QUICK START GUIDE
Auto Leveling System™ - (ALS/ALS2/ALS2V)
Caution:
CyberOptics Corporation has made every effort to clean the Auto Leveling System(ALS,
ALS2, ALS2V) and Charging Case. Removing it from its protective bag outside of a clean room will
expose it to the surrounding air. If you plan to use the leveling sensor in an ultra clean environment,
you may have to clean the wafer after removing it from its clean case.
Suitcase Contents
Leveling Unit
The WaferSense® ALS/ALS2/ALS2V unit is designed with a wafer-like form factor, so it can fit in most
wafer-handling equipment. The unit is also vacuum compatible, so you can use it in vacuum process
chambers.
Charging Case
The Charging Case provides a convenient place to store and protect the unit when not in use.
ALS Link & USB cable
The link is a Bluetooth® wireless transmitter/receiver that attaches to a laptop or personal computer with
a USB cable and communicates with the ALS unit.
Battery Charger
The battery charger is used for recharging the ALS Li-Ion battery. Only use the supplied power supply to
charge the ALS.
ALS2 unit
Charging Case
ALS Link and USB Cable
Battery Charger
