STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 55
OPER
A
T
ION
4
OPERATION
4.1
Gas pumping, cooling and baking the STP pump
Installation, operation and maintenance must only be executed by personnel who read through this
Manual carefully and have the specific skills to perform installation, operation and maintenance of the
STP pump.
4.1.1
Gas pumping
WARNING
To prevent an accident, confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier, and, keep MSDS
and a safety advice of gas supplier.
WARNING
When using pyrophoric gas, keep MSDS and a safety advice of gas supplier.
WARNING
When pumping gases, they may remain in the STP pump. Introduce a purge gas and
then exhaust all gases. Residual gases can cause an accident if/when the pump is
removed. Take measures according to MSDS to prevent an accident when using toxic,
reactive or combustible gases.
CAUTION
Chlorine or fluorine system gases can be used in corrosion resistant pumps. When you use the
following gases, contact Edwards:
• Gases including alkaline metals except Li gas.
• Gases including Ga, Hg, In, or Sn.
• HBr gas.
Non-corrosion resistant pump cannot use the above gases including chlorine and fluorine system
gases.
CAUTION
Cool the STP pump to prevent the STP pump from overheating when pumping gases.
Install cables so that personnel are not exposed to risk of tripping or falling.
