IONIZER USER MANUAL
5
2
Ionization and Application
A. Ionization Theory
B . Cleanroom Contamination Application
C. ESD Control Application
Ionization solution has been used many years in electronic industry.
Electrical ionization technology is most common design for many
applications. Some ionizers designed for ESD application and some of
them are contamination control in high technology manufacturing
environment. Both are different purpose and may not work in both
applications. Follows are the brief summary of differernces and user
guide for each applications.
Electric field is one of strong force to attract particles on wafer, glass panel,
printed circuit board and other insulator materials. To minimize this force,
room ionization is the best solution in high technology and other cleanroom
environment.
Pulsed DC ionization technology is the well known solution over many years
to minimized air borne particle attraction in cleanroom environment. Using
with laminar flow, generated ions can move long distance and wide coverage
areas. This will significantly reduce the force between particles and sensitive
devices such as wafer, flat panel display and medical items. In results, room
ionization improves product yields and less losses.
Voltage (or Potential) difference is the reason why ESD event occurs and lead
to device damage. Ionizer makes this voltage difference to the same or
minimize the level between objects to avoid ESD damage or make it happen
at the safe level.
Steady-State DC ionizer is provide high ion current to objects and maintain
low peak (or offset) voltage on it. This makes minimize ESD risk in production
and suitable for CDM ESD control in control program.
