Section 5: Troubleshooting
5.4 Troubleshooting Procedures
0101-8242-0, Rev. C
5-25
CV-6SLX User Manual
DANGER: HIGH VOLTAGE
Before performing the following procedure, perform the procedure described in
section 5.4.1.
Table 5-15 HVPS SETPOINT OVERVOLTAGE LED lights red
Condition indicated: HV output voltage is above 10.5 kV when setpoint is 10 kV
Symptoms
•
TCS displays
PSU1_FAIL_ALM
(= Power Supply Control Is On failure alarm)
•
HVPS Front Panel:
SETPOINT OVERVOLTAGE
and
POWER SUPPLY FAULT
LEDs are lit
•
EBC:
Fault
LED lit in High Voltage section of Diagnostics screen
For additional information about this fault mode, see Ishikawa Diagram #10 in Appendix A.
Possible Cause
Procedure
1.
Fault condition(s) whose investigation
requires removal of HVPS top cover
1. Contact Temescal Field Service.
Table 5-16 HVPS OUTPUT ARCING LED lights red
Condition indicated: Latched PS fault due to either an arc duration > 120 ms or arc rate > 200 Hz
Symptoms
•
TCS issues
PSU1_FAIL_ALM
(= Power Supply Control Is On failure alarm)
•
HVPS Front Panel:
OUTPUT ARCING
and
POWER SUPPLY FAULT
LEDs are lit
•
EBC:
Fault
LED lit in High Voltage section of Diagnostics screen
For additional information about this fault mode, see Ishikawa Diagram #11.
Possible Cause
Procedure
1. Faulty or loose connections.
1. Make sure that all HV and FPS connections are correctly and securely made.
2. Emitter damaged
2. Follow instructions in gun manual to troubleshoot emitter issues.
3. System improperly grounded
for HV.
3. Make sure that grounding instructions in e-gun manual have been correctly
implemented.
4. Chamber Pressure too high
4. Chamber pressure should be less than 1 x 10
-5
mTorr.
5. HV feedthrough shorted
5. Check copper bus bars and HV feedthroughs for shorts, coatings, cracks or arc
marks.
6.
Fault condition(s) whose
investigation requires checking
HV output at FPS.
6. Contact Temescal Field Service.
