting it back to Disabled Figure 12 2 AutoTune parameters display ...

Page 252: ... The maximum allowed value will always be 999 9 Å s The minimum allowed value is 2 times the Desired Rate value TUNE TYPE Quick Complete This parameter is used to choose between a Quick Tune and a Complete Tune described in section 12 5 5 The default value is Quick MATERIAL NAME This is a read only parameter that identifies the material being deposited CONTROL LOOP This is a read only parameter th...

Page 253: ...press F2 AUTO TUNE PARAMETERS The AutoTune Manual display is similar to the general Operate display with the exception that Thickness and Process information will be absent The AutoTune Manual display automatically places the instrument into the MANUAL state Just like the normal MANUAL state the power level can be adjusted via the Hand Held Controller and the source shutter relay is active Figure ...

Page 254: ...lates how quickly the system reacts to an instantaneous increase in source power level The results of the Speed Test determine whether the system is fast or slow Consequently this designation of fast or slow determines what action is to follow For Quick Tune the increment in power level is a pre determined percentage of the power while for a Complete Tune the increment in power level is calculated...

Page 255: ...ment will leave AutoTune and return the values calculated with Quick Tune If the Maximum Rate is not exceeded the control loop parameters will be calculated based on the rate transition There is rate feedback when doing a Complete Tune The major difference in the implementation of AutoTune for a fast source typically an electron beam gun as opposed to a slow source is the way in which rate stabili...

Page 256: ...isplay When AutoTune is complete the newly calculated values will be displayed next to the old values The user then has the option to F3 ACCEPT or F4 REJECT the new control loop values Accepting the changes replaces the old parameters with the new values while rejecting the changes leaves the old values in place ...

Page 257: ... values calculated will be displayed on the Material Sensor page The Cal Thickness values are then used to calculate the percent cross talk Cross Talk values shown on the Layer definition display EVERY sensor used on BOTH materials of a codeposition MUST be calibrated for each material The general expression for computation of Cross Talk is by the following Example Materials A and B are to be co d...

Page 258: ... Co deposition Note that EVERY sensor used on BOTH Materials of a co deposition MUST be calibrated for EACH Material calibrated Each material to be co deposited is calibrated separately If a material is used in more than one co deposition application for example materials A and B co deposited then materials A and C co deposited Material A needs to be calibrated only once This is especially importa...

Page 259: ...secondary sensor This manual entry of the Cal Thickness value ignores the tooling difference between the two crystal positions Cross Talk Calibration is accessed via the Main Menu Maintenance display NOTE In the figures following only four sensors are used Sensor 1 and 2 for Material 1 and Sensor 3 and 4 for Material 2 Figure 12 7 Cross talk overview The default condition is Cross Talk Calibrate D...

Page 260: ...nge from 0 001 to 999 9 Å s The default value is 10 Å s It is recommended this rate be identical to the aggregate rate desired during deposition MAXIMUM POWER 0 0 to 99 99 This parameter is identical in function to the Maximum Power parameter found in Material Set Up The default value is 90 0 CALIBRATE Yes No This entry selects which sensors are to be calibrated NOTE Every Sensor used for both of ...

Page 261: ...ering the MANUAL state Source and Sensor shutters will activate Rates and Thicknesses for each of the sensors being calibrated will also be displayed The Aggregate Rate Thickness and Power are also displayed Figure 12 9 Crosstalk manual display 12 6 2 1 Function Key Selection Choices Key Function Description F2 TOGGLE CALIBRATION When the power level and rates are stable press F2 TOGGLE CALIBRATIO...

Page 262: ...sor page i e the sensors used to calculate the Aggregate Rate The instrument will stay in the automatic calibration mode for a minimum of 1 minute The estimated time to complete calibration is displayed If the desired 300 Hz frequency shift has not taken place within 15 minutes automatic calibration will time out and a Status error message will be given When automatic calibration is completed the ...

Page 263: ... Sensor page Figure 12 11 Crosstalk complete display 12 6 4 1 Function Key Selection Choices for Cross Talk Calibration Select Key Function Description F3 ACCEPT Press this key to accept the Calibration Thickness values and returns to the Cross Talk Calibration SETUP display The accepted Calibration Thickness values are entered into page 3 of the Material Set Up display F4 REJECT Press this key to...

