Colnatec EON-ID User Manual Download

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user guide

eon-ID

controller w/ integrated touchscreen

for vers. 3.1.0.63 software

Summary of Contents for EON-ID

Page 1: ...user guide eon ID controller w integrated touchscreen TM for vers 3 1 0 63 software...

Page 2: ...pter 3 Program Control Program Control Screen Process List Process Layers New Edit Layer Screen Layer Properties Layer Properties Defined Chapter 4 Settings Settings Screen Notify Settings Log Screen...

Page 3: ...ing Relays Exiting Eon ID Software Chapter 7 Resuming Processes Resuming Processes Screen Resume Aborted Chapter 8 Status Status Screen Health Layer Material Frequency Rate and Thickness Zero Sensor P...

Page 4: ...Protection Screen Lock Button Locking a Screen Setting a New Password Forgotten Password Resetting the Password Chapter 12 Troubleshooting Chapter 13 Specifications Coating Communications Measurement...

Page 5: ...Method 1 Distance Angle Method Appendix D Tooling Factor Method 2 Thickness Substrate Method Appendix E Mass to Frequency Correlation Formula Mass to Frequency Correlation Formula Sauerbrey equation m...

Page 6: ...Miscellaneous 6 Appendices Miscellaneous Appendices Miscellaneous 120 120 121 121 Appendix K DB9 I O Pin Diagram DB9 I O Pin Diagram Appendix L Source Power Supply Signal Source Power Supply Signal Il...

Page 7: ...nputs Connects to sensor head via external oscillator I O For relay and Source Power Supply Signal output Main Power Switch Turns Eon ID on and off Air Intake Duct Type K Thermocouple Inputs Measures...

Page 8: ...tputs See proper setup procedures in this manual and in the Eon ID quick reference guide Warning Only the provided power supply should be used with Eon ID Not doing so will damage product and void war...

Page 9: ...Eon ID at a Glance Accessories Eon ID ships with the following accessories Power Supply and cable Input 100 200 VAC 50 60Hz 2 A Output 24V 3 75 A 90W Max External Oscillator Amplifies crystal drive si...

Page 10: ...g temperature control technology If using an alternative QCM skip the step highlighted in red See Appendix A for connection map of a fully assembled Eon ID system 2 Connect 10 BNC Coaxial Cable to Eon...

Page 11: ...extension cable Plug the male end of thermocouple extension cable into thermocouple connector on back panel of the Eon ID 5 Connect Power to Eon ID Plug Eon ID power adapter into AC outlet Then plug...

Page 12: ...required virtual alpha and numeric keyboards can be accessed To use the virtual keyboards touch and hold text input field until the text entry window appears Type in text as usual To use special chara...

Page 13: ...remove layers and layer properties Process List Create a new process and copy edit or delete an existing process The list contains all of the available processes To enter text touch and hold the text...

Page 14: ...s On the Process Screen select an existing process in the Process List and press Edit Deleting a Process Pressing DELETE will permanently delete a process To enter text touch and hold the text field u...

Page 15: ...rs List Editing a Layer Select a layer on the Layers List then press EDIT Use the Layer Edit Screen to edit the properties of a layer See New Edit Layer Screen on page 16 Removing a Layer Select a lay...

Page 16: ...ORED LAYER to use a previously saved layer The properties of the stored layers are predefined but rate and thickness will still need to be entered Select the previously saved layer and press OK to use...

Page 17: ...the layers list press and hold a layer this can be done at any time even during a process run The Layer Properties screen will open Note Layers can be repositioned while a process is running Any repo...

Page 18: ...n your process is unlisted then press ADD to add a custom material Selecting a Source Selecting a Sensor On the layer Properties Screen the Sensor selection keys determine which of the two sensor inpu...

Page 19: ...ontrol Adding a Material On the Materials List Screen press ADD to add a new material The Add a Material Screen will open Give the new material a name and adjust the Density and Z Factor according to...

Page 20: ...ing a maximum power of 50 would apply a source control signal output of 2 5v to the source power supply Proportional The proportional coefficient that controls the material deposition rate during the...

Page 21: ...set Predeposit Power before moving into dwell Predeposit Power The power percentage that the source will achieve during the Predeposit process Dwell Time The time specified that follows the completion...

Page 22: ...e continuing to the next layer Rate Abort Deviation Initiates the abort process automatically if the rate deviates from the set point at the percentage specified Abort Delay Specifies the amount of ti...

Page 23: ...enu to select the settings of various software operations Screen Selection Tool Bar Vertical Tool bar Settings Screen Menu Process Runtime Alerts These alerts notify the user about possible issues the...

Page 24: ...ividualized log folders can be created log files are typically saved to the following location Public Documents Colnatec LOGS For example if the name Folder1 was entered the file path to any newly cre...

Page 25: ...With this feature the user can add a specialized name to the end of the logs recorded by the device Note If a log recording is already underway the logging must be restarted for the new name to take e...

Page 26: ...onnector on the back of the unit see Exterior Features on page 7 and DB37 Relay Board on page 119 while the output for Device Relay 1 and Device Relay 2 is located on the DB9 I O port also on the back...

Page 27: ...WHEN to specify when the relay should be activated The relay will be set to the specified state when the event selected in the WHEN control activates Select from the following WHEN events Never Relay...

