Inficon IC6, Operating Manual

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IC6 Operating Manual
Chapter 2
Installation and Interfaces
2.1 Location Guidelines
Before permanently installing the IC6, read this entire chapter on installation and
interfaces and follow its recommendations as closely as possible. INFICON has
taken numerous steps to ensure its equipment will operate in a variety of harsh
situations. Failure to adhere to these simple practices may adversely affect the
performance and longevity of the IC6.
2.1.1 Sensor Types
The choice of sensor type must be dictated by the Process, the deposition material
and the physical characteristics of the process chamber. General guidelines for
each sensor type produced by INFICON are outlined in the Sensor Data Sheets on
the
www.inficon.com website. For specific recommendations, consult your
INFICON representative.
CAUTION
The performance of this IC6 depends on the careful
installation of the chosen transducer. Improper
installation will cause problems with deposition
repeatability, crystal life and rate stability.
2.1.2 Sensor Installation
Figure 2-1 shows a typical installation of an INFICON water cooled crystal sensor
in the vacuum process chamber. Use the illustration and the following guidelines to
install your sensors for optimum performance and convenience.