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(1) Gas extractor
15
Drain
Exhaust
2-way
solenoid
valve
Air
ZERO NO
SO
2
CO
O
2
CO
2
NO
/N
2
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2
/N
2
CO
2
/N
2
CO
/N
2
O
2
/N
2
Infrared gas
analyzer
main frame (O
2
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ZRE unit
or larger
(10)
Zirconia
O
2
senor
I
10/
I
8
Teflon
tube
(ZFK7)
(2) Mist filter
(3) Safety
drain
trap
(4) Gas aspirator
Electronic
gas cooler
(5)
(8) Flowmeter
(7) Membrane
filter
(11) NO
2
/NO
converter
(6)
Solenoid
valve
Pressure
reducing valve
(9) Standard gas
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measured gas.
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pressure.
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sensor
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sensor used for measuring
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cooler
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