© Edwards Limited 2013. All rights reserved.
Page 1
Edwards and the Edwards logo are trademarks of Edwards Limited.
Introduction
B777-50-880 Issue D
1
Introduction
1.1
Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards EXT556H compound turbo-
molecular pumps. The pump must be used as specified in this manual. The EXT556H pump is designed for use with
an Edwards EXC or EXDC controller. Read this manual and the manual supplied with the controller before installing
and operating the equipment. The controller manual contains details of electrical installation.
Important safety information is highlighted as WARNING and CAUTION instructions; these instructions must be
obeyed. The use of WARNINGS and CAUTIONS is defined below.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment or process.
In accordance with the recommendations of EN61010, the following warning symbols may appear on the pump or its
accessories:
The units used throughout this manual conform to the SI system of units of measurement. Also, throughout this
manual, wherever flow rates are specified, the abbreviation 'sccm' is used to mean standard cm
3
min
-1
: this is a flow
of 1 cm
3
min
-1
at an ambient temperature of 0 °C and a pressure of 1013 mbar (1.013 x 10
5
Pa).
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
Warning – refer to accompanying documentation.
Warning – risk of electric shock.
Warning – hot surfaces.
Warning – large attractive forces will be experienced when the pump is subjected to magnetic fields.
Protective conductor terminal.