STP-iXA3306 Series Turbomolecular Pump
MT-82E-001-H
Page 152
SA
F
ET
Y
F
U
N
C
T
IO
N
S
Ref
er
red
S
ec
tion
3.4.4
3.9
3.4.1
2.1
2.1
4.4.2
2.1
T
ab
le
50
-
E
rr
or L
is
t
Co
u
n
ter
mea
sure
s
1.
Remo
v
e
ex
terna
l v
ibrati
on
s
o a
s
no
t
to
tr
a
ns
mi
t i
t
to
the
S
T
P
pu
m
p.
2.
Chec
k
th
e v
ac
u
um
pi
pi
n
g.
3.
Ins
tal
l th
e S
T
P
p
um
p i
n a
way
th
at
no
forei
gn
ma
ter
ial
s
f
al
l i
nto
the
S
T
P
pu
mp
.
4.
P
erfor
m
r
ou
g
hi
ng
v
ac
uu
m
throug
h b
y
p
as
s
r
oo
t.
Cont
ac
t
S
erv
ic
e
off
ic
e.
1.
Us
e t
he
ma
x
imu
m wo
rk
in
g
pres
s
ure or l
es
s
.
2.
Us
e
the
al
low
ab
le b
ac
k
ing
pres
s
ure or l
es
s
.
3.
Chec
k
th
e v
ac
u
um
pi
pi
n
g
s
y
s
tem
fo
r l
e
ak
ag
e
.
4.
Chec
k
th
e
ba
c
k
in
g
-pu
mp
for i
ts
c
ap
ac
ity
an
d
S
T
A
RT
s
tat
e
.
(us
e a
ba
c
k
ing
-pu
mp
wi
th
the
r
ec
o
mm
e
nd
e
d c
ap
ac
ity
or more)
P
ro
b
abl
e c
au
se
s
E
x
c
es
s
iv
e v
ibrat
ion
ap
pl
ied
ex
ternal
ly
to
the
S
T
P
pu
mp
:
1.
E
x
terna
l v
ibr
ati
on
/i
mp
ac
t.
2.
A
tm
os
ph
er
ic
ai
r f
lows
i
nto
the
S
T
P
pu
m
p
.
3.
F
orei
g
n m
ate
ri
al
s
fa
ll i
nto
the
S
T
P
pu
m
p
.
4.
S
ud
de
n
pres
s
ure c
ha
ng
e
at
s
tart of
r
ou
g
hi
ng
v
ac
uu
m b
y
b
ac
k
ing
-p
um
p
.
A
bn
orma
l m
ag
n
eti
c
b
ea
ri
ng
:
1.
Cont
ro
l c
ir
c
ui
t err
or
.
2.
D
is
c
on
ne
c
ti
on
of
t
he
inte
rn
al
wi
ri
ng
.
1.
Hi
gh
pres
s
ure at
th
e
i
n
le
t
po
rt
.
2.
Hi
gh
pres
s
ure at
th
e
ou
tl
et
po
rt
.
3.
Le
ak
ag
e o
f th
e
pi
pi
ng
s
y
s
tem
.
4.
F
ai
lure of
th
e
ba
c
k
ing
-p
um
p
.
O
cc
u
rr
ence
con
d
it
ion
E
x
c
es
s
iv
e
imb
al
an
c
e
A
c
c
el
erat
io
n
s
tat
e
c
on
ti
n
ue
s
fo
r
ap
prox
.
30
mi
n
ute
s
P
u
mp
op
er
atio
n
D
ec
el
er
at
e
an
d
s
top
D
ec
el
er
at
e
an
d
s
top
(E
rr
o
r
me
ss
age
)
Di
s
turba
nc
e X
_H
Di
s
turba
nc
e Y
_H
Di
s
turba
nc
e X
_B
Di
s
turba
nc
e Y
_B
Di
s
turba
nc
e Z
DRV
O
v
erl
oa
d
"
F
AIL
UR
E
"
L
E
D
1 f
las
h
in red
2 f
las
he
s
in red
