Inficon Ecotec E3000, Technical Handbook

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Operation of the Ecotec E3000
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In the opening info page the name of the gas, the currently selected trigger value and
the measurement mode will be displayed.
This info is followed by the value for the lower display limit and the status of the
internal calibration. In addition, the currently selected mass position, the calibration
factor for the chosen gas, the date of the last calibration and type of the last
calibration are listed.
Gases with mass positions between 40 and 105 amu may be calibrated via the built-
in ECO-Check reference leak.
If a gas may be calibrated with the ECO-Check reference leak the line item „Internal
cal“ will show “enabled”. If “disabled” is stated the selected gas is not set up to be
calibrated internally but must be calibrated via an external test leak.
If the chosen gas can not be calibrated with the ECO-Check reference leak (because
its mass position is below 40 amu or above 105 amu) this line will state “impossible”.
For details on how to perform an internal calibration see Section
3.5.2 .
3.6 Shutdown
To shut down the Ecotec E3000, set the ON / OFF main switch ( Connection of the
mains cord Fig. 3-1 /6) to the „0“ position regardless of the operating mode the Ecotec
E3000 is currently running in. Nothing else is required.
It will take some minutes for the turbo molecular pump to arrive at standstill. During
this time the Ecotec E3000 should be moved as little as possible.
The parameters entered are saved by Ecotec E3000. After switching on, the Ecotec
E3000 will revert to the same status it was in when it was switched off before.