Document No.
ME_CT_ETC76_(CN)_R0
Instructions Manual
Controller
ETC76
Be sure to read and understand all warnings in this manual before
using the product.
Keep this manual readily available for reference.
EBARA Corporation
Page 1: ...o ME_CT_ETC76_ CN _R0 Instructions Manual Controller ETC76 Be sure to read and understand all warnings in this manual before using the product Keep this manual readily available for reference EBARA Co...
Page 2: ...the product specifications without notice so as to maintain and improve the quality of the product For this reason the contents of this manual may not match exactly with the actual product Symbols and...
Page 3: ...ide panel of the controller at shipping from our company Controller model Pump model ETC76 EBT70F 20 When requesting our company for repair or making other inquiries on the product please do not forge...
Page 4: ...sive gas Do not use the controller in an area exposed to dust flammable gas or corrosive gas Caution Magnetic field and electric field Do not use the controller in a strong magnetic field or electric...
Page 5: ...llers and their accessories as described in the included Standard Warranty Certificate Note however that handling the pump in manners not described in this manual will void all warranty Use of the pum...
Page 6: ...pump parts 3 3 Warning label and name plate 3 4 Mounting 4 Cable connection 11 4 1 Power input connector connection 4 2 Motor cable connection 4 3 Fan cable connection 4 4 Remote connector connection...
Page 7: ...EMC directive Emission EN61000 6 4 2001 EN55011 1998 A1 1999 A2 2002 Group1 Class A Immunity EN61000 6 2 2005 EN61000 4 2 1995 A1 1998 A2 2001 EN61000 4 3 2002 A1 2002 EN61000 4 4 2004 EN61000 4 5 199...
Page 8: ...controller or when mounting dismounting the controller to from the equipment handle the controller with care Caution Avoid applying a shock onto the controller 3 Installation 3 1 Dimensions The exter...
Page 9: ...lay LEDs Indicates the operation status of the pump MOTOR connector Connect the motor cable to this connector FAN connector Connect the fan cable to this connector REMOTE connector Connect the remote...
Page 10: ...UAL CAREFULLY PRIOR TO OPERATION Failure to follow instruction may result in serious accidents causing death serious injury and or property damage Warning label HAZARDOUS VOLTAGE INSIDE Can shock born...
Page 11: ...injury and or controller damage Caution When installing the controller secure the specified amount of open space around its top sides and back Otherwise the ventilation may become inadequate increasin...
Page 12: ...JC 207 PM UL CSA Cable length 1 15m Exclusive cable SOURIAU UTOW6128SNH ADJ S M12SR438J 5 Cable length 16 20m Bendix PT06A 12 8S SR Fan Cable AMP 1 178288 3 AMP 172233 1 Exclusive cable only to forced...
Page 13: ...10 000A or greater Failure to implement a power breaker and or an overcurrent protection device may result in serious accidents causing death serious injury and or property damage The connection to a...
Page 14: ...tor connection Connect the remote connector accessory to the remote connector on the back panel of the controller Refer to Remote I O Signals and connect the provided remote connector correctly These...
Page 15: ...n Maximum capacity of output signal Acc Normal Failure is DC24V 0 1A 5 Operation 5 1 Pre operation notes Check the following before operating the controller Combination of the pump and the controller...
Page 16: ...the front panel of the controller Status LED Display Description Decelerating Stop POWER ACCELERATION NORMAL FAILURE The NORMAL LED turns off and pump begins shutting down by free running without brak...
Page 17: ...essure 1200Pa or lower 2 Check if the system has any leakage 3 Stop the gas flow during starting up Motor step out Unable to control the motor because of too much load 1 Foreign matter is in the pump...
Page 18: ...ture or input power voltage return to a normal value For remote operation note that the pump begins to start up as soon as automatically reset if the Start Stop signal is closed Table 7 Failure which...
Page 19: ...nput cable in an emergency After power supply interruption pump begins shutting down by free running The pump will come to a complete stop in about 25 minutes 8 Scrapping Scrap the controller as an in...
Page 20: ...e temperature 0 45 C 32 113 F Allowable humidity 5 85 Input Voltage AC100 230 V Phase Single Frequency 50 60 Hz Max power 160 VA Rated power 60 VA Over voltage category Output Phase 3 Rated current 2...
Page 21: ...orea Phone 82 2 581 6901 Fax 82 2 581 4211 Taiwan EBARA Precision Machinery Taiwan Inc Room 1406A Chia Hsin Bldg No 96 Sec 2 Chung Shan N RD Taipei Taiwan Phone 886 2 2560 1166 Fax 886 2 2560 1177 Sin...