Page 264: ...rce and sensor shutters and rotating the crucible indexer associated with a selected material Source power may be manually adjusted using the hand held controller The unit must be in Ready mode to Enable Source Maintenance and it must be Disabled to exit back to normal operation Figure 12 12 Source maintenance page ...

Page 265: ...r pressing the F1 key will advance it to the next position Setting the Switch to Crucible parameter to one of the positions before pressing F1 will activate the programmed crucible indexer outputs to rotate to the specified position The F1 key is greyed out for a single position crucible to indicate it is not active 12 7 1 2 Toggle Sensor and Source Shutter Press the F2 key to toggle all sensor sh...

Page 266: ...2 22 IPN 074 505 P1E IC6 Operating Manual 12 8 System Status Figure 12 13 System status display The System Status display shows installed option boards and firmware versions There are no user parameters ...

Page 267: ...rt a timer on any event via a logic statement These counters and timers can then be checked via other logic statements to initiate one or more actions at a given count or when an elapsed amount of time has passed On the counter timer screen see Figure 13 1 you can monitor all the counters and timers and by positioning the cursor on the counter or timer number manually zero a timer counter F1 or st...

Page 268: ...13 2 IPN 074 505 P1E IC6 Operating Manual This page is intentionally blank ...

Page 269: ... for only eight characters in a file name with an optional three character extension 14 1 1 USB Storage Devices The following USB 2 0 storage devices have been tested for use with the IC6 Memorex TravelDrive 512 MB Flash Drive SanDisk SDCZ2 1024 A10 1 GB Cruzer Mini Flash Drive Lexar 1 GB Sport Flash Drive Lexar 4 GB Lightning Flash Drive Kingston 32 GB DataTraveler 150 Flash Drive NOTE The USB st...

Page 270: ...he configuration file can be named within the eight character limitation that exists in the USB file handling firmware File names cannot contain the space character The IC6 will use the ISC extension to identify configuration files The IC6 will ignore or reject IC 5 and Cygnus ISC configuration files these files are not compatible with the IC6 See Figure 14 1 Figure 14 1 Configuration files NOTE T...

Page 271: ...atalogging is turned on and a USB flash drive is not present The LogOff setting turns off datalogging As the layers create the datalog file they will be sent to the IC6DLOG directory on the storage device attached to the USB port The files will be named PxxRyyy IDL where xx is the process number and yyy is the run number If a file with the same name exists the new data log information will be appe...

Page 272: ...her DDMMYYxx BMP or MMDDYYxx BMP depending on the date format setting DD day of month MM month YY year xx is a number that increments from 0 to 99 resetting to 0 every day The IC6 will use the BMP extension to identify screen capture files The indicates that additional files exist on the USB device beyond those displayed Use the Up Down arrows keys to navigate Individual screen shots can be delete...

Page 273: ...000 0000 0000 0000 Max Power X X Whenever the source power reaches the maximum power programmed for an active layer X Material number Whenever the source power is reduced from the maximum power for an active layer All Note This message will display in the cause of stop area whenever it is TRUE Designated area 0x4000 0000 0000 0000 Test The general parameter Test has been set to Yes The general par...

Page 274: ...ace X Sensor When the carousel is detected or when the sensor type is set to something other than Crystal12 All 0x0040 0000 0000 0000 Control Delay X X When the Delay option is set to Control and a material enters the control delay X Material The control delay is complete All 0x0020 0000 0000 0000 Transfer Delay X X Sensor Shutter delay for a transfer sensor is active X Material The transfer delay...

Page 275: ...00 End Of Process The last active layer of the process is complete A new process or the first layer of the active process starts Stop Reset All 0x0000 0200 0000 0000 CoDep Not Calibr ated X X The co deposited materials do not have calibrated thickness values entered in the material setup for all active sensors Therefore the Cross Talk calibration is un calibrated X Material Material parameter Cal ...

Page 276: ...le to Auto Z Sensor Parameter Auto Z is set to No All 0x0000 0004 0000 0000 DAC Error X DAC monitoring has detected an error in a DAC used for a recorder X DAC On Reset All 0x0000 0002 0000 0000 Testing XIU X When XIU test begun X Sensor Number When XIU test finished Sensor Info 0x0000 0001 0000 0000 Backup Sensor X The backup sensor is loaded X Material The backup sensor is no longer loaded 0x000...

