Inficon IC6, Operating Manual

Page: 242 / 342

11 - 8
IP
N 07
4-
50
5-
P1
E
IC6 Operating Manual
11.4.1 Configure Sensors 1 to 6
(See section 4.1, Sensor Set-Up Introduction, on page 4-1 .)
Assign a unique DAC output under the Recorder Settings Output parameter to
each sensor if the associated layer’s Rate, Thickness or Rate Deviation is to be
monitored.
11.4.2 Configure Sources 1 to 6
(See section 4.2, Source Set-Up Introduction, on page 4-4 .)
Assign a unique DAC output to each source if the associated layer’s rate is to be
controlled by the control loop’s adjustment of the DAC output voltage level or if the
Power output for each source will be monitored by an external device.
If the deposition rate from a particular source will not be controlled directly from that
source’s DAC Power output, assign DAC Output 0 to that source.
11.4.3 Configure six Materials
(See Chapter 5, Material Set-Up .)
1
Assign a unique source (1 to 6) to each of the six materials.
2
Assign a unique Recorder Output (requires DAC Option board, and no DAC
outputs to be assigned to sources) in each material source page.
3
Assign a unique sensor (1 to 6) to each of the six materials. Set the Failure
Action for each sensor to Suspend, TimePw, PostDp or Stop. Stop causes all
active layers to stop, suspend only stops the associated layer.
4
Enter Pre/Post parameters for each material.
5
Enter Deposit parameters for each material.
6
If the source/substrate shutter is to be closed while continuing to control the
source power and the rate and thickness are to be frozen after reaching final
thickness, set On Final Thickness to NonDepCntl.
This setting is required to enable individual layers to be toggled between
Deposit (remote command RL2 #, Start Nw Deposit or RL5 #, Continue Deposit
depending on whether Final Thickness had been reached) and Non-deposit
Control (remote command RL3 #) without affecting other layers.
If the source/substrate shutter is to remain open while continuing to control the
source power and the rate and thickness are to continue to increment after
reaching final thickness, set On Final Thickness to Continue.