HPG 13150 400 V (A)
Product Overview and Theory
2-1
Chapter
HPG™ 13150 400 V RF Power Generator
Chapter
2
Prerelease version
Product Overview and Theory
DESCRIPTION
HPG™ 13150 400 V RF Power Generators are a new generation of compact,
high power generators for semiconductor production, the flat panel industry,
and various industrial plasma applications. Typical applications include
sputtering, reactive ion etching, PECVD, surface treatment, and CO
2
laser
systems.
This 13.56 MHz power generator incorporates a unique combination of solid-
state MOSFET driver technology and a modern tube amplifier that employes
reliable ceramic grid power tubes. The advantages of this efficient Class B
amplifier concept include:
•
Reduced cost-of-ownership as compared to purely solid-state systems
•
Reduced downtime due to modern tube technology that provides
extended lifetime and easy-access cavity design for quick tube exchange.
•
Robust ability to handle excessive mismatch on the load due to the highly
resilient tube characteristics.
Designed to regulate power into a broad range of output impedances, the
HPG generator can operate in forward, load, or external power regulation
mode (see
“Setting Regulation Mode” on page 5-11
You can control the HPG generator remotely through an analog
User Port
“HPG Generator User Port” on page 4-4
) or a serial
Host
port (see
Generator Host Port Options” on page 4-21
). The front panel features a
liquid
crystal display (LCD)
with an easy-to-use menu that includes widely
programmable pulse functions, a target lifetime counter, and submenus to
customize your own recipes, reflected power settings, and Variomatch
settings (when the generator is connected to a Variomatch unit). In addition,
you may control RF power using the front panel controls. For operation
instructions, see
“First-Time Operation” on page 5-8
and
.
The HPG generator operates from a 400 VAC (factory setting), 440 VAC, or
480 VAC, 50/60 Hz power source.
Summary of Contents for 13150 400 V
Page 2: ......
Page 3: ...User Manual Prerelease version HPG Generator Model 13150 400 V HPG 13150 400 V A ...
Page 6: ...iv HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version ...
Page 12: ...x List of Figures HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version ...
Page 14: ...xii List of Tables HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version ...
Page 104: ...4 66 Communication Interfaces HPG 13150 400 V A Dressler HF Technik GmbH Prerelease version ...
