STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 151
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7.6
Troubleshooting
7.6.1
Indication of "FAILURE" LED (red)
The flashing pattern of the "FAILURE" LED (red) differs depending on the type of abnormality/error.
When two or more failures are detected simultaneously, a high-priority failure is indicated. Also, the
failure signal is output from the "X2 REMOTE" connector. If an abnormality/error is found, take
measures in accordance with Table 50 to Table 55.
No
Failure
"FAILURE" LED
indication
Priority
1
Power Failure
Overspeed, and other
Steady red
High
2
MOTOR Overheat
CNT Overheat
3 flashes in red
3
DRV Overload
2 flashes in red
4
Disturbance
1 flash in red
Low
Table 49 - Priority of failure signal
1 cycle
Disturbance
（
1 flash in red
）
OFF
↓
Failure detection
"FAILURE" LED indication
X2 REMOTE output
ON
DRV Overload
（
2 flashes in red
）
MOTOR Overheat
CNT Overheat
（
3 flashes in red
）
Corresponding to
failure type
OFF
OFF
ON
ON
ON
OFF
放
FAILURE N.O OUT
(14)
–(33)
OFF
ON
Power Failure
Overspeed
（
steady in red
）
ON
OFF
FAILURE N.C OUT
(15)
–(33)
Figure 58 - Failure output
Note:
The STP-Link (optional accessory) and the display unit (optional accessory) display an error
as a message. Also, the errors being detected can be read via serial communication.
