14
EMSA
形式で保存
ファイル名を入力
HITACHI HF2000 TEM
Operation Manual
- EDX analysis in zoom mode -
1. Start up
•
Adjust the beam alignment in [ZOOM] mode.
•
Insert the X-ray detector.
•
Insert condenser aperture (2nd aperture) and minimize the swinging beam using the condenser X/Y
adjustment screws when passing through crossover.
•
Remove the any objective aperture and turn off the column pressure gauge filament by pressing the
“FILAMENT” switch.
Notice: not use any objective apertures when the detector is in! The objective aperture will generate
hard x-rays and burn out the detector.
2. The EDS procedure
•
Make sure to turn off the column pressure gauge and insert condenser aperture (2nd aperture).
•
Turn on the power switch of the EDS workstation.
-Screen-
•
Click “Spectral Display” icon.
•
Select “Acquire”
→
“Parameter”
→
“Set up”. Set the max. energy to 20.48 keV.
•
Find region of interest and focus it properly with
brightness knob.
Notice: When the dead time is too high (over 30%),
select smaller condenser aperture, or
acquire spectrum from thinner region.
•
Depress on the quick button.
•
Depress , when the intensity reaches certain intensity.
•
Enter the file name, save the spectrum as “EMSA”.
Enter the file name
Save as EMSA