Page 277: ...er Message 3 Logic event Message On 3 Logic event Message Off 3 All 0x0000 0000 0000 0080 User Message 4 Logic event Message On 4 Logic event Message Off 4 All 0x0000 0000 0000 0040 User Message 5 Logic event Message On 5 Logic event Message Off 5 All 0x0000 0000 0000 0020 User Message 6 Logic event Message On 6 Logic event Message Off 6 All 0x0000 0000 0000 0010 User Message 7 Logic event Message...

Page 278: ... AutoTune Half Rate When a complete tune is required this is displayed after the quick bump is finished When the next message is put up AutoTune Complete Bump AutoTune displays the change in the power supply setting Test is complete and results are displayed AutoTune AutoTune Failure AutoTune is unable to calculate control loop parameters when doing a quick tune Exit AutoTune Restart AutoTune Auto...

Page 279: ... can resume All 1 Crystal Fail X There was a crystal failure and the material parameter Failure Action is set to stop on fail X Sensor 2 Hand Controller STOP command was received from the handheld controller 3 Front Panel Keyboard STOP key was pressed 4 Communication A STOP command was received from remote communications 5 Crucible Fail X The IC6 failed to detect a good crucible in the time allowe...

Page 280: ...nd the process can resume All 14 DAC Failure Monitoring of the DAC output via an ADC determined that the output voltage is incorrect All 15 Half Rate Fail AutoTune is unable to vary the source power to obtain half the desired deposition rate AutoTune 16 Low Rate Auto tuning is terminated when the deposition rate at the start of tuning is below 0 1 Å s AutoTune 17 AutoTune Fail The complete tune pa...

Page 281: ...e activities include Layer editing used in the active process copying defaulting a material entering source maintenance running an RS232 test running an XIU test and reading in a configuration file 3 Parameter Default All parameters were set to their default values on power up 4 Process Variables Default All process variables were set to their default values on power up Process variables include c...

Page 282: ... an invalid logic statement Logic statements must have connectors and any required numeric before exiting Logic editing Logic edit 15 Power Not Zero A source maintenance crucible switch was requested when the source power is not zero Maintenance 16 RS232 Test Failed RS 232 loop back test failed General Comm 17 RS232 Test Passed RS 232 loop back test passed General Comm 18 XIU Test Failed XIU test ...

Page 283: ...ectory All 33 No Start Too Many Layers Start key was pressed when the allowed number of layers are already running All 40 All Tags Set Both tags are already set when the tag key was pressed Process 41 No Tags Across Processes An attempt was made to set the two tags in two different processes Process 42 Material Running The material was running when the Paste material or the default material functi...

Page 284: ...d label Logic Edit 56 Select an Action to Edit Attempt to edit a non action assigned label Logic Edit 57 Select an Event to Delete Attempt to delete a non event assigned label Logic Edit 58 Select an Action to Delete Attempt to delete a non action assigned label Logic Edit 59 Max Terms Cannot Insert An attempt was made to enter an equation with more then the allowed event or action terms Logic Edi...

Page 285: ...Comm Invalid Calibration Value Cross Talk Calibration value is out of range Cross Talk Calibration Not Available Xtal Fail in Calibration Crystal failure in Calibration Cross Talk Calibration Not Available from Remote Comm Start Inhibited A Start is issued while Start Inhibit is active All 69 Remote communications are not permitted while in source Maintenance Table 15 5 Transient messages continue...

Page 286: ...l cannot also be set as the backup sensor Material Empty Process Can t select an empty process as process to run General Invalid Mask An attempt was made to enter an incorrect Ethernet net mask General Incorrect Time An attempt was made to enter more then 59 seconds or 99 minutes into a time parameter Material Must use one sensor In multi point mode at least one sensor for each defined material mu...

Page 287: ...ade to enter an output that is already reserved for use The output is already reserved for use in Sensor or Source set up or in one of the logic statements Sensor Source parameter and Logic Edit Invalid Lock Code An incorrect lock code was used to attempt to unlock the IC6 Menu Can t Empty Active Process Can t empty a process if it is set as the active process Process Layer detail Can t Delete Co ...

