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Energetiq LDLS EQ-1500, Operation Manual

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Energetiq LDLS EQ-1500 Operation Manual Download Page 13

 

EQ-1500 Operation Manual Rev 6 

7

The interlock circuit must be connected to enable the operation of the unit.  Should the 

interlock connection open during operation or standby, the source is immediately disabled, and 
all light output from the aperture ceases.  The source is then latched off and will not restart 

until the interlock is restored and the lamp manually restarted. 

Summary of Contents for LDLS EQ-1500

Page 1: ...Model EQ 1500 LDLS Laser Driven Light Source Operation Manual Revision 6 March 2013 Part Number DOC 4958...

Page 2: ...d specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq The content of this manual is subject t...

Page 3: ...C61000 3 3 1995 Fluctuations and Flicker A1 2001 A2 2005 IEC61000 4 2 2001 Electrostatic Discharge Immunity IEC61000 4 3 2002 Radiated Electromagnetic Field Immunity IEC61000 4 4 2004 Electrical Fast...

Page 4: ...iv...

Page 5: ...cations 9 Identification of Controls 11 Controller Unit 11 Lamp House Unit 15 Chapter 3 19 Installation 19 Unpacking 19 Facilities Connections 19 Installation procedure 23 Chapter 4 27 Operation 27 Re...

Page 6: ...vi...

Page 7: ...of operating source should wear protective eyewear clothing and gloves Lighted UV warning lights and signs posted on doors to lab areas may help prevent accidental exposure This unit emits ultraviolet...

Page 8: ...minimum of 10 minutes prior to operation in order to ensure that no ozone is created by residual oxygen inside the unit It is recommended that any beam transport be purged for a similar amount of time...

Page 9: ...the lamp If there is a failure of the lamp the unit must be shipped back to the factory for refurbishment Do not open the chassis of either the lamp unit or the power supply unit Dangerous invisible i...

Page 10: ...iameter 25 mm at aperture Divergence 100 mRad Transverse Beam Mode Highly irregular diffuse Table 1 Embedded Laser Parameters No regular service or maintenance is required Any service to the system mu...

Page 11: ...Explanatory label states the classification of the laser product Class 1 is the lowest hazard level classification Certification label states that the equipment has been tested and verified to meet t...

Page 12: ...tection of factory service personnel External Interlock An external interlock connector is provided for the customer s use Any suitable normally open contact can operate the interlock circuit The unit...

Page 13: ...e operation of the unit Should the interlock connection open during operation or standby the source is immediately disabled and all light output from the aperture ceases The source is then latched off...

Page 14: ...EQ 1500 Operation Manual Rev 6 8...

Page 15: ...The EQ 1500 system consists of a Controller unit Lamp House unit interconnecting signal power cable and interconnecting laser fiber optic cable Connections to AC power cooling water and purge gas are...

Page 16: ...House 5 kg 11 lbs Controller 6 5 kg 14 3 lbs Utility Requirements Electrical 100 120 200 240 VAC 10 50 60Hz 300VA max Fuse 250VAC 8A Fast Cooling Water 0 03 0 07 MPa 5 10 psi differential 1 9 3 8 lpm...

Page 17: ...on occasional temporary condensation possible Installation Category II Indoor use only Transport Temperature 5 95 C Relative Humidity non condensing 95 max Identification of Controls The following sec...

Page 18: ...p On Green Plasma has ignited and is operating Lamp House Overtemp Red Bulb housing temperature has exceeded 90C cooling failure Lamp Controller Overtemp Red Safety interlock for cold plate temperatur...

Page 19: ...n Laser Connection to Lamp House Connects to the Lamp House to supply laser energy to the lamp via the fiber cable J4 Remote Sensor Connector Connection point for a user supplied photosensor when usin...

Page 20: ...n emergency off switch Power Entry Connector The power input connection to the EQ 1500 is made via a standard IEC 3 pin power entry module A power cable is included with the system but any standard ca...

Page 21: ...ssion quartz window Do not attempt to remove or otherwise disturb this window Doing so voids your warranty and may result in unsafe operating conditions Mounting Holes The Lamp House may be free stand...

