A533-23-880 Issue C
Page 26
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Technical Data
2.7
Gas system
The nitrogen supply should be provided with an isolator.
Note:
Once you have connected your nitrogen supply and adjusted the nitrogen supply pressure, for optimum
performance of the pressure regulator, we recommend that the stability of your nitrogen supply is such
that the supply pressure remains within ± 20 psi of the adjusted pressure.
Nitrogen supply pressure range
20 to 100 psig (2.4 to 7.9 bar absolute,
2.4 x 10
5
to 7.9 x 10
5
Pa)
Flow rates (with nitrogen supply capacity of 100 slm)
refer to Table 6
Pressure transducer accuracy
± 0.6 psi (± 4.1 x 10
-2
bar, ± 4.1 x 10
3
Pa)
at 6 psig (1.4 bar absolute, 1.4 x 10
5
Pa)
Flow transducer accuracy
± 3.0 slm (± 5 x 10
3
Pa l s
-1
)
Table 6 - Nitrogen Purge flow rates: High gas configuration
Purge Flows
Flow Rates
slm
Pa l s
-1
Typical nitrogen flow rates.
(High gas configuration: Factory
Set)
Cooling purge
28
4.72 x 10
4
Dilution purge
22
3.71 x 10
4
Shaft seals purge
2
3.37 x 10
3
Exhaust purge
4
6.75 x 10
3
Inlet purge
20
3.37 x 10
4
Maximum flow without inlet purge
56
9.45 x 10
4
Maximum flow with inlet purge
54
9.11 x 10
4
Maximum nitrogen flow rates.
Cooling purge
30.5
5.15 x 10
4
Dilution purge
*
*
With inlet purge off. When inlet purge is on, these flow rates will be lower
24.5
4.13 x 10
4
Shaft seals purge
3
5.06 x 10
3
Exhaust purge
5
8.44 x 10
3
Inlet purge
22
3.71 x 10
4
Maximum flow without inlet purge
63
1.06 x 10
5
Maximum flow with inlet purge
60.5
1.02 x 10
5