Page 288: ...ful CAUTION There are no user serviceable components within the IC6 case Potentially lethal voltages are present when the line cord Inputs or Outputs are connected Refer all maintenance to qualified personnel This IC6 contains delicate circuitry which is susceptible to transients Disconnect the line cord whenever making any interface connections Refer all maintenance to qualified personnel ...

Page 289: ...igh power conducting lines makes a sizable reduction in the amount of noise entering the IC6 keep all ground wires short with large surface area to minimize ground impedance c Poor grounds or poor grounding practice c Verify proper earth ground use appropriate ground strap eliminate ground loops by establishing the correct system grounding verify proper IC6 grounding 3 IC6 does not retain paramete...

Page 290: ...nfigure the IC6 if necessary c Improper control cable fabrication c Check for correct cable wiring in the appropriate section of the manual 7 LCD display dull or blank a Brightness contrast adjustment required a Refer to manual for location of adjustment potentiometer adjust as desired b LCD or power supply problem b Contact INFICON service department 8 Poor rate control a Control loop parameters ...

Page 291: ...k electrical continuity or isolation as appropriate d Poor electrical contact in the transducer feedthroughs or in vacuum cable d Use an ohm meter or DVM to check electrical continuity or isolation as appropriate e Failed crystal no crystal e Replace crystal insert crystal f Two crystals placed into the crystal holder f Remove one of the crystals g Frequency of crystal out of range g Verify that t...

Page 292: ...e detailed information in some cases Table 15 8 Troubleshooting Transducers Sensors SYMPTOM CAUSE REMEDY 1 Large jumps of thickness reading during deposition a Mode hopping due to defective crystal a Replace crystal use ModeLock measurement system b Stress causes film to peel from crystal surface b Replace crystal or use high performance RunSaver crystal consult factory c Particulate or spatter fr...

Page 293: ...OTE Crystal life is highly dependent on process conditions of rate power radiated from source location material and residual gas composition 3 Crystal does not oscillate or oscillates intermittently both in vacuum and in air a Intermittent or poor electrical contact contacts oxidized a Use an ohm meter or DVM to check electrical continuity clean contacts b Leaf springs have lost retentivity cerami...

Page 294: ...than 30 C refer to appropriate sensor manual b Excessive heat input to the crystal b If heat is due to radiation from the evaporation source move sensor further away from source and use sputtering crystals for better thermal stability install radiation shield c Crystal not seated properly in holder c Clean or polish the crystal seating surface on the crystal holder d Crystal heating caused by high...

Page 295: ...e of an intermediate adhesion layer d Cyclic change in rate d Make certain source s sweep frequency is not beating with the IC6 s measurement frequency 7 Large drift in thickness greater than 200 Å for a density of 5 00 g cc after termination of sputtering a Crystal heating due to poor thermal contact a Clean or polish the crystal seating surface on the crystal holder b External magnetic field int...

Page 296: ...align as per instructions in XtalSix manual IPN 074 155 e 0 0225 diameter orifice not installed on the supply side of solenoid valve assembly e Install orifice as shown in the XtalSix manual IPN 074 155 Table 15 8 Troubleshooting Transducers Sensors continued SYMPTOM CAUSE REMEDY Table 15 9 Troubleshooting computer communications SYMPTOM CAUSE REMEDY 1 Communications cannot be established between ...

Page 297: ...e given parameter verify parameter s range c C illegal ID c The command sent was for a parameter which doesn t exist verify the correct parameter number d D illegal command format d The command sent is not valid verify command syntax as shown in the IC6 manual placement of spaces within the command string is important e E no data to retrieve e Some parameters may not be in use depending on the val...

Page 298: ...m value does not match the value sent by the host s application program may be caused by noise on the RS232 cable or the checksum is not calculated properly by the applications program h 0 Data overrun h I O port unable to keep up with data transfer rate lower BAUD rate increase speed of host s applications program by using a compiled version of the program stream lining program execution use a fa...

Page 299: ...cs may not adhere strongly to the crystal surface and may cause erratic readings NOTE Thick deposits of some materials such as SiO Si and Ni will normally peel off the crystal when it is exposed to air as a result of changes in film stress caused by gas absorption When you observe peeling replace the crystals 15 8 1 Front Load Follow the procedure below to replace the crystal in the Front Load sen...

