Dressler CESAR 1312, User Manual

Page: 143 / 194

CESAR 1312 (E) Installation, Setup, and Operation 5-23
CESAR™ 1312 Generator
8. Press Ok to confirm.
9. Press the Exit soft key.
10. Press the Execute soft key.
The capacitors will move to the programmed positions, and the associated
position values will begin to flash on the display, indicating that the capacitors
are moving.
See also “Determining Automatic Tuning Presets” on page 5-23 and
“Controlling a Variomatch Unit Attached to the Generator” on page 5-43 .
Determining Automatic Tuning Presets
The automatic tuning preset values establish the initial positions for both the
tune (
C Tune ) and load ( C Load ) capacitors before RF power turns on. This
feature is useful for different process recipes. You can change the preset
values to meet your specific process needs. Appropriate preset values vary
widely from application to application, depending on operating variables such
as the type of application gas, the amount of pressure in the chamber, and the
configuration of the chamber.
To Determine Appropriate Preset Positions:
1. In an experimental chamber, turn on RF power at the expected power
level.
2. Allow the CESAR generator to tune in manual tune control.
4
If the plasma ignites, use the Matching controls on the front panel to
adjust the tuning parameters only slightly and find the optimum
positions.
4
If the plasma fails to ignite, experiment to find a position where the
plasma will ignite; then make small adjustments from that point to find
the optimum positions.