Page 22: ...t fitting for nitrogen purge gas which is required to keep the optics clean and to purge oxygen from the Lamp House to prevent the formation of ozone by UV radiation There is no return fitting for the...

Page 23: ...ttings for the Lamp House cooling water Laser Fiber Entry Entry point and strain relief for the laser fiber optic cable The cable is connected inside the Lamp House enclosure using a proprietary SMA t...

Page 24: ...EQ 1500 Operation Manual Rev 6 18...

Page 25: ...lready connected between the Controller and Lamp House Use care during installation and operation to avoid creating sharp bends or kinks in the cable Minimum bend radius for the cable is 60 mm 2 4 in...

Page 26: ...erns please contact the manufacturer for recommendations or guidance The Lamp House water connection fittings are push to connect fittings sized for 3 8 O D tubing The Controller water connection fitt...

Page 27: ...The suggested hose to mate to this fitting is either Nylon Shore D 50 70 Polyethylene Shore D 50 196 or Teflon 1 4 O D tubing There is no return fitting for the purge nitrogen The purge flow normally...

Page 28: ...EQ 1500 Operation Manual Rev 6 22 Plasma Location Figure 8 Optical interface...

Page 29: ...an appropriate beam pipe tube or enclosed space and purged with nitrogen Operating the source without any output target or beam transport is not recommended and may lead to unsafe operating condition...

Page 30: ...ng the lamp house cover Carefully lift the cover straight up 8 2 CAUTION The shielded fiber located on the back of the controller has a minimum bend radius of 30mm Use care not to bend the fiber too t...

Page 31: ...he inside surface of the panel 8 4b Rotate the strain relief around the corner while keeping the locking fingers on the inside 8 4c Move the strain relief all the way to the left You should not be abl...

Page 32: ...he Controller to the power source 10 Purge the EQ 1500 unit for at least 10 minutes prior to operation Failure to purge the system properly may damage the optics and may produce ozone gas 11 Verify th...

Page 33: ...OK 4 Push the Operation Selector Switch momentarily up to the LAMP ON position The EQ 1500 enters the start mode While in the start mode the LASER ON indicators will light both on the Controller and t...

Page 34: ...should be shut off when the lamp is not operating to avoid condensation on internal and external cooling lines When shutting down for long periods the main power switch may be shut off Remote Mode The...

Page 35: ...er Status Signals from Lamp Controller Description Pin Lamp Controller Thermal Interlock OK 25 Lamp House Cover Interlock OK 3 Lamp House Thermal Interlock OK 24 External Interlock OK 4 Lamp Enable Ac...

Page 36: ...EQ 1500 Operation Manual Rev 6 30...

Page 37: ...ver possible If the SMA fiber must be disconnected always use a cap on both ends Store caps open side down when possible Blow out caps with CDA Clean Dry Air prior to use Never leave the fiber disconn...

Page 38: ...e Wipe and Isopropyl Alcohol Yes No Yes No Yes No Start Inspect Fiber end Is fiber end contaminated Install Laser SMA Connector Clean Fiber end with Clean Dry Air Inspect Fiber end Is fiber end contam...

Page 39: ...EQ 1500 Operation Manual Rev 6 33 Figure 11 Westover FVD 2400 Benchtop USB PC Operated Fiber Viewer Examples of Fiber Images Figure 12 Fiber End Images...

Page 40: ...EXTERNAL INTLK OK indicator not lit Check external interlock circuit or jumper plug CONTROLLER INTLK OK indicator not lit Internal cover switch in the Lamp Controller is open Install Cover LAMP HOUSE...

Page 41: ...that Controller cooling water flow and temperature are within spec Contact Energetiq if condition persists Laser Fault Prior to Ignition No Other Faults Clear Fault Operation Selector Switch to Reset...

Page 42: ...EQ 1500 Operation Manual Rev 6 36...

Page 43: ......

Page 44: ...specifications contained in this manual are the property of Energetiq and shall not be reproduced in whole or in part without the written consent of Energetiq The content of this manual is subject to...

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