Page 300: ... it up away from the drawer as shown in Figure 15 2 2 Hold the drawer by the handle and turn it upside down to remove the spent crystal 3 Install a new crystal in the drawer Observe its orientation The pattern electrode should face upward as shown in Figure 15 3 Front Load Crystal Holder IPN 750 172 G1 Front Load Standard Crystal Sensor Body IPN 750 207 G1 Crystal IPN 008 010 G10 Fully Coated Face...

Page 301: ...ps firmly into the drawer see Figure 15 3 Never push down or pull up on the contact spring doing so may permanently damage it 5 Inspect the whole assembly The retainer should be even and engage the drawer at all four corners Figure 15 2 Cool drawer removing the crystal Figure 15 3 Cool drawer replacing the crystal Contact Spring Orientation Notch Handle Retainer Crystal Drawer ...

Page 302: ...Bakeable sensor the procedure is the same as the Front Load sensor except that you must first unlock the cam assembly by flipping it up Once the crystal has been replaced place a flat edge of the holder flush with the cam mechanism and lock it in place with the cam See Figure 15 4 Figure 15 4 Bakeable crystal sensor Crystal Holder and Retainer Spring IPN 750 218 G1 Crystal IPN 008 010 G10 Fully Co...

Page 303: ...cher see section 15 8 6 on page 15 32 4 Turn the crystal holder over so that the crystal drops out 5 Install a new crystal into the crystal holder with the patterned electrode facing the back and contacting the leaf springs on the ceramic retainer 6 Put the ceramic retainer back into the crystal holder and put the holder into the body assembly of the sensor 7 Align the position of the body assembl...

Page 304: ...re This locks the retainer to the snatcher and allows the retainer to be pulled straight out 2 See Figure 15 6 2 Reinsert the retainer into the holder after the crystal has been replaced 3 Release the crystal snatcher with a slight side to side motion Figure 15 6 Use of the crystal snatcher 15 8 7 CrystalSix XtalSix Refer to the Crystal Six Operating Manual IPN 074 155 for specific instructions fo...

Page 305: ...r Emulator may be attached at various points in the measurement system from the oscillator to the sensor head It provides a known good monitor crystal with known good electrical connections Using the emulator and the controller in a systematic manner provides a fast means of isolating measurement system cable or sensor problems See Figure 15 8 Figure 15 8 Crystal sensor emulator attachment points ...

Page 306: ...message disappears after approximately five seconds the measurement system is working properly Re install the six inch BNC cable to the feedthrough Go to section 15 9 1 2 If the Crystal Fail message remains continue at step 3 3 Disconnect the six inch BNC cable from the Oscillator and from the Emulator 4 Visually inspect the six inch BNC cable to verify that the center pins are seated properly 5 U...

Page 307: ...ive replace the feedthrough re attach the BNC and in vacuum cables and repeat this procedure starting at Step 2 otherwise continue at step 6 6 Verify electrical continuity from center pin to center pin on the in vacuum cable 7 Verify that the center pin of the in vacuum cable is electrically isolated from the in vacuum cable shield If the in vacuum cable is found to be defective replace the in vac...

Page 308: ...15 33 Connect the Crystal Sensor Emulator to the Sensor Head at Point C If the Crystal Fail message disappears after approximately 5 seconds the Sensor Head is operating properly Remove the Crystal Sensor Emulator and re insert the Crystal Cover into the Sensor Head If the Crystal Fail message remains continue at step 3 3 Disconnect the in vacuum cable from the Sensor Head and the feedthrough Remo...

Page 309: ...al Fail Message Remains If the system is operating properly yet the Crystal Fail message is still displayed perform the following tasks 1 On the ceramic retainer verify that the center rivet is secure Repair or replace the ceramic retainer as necessary 2 Inspect the inside of the Crystal Holder for build up of material Clean or replace the Crystal Holder as necessary After verifying the Sensor Hea...

Page 310: ...r heads shown in Table 15 10 15 9 3 2 Incompatible Sensor Heads The Sensor Heads for which the Crystal Sensor Emulator s Sensor Cover Connector will not fit are shown in Table 15 11 NOTE The Crystal Sensor Emulator s Sensor Cover will not fit the crystal holder opening of the older style INFICON transducers that have the soldered finger springs Table 15 10 Compatible sensor heads Sensor Head Part ...

Page 311: ...8 in diameter x 1 79 in 40 13 mm diameter x 45 47 mm Temperature Range 0 to 50oC Frequency 760 601 G1 5 5 MHz 30 ppm at room temperature 760 601 G2 5 5 MHz 1 ppm at room temperature Materials 304 Stainless Steel Nylon Teflon brass Some internal components contain zinc tin and lead ...

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Page 313: ...tomic layer of an adhered foreign material In the late 1950 s it was noted by Sauerbrey1 2 and Lostis3 that the change in frequency DF Fq Fc of a quartz crystal with coated or composite and uncoated frequencies Fc and Fq respectively is related to the change in mass from the added material Mf as follows 1 where Mq is the mass of the uncoated quartz crystal Simple substitutions lead to the equation...

Page 314: ...ckness twist modes The response at about three times the frequency of the fundamental is called the third quasiharmonic There are also a series of anharmonics slightly higher in frequency associated with the quasiharmonic The monitor crystal design depicted in Figure 16 1 is the result of several significant improvements from the square crystals with fully electroded plane parallel faces that were...

Page 315: ...hickness consequently inferred The AT resonator is usually chosen for deposition monitoring because at room temperature it can be made to exhibit a very small frequency change due to temperature changes Since there is presently no way to separate the frequency change caused by added mass which is negative or even the frequency changes caused by temperature gradients across the crystal or film indu...

Page 316: ... oscillation Tq 1 Fq Electronically the period measurement technique uses a second crystal oscillator or reference oscillator not affected by the deposition and usually much higher in frequency than the monitor crystal This reference oscillator is used to generate small precision time intervals which are used to determine the oscillation period of the monitor crystal This is done by using two puls...

Page 317: ...s In many cases the desired properties of these films can be lost if the layer to layer reproducibility exceeds one or two percent Ultimately the practical stability and frequency of the reference oscillator limits the precision of measurement for conventional instrumentation 16 1 3 Z match Technique After learning of fundamental work by Miller and Bolef 5 which rigorously treated the resonating q...

Page 318: ...e for a small change in the crystal s frequency near the series resonance point as shown in Figure 16 5 on page 16 7 Figure 16 4 Active oscillator circuit The active oscillator circuit is designed so the crystal is required to produce a phase shift of 0 degrees which allows it to operate at the series resonance point Long and short term frequency stabilities are a property of crystal oscillators b...

Page 319: ...ese conditions in fact there is no way to tell this has happened except that the film s thickness is suddenly apparently thinner by an amount equivalent to the frequency difference between the fundamental and the anharmonic that is sustaining the oscillation Figure 16 5 Crystal frequency near series resonance point 16 1 5 ModeLock Oscillator INFICON created a new technology that eliminates the act...

Page 320: ... output of the phase comparator changes marking the resonance event For AT crystals we know that the lowest frequency event encountered is the fundamental The events slightly higher in frequency are anharmonics This information is useful not only for initialization but also for the rare case when the instrument loses track of the fundamental Once the frequency spectrum of the crystal is determined...

Page 321: ...y recourse is to assume the Z Ratio to be unity that is ignoring the reality of wave propagation in composite media This false premise introduces error in the thickness and rate predictions The magnitude of this error depends upon the film thickness and the amount of departure of the true Z Ratio from unity In 1989 A Wajid became aware of the ModeLock oscillator7 He speculated there might be a rel...

Page 322: ...here M is the aerial mass density film mass to quartz mass ratio per unit area and Z is the Z Ratio It is a fortunate coincidence that the combination MZ also appears in the Lu Lewis equation 4 which can be used to extract an estimate of the effective Z Ratio from the equations below 6 or 7 Where Fq and Fc denote uncoated and coated crystal frequencies in the fundamental mode mode 100 Due to the m...

Page 323: ...he manipulated parameter power The controller s ability to quickly and accurately measure and then react appropriately to the small changes keeps the process from deviating very far from the set point The controller model most commonly chosen for converting error into action is called PID In the PID P stands for proportional I stands for integral and D stands for derivative action Certain aspects ...

Page 324: ...tant response characteristics are determined as shown in Figure 16 7 In general it is not possible to characterize all processes exactly some approximation must be applied The most common is to assume that the dynamic characteristics of the process can be represented by a first order lag plus a dead time The Laplace transform for this model conversion to the s domain is approximated as 8 Three par...

Page 325: ...tional term Ti integral time Td derivative time E s process error Figure 16 8 represents the controller algorithm and a process with first order lag plus a dead time The process block implicitly includes the dynamics of the measuring devices and the final control elements in our case the evaporator power supply R s represents the rate setpoint The feedback mechanism is the error generated by the d...

Page 326: ... using ISE as a criterion of performance will result in responses with small overshoots but long settling times since small errors occurring late in time contribute little to the integral The Integral of the Absolute Value of the error IAE has been frequently proposed as a criterion of performance 11 This criterion is more sensitive to small errors but less sensitive to large errors than ISE Graha...

Page 327: ...or deposition controllers is the ITAE There will be overshoot but the response time is quick and the settling time is short For all of the above integral performance criteria controller tuning relations have been developed to minimize the associated errors Using manually entered or experimentally determined process response coefficients ideal PID controller coefficients can be readily calculated f...

Page 328: ...or dead time then the control loop will tend to be oscillatory due to the control loop over compensating the control signal before the system has a chance to respond Auto Control Tune detects the characteristics of these fast response systems during measurement of the step response This information is used to calculate the controller gain coefficient for the non PID control algorithm ...

Page 329: ...lished for a certain material A value of 1 000 is defaulted in these situations Table A 1 Material table Code Formula Density Z Ratio Material Name 0 Ag 10 500 0 529 Silver 1 AgBr 6 470 1 180 Silver Bromide 2 AgCl 5 560 1 320 Silver Chloride 3 Al 2 700 1 080 Aluminum 4 Al2O3 3 970 0 336 Aluminum Oxide 5 Al4C3 2 360 1 000 Aluminum Carbide 6 AIF3 3 070 1 000 Aluminum Fluoride 7 AIN 3 260 1 000 Alumi...

Page 330: ...de 31 C 2 250 3 260 Carbon Graphite 32 C 3 520 0 220 Carbon Diamond 33 C8H8 1 100 1 000 Parlyene Union Carbide 34 Ca 1 550 2 620 Calcium 35 CaF2 3 180 0 775 Calcium Fluoride 36 CaO 3 350 1 000 Calcium Oxide 37 CaO SiO2 2 900 1 000 Calcium Silicate 3 38 CaSO4 2 962 0 955 Calcium Sulfate 39 CaTiO3 4 100 1 000 Calcium Titanate 40 CaWO4 6 060 1 000 Calcium Tungstate 41 Cd 8 640 0 682 Cadmium 42 CdF2 6...

Page 331: ... 64 Cu2S 5 800 0 670 Copper I Sulfide Beta 65 CuS 4 600 0 820 Copper II Sulfide 66 Dy 8 550 0 600 Dysprosium 67 DY2O3 7 810 1 000 Dysprosium Oxide 68 Er 9 050 0 740 Erbium 69 Er2O3 8 640 1 000 Erbium Oxide 70 Eu 5 260 1 000 Europium 71 EuF2 6 500 1 000 Europium Fluoride 72 Fe 7 860 0 349 Iron 73 Fe2O3 5 240 1 000 Iron Oxide 74 FeO 5 700 1 000 Iron Oxide 75 FeS 4 840 1 000 Iron Sulphide 76 Ga 5 930...

Page 332: ...1 Indium 98 In2O3 7 180 1 000 Indiurn Sesquioxide 99 In2Se3 5 700 1 000 Indium Selenide 100 In2Te3 5 800 1 000 Indium Telluride 101 InAs 5 700 1 000 Indium Arsenide 102 InP 4 800 1 000 Indium Phosphide 103 InSb 5 760 0 769 Indium Antimonide 104 Ir 22 400 0 129 Iridium 105 K 0 860 10 189 Potassium 106 KBr 2 750 1 893 Potassium Bromide 107 KCI 1 980 2 050 Potassium Chloride 108 KF 2 480 1 000 Potass...

Page 333: ...0 1 000 Molybdenum Trioxdide 131 MoS2 4 800 1 000 Molybdenum Disulfide 132 Na 0 970 4 800 Sodium 133 Na3AIF6 2 900 1 000 Cryolite 134 Na5Al3F14 2 900 1 000 Chiolite 135 NaBr 3 200 1 000 Sodium Bromide 136 NaCl 2 170 1 570 Sodium Chloride 137 NaCIO3 2 164 1 565 Sodium Chlorate 138 NaF 2 558 1 645 Sodium Fluoride 139 NaNO3 2 270 1 194 Sodium Nitrate 140 Nb 8 578 0 492 Niobium Columbium 141 Nb2O3 7 5...

Page 334: ...nnate 163 PbTe 8 160 0 651 Lead Telluride 164 Pd 12 038 0 357 Palladium 165 PdO 8 310 1 000 Palladium Oxide 166 Po 9 400 1 000 Polonium 167 Pr 6 780 1 000 Praseodymium 168 Pr2O3 6 880 1 000 Praseodymium Oxide 169 Pt 21 400 0 245 Platinum 170 PtO2 10 200 1 000 Platinum Oxide 171 Ra 5 000 1 000 Radium 172 Rb 1 530 2 540 Rubidium 173 RbI 3 550 1 000 Rubidiurn Iodide 174 Re 21 040 0 150 Rhenium 175 Rh...

Page 335: ...rontium 197 SrF2 4 277 0 727 Strontium Fluroide 198 SrO 4 990 0 517 Strontium Oxide 199 Ta 16 600 0 262 Tantalum 200 Ta2O5 8 200 0 300 Tantalum V Oxide 201 TaB2 11 150 1 000 Tantalum Boride 202 TaC 13 900 1 000 Tantalum Carbide 203 TaN 16 300 1 000 Tantalum Nitride 204 Tb 8 270 0 660 Terbium 205 Tc 11 500 1 000 Technetium 206 Te 6 250 0 900 Tellurium 207 TeO2 5 990 0 862 Tellurium Oxide 208 Th 11 ...

Page 336: ...toxide 229 VB2 5 100 1 000 Vanadium Boride 230 VC 5 770 1 000 Vanadium Carbide 231 VN 6 130 1 000 Vanadium Nitride 232 VO2 4 340 1 000 Vanadium Dioxide 233 W 19 300 0 163 Tungsten 234 WB2 10 770 1 000 Tungsten Boride 235 WC 15 600 0 151 Tungsten Carbide 236 WO3 7 160 1 000 Tungsten Trioxide 237 WS2 7 500 1 000 Tungsten Disulphide 238 WSi2 9 400 1 000 Tungsten Silicide 239 Y 4 340 0 835 Yttrium 240...

Page 337: ... 6 340 0 770 Zinc Telluride 250 Zr 6 490 0 600 Zirconium 251 ZrB2 6 080 1 000 Zirconium Boride 252 ZrC 6 730 0 264 Zirconium Carbide 253 ZrN 7 090 1 000 Zirconium Nitride 254 ZrO2 5 600 1 000 Zirconium Oxide Table A 1 Material table continued Code Formula Density Z Ratio Material Name ...

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Page 339: ...ement 15 27 resonance frequency 3 37 resonance point 16 8 unknown used 3 39 use history 3 43 Crystal12 3 37 CrystalSix 3 36 CrystalTwo 3 35 Customer Service 1 6 Customer Support Return Material Authorization 1 6 D DAC 2 7 4 7 data entry 3 1 datalog 3 43 dead time 16 11 Declaration Of Contamination 1 6 density 5 3 calibration 12 1 value 12 1 deposition control multiple sensor 11 1 single sensor 11 ...

Page 340: ...eters 6 1 process definition 3 26 Program Lock code 3 42 pulse accumulator 16 4 Q Quality 5 11 quality rate control 16 5 quartz crystal 16 1 16 15 quasiharmonic 16 2 16 9 Quick Tune 12 5 16 15 R rate filter time 5 16 rate deviation 5 11 rate set point 16 13 RateWatcher 3 40 5 19 reference oscillator 16 4 remote communication 10 1 Repair Service 1 6 resonance 16 6 Retry 10 2 RS 232 10 5 RS 232C 2 1...

Page 341: ...1 3 IPN 074 505 P1E IC6 Operating Manual U USB 14 1 W windup 16 15 wire feed 5 15 wired remote 3 40 Z Z match equation 16 5 Z ratio 3 13 5 3 12 1 12 3 16 9 ...

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