Page 28: ...if the process has completed successfully The relay will be reset on the next process run Abort is Pressed The relay will be set to the specified state when the abort button is pressed and will return...

Page 29: ...igher than the specified period in the eon software the Eon software will not be able to take readings fast enough from the hardware and as a result data points will be missed when logging data The gr...

Page 30: ...rol setting can cause the software to take longer than 100ms to execute If this happens the software may miss readings Toggle Key Tap to toggle the display of the color key on the Software Monitor scr...

Page 31: ...may be required when requesting assistance with your system 31 Chapter 4 Settings The About window also contains several useful Colnatec web links as well as access to support documentation Tap help f...

Page 32: ...from any screen Note In order for the program to update the source power the user must enter a new value and then press in an area other than the Source Power indicator or press enter The following sc...

Page 33: ...1 2 can be manually adjusted by the user through the Manual Mode operating environment 1 Tap the Source Selection drop down menu to select the source that needs to be manually controlled 3 Use the So...

Page 34: ...n the user manually adjusts the value of the source power output the source will no longer be controlled by the PID regardless of the current process If a source is adjusted during a deposition the Eo...

Page 35: ...rtical tool bar is always available Use the vertical tool bar to start a process abort a process record a log zero the sensors and activate the relays Starting a Deposition A deposition process can be...

Page 36: ...s The sensors can be zeroed from any screen Pressing zeros Sensor 1 and Sensor 2 at once Activating Device Relays Device Relay 1 and Device Relay 2 permit manual control of the relays controlled via t...

Page 37: ...37 Chapter 6 Vertical Tool Bar Exiting Eon ID Software Eon ID software can be exited from any screen Simply press and when prompted press OK...

Page 38: ...sses Resuming Processes Screen This feature allows the user to resume previously aborted process Press to access the Resuming Processes screen To resume an aborted process select resume aborted start...

Page 39: ...Abort Reason A description explaining why the process was aborted Layer This will be the layer that the process resumes If the process was edited and layers reordered the program will resume the last...

Page 40: ...en it will load whichever layer is in position 3 regardless of whether the process has been modified Start from the Beginning If this option is selected the process will start at the beginning of the...

Page 41: ...layer from the layer list Note that the rate and thickness of the layer is listed along with the layer name Then enter the rate and thickness values manually into the Rate and Thickness controls Press...

Page 42: ...ation on the progress of the process Data for each sensor is represented health layer frequency material rate thickness and percentage complete Important information such as source power and temperatu...

Page 43: ...he selected source for the material being applied During this process the material being applied is also displayed Frequency Sensor frequency Rate Rate of deposition Thickness Thickness of deposition...

Page 44: ...44 Chapter 8 Status Temperatures TC2 Auxiliary thermocouple connection Manual Zeroing of Individual Sensors Press the Zero Sensor button that corresponds to the sensor to be zeroed...

Page 45: ...s Eon ID is currently performing Information updates in real time as Eon ID performs each task Time Indicator Displays the run time of the current active process The Time Indicator also retains the ru...

Page 46: ...s screen Press on Graphs in the Screen Selection tool bar The Graphs screen features line graphs for frequency temperature rate power and thickness Unlike real time data data in graph form can provide...

Page 47: ...Hz Rate Displays the rate of the material application over time in s Thickness Displays the thickness of material application over time in k Temperature Displays the temperature over time in C Power D...

Page 48: ...election tool bar Locking a screen helps ensure that the controls and settings on each screen remain secure and under password protection Screen Lock Button To access the screen lock controls select t...

Page 49: ...ected screen s will now require a password to access If a password is NOT already in place the lock screen appears Use these controls to lock and unlock screens and change the screen lock password 49...

Page 50: ...ted the Password and Re Type Password fields must contain the same password Press Update to save new password or Press away from the lock screen to keep the exiting password Forgotten Password Resetti...

Page 51: ...nt BNC between the sensor head oscillator is too long Orientation of external oscillator is reversed This error is an indication that the Eon ID is not receiving a signal from the crystal of the senso...

Page 52: ...res Settings to factory default Close Eon software Delete the Master xml file in Public Documents Colnatec Open software and select new COM port Could not connect to EON ID after 3 seconds message app...

Page 53: ...onal Gain 0 00 to 9999 00 s Integral Time 0 00 to 99 9 s Derivative Time 0 0 to 99 9 s Rise to Soak 0 10 to 9999 9 s Soak Time 0 00 to 9999 99 s Soak Power 0 00 to 100 00 Rise to Predeposit 0 00 to 99...

Page 54: ...equency 6 MHz Drives Crystals 6 MHz 1 200 any type Filter 0 1 Alpha 0 1 Display Film Selected Material Layer Layer Being Deposited Rate Auto ranging 999 to 9999 9 Thickness Auto ranging 999 to 9999 9...

Page 55: ...e Digital 5v DB9 Relays 2 Relays 2 SPST programmable Software Number of Processes 100 000 Number of Layers 100 000 Manual Power Control Yes User Labeled Process full touchscreen with alphanumeric entr...

Page 56: ...iggered according to user defined conditions Sensor Head Input s High resolution inputs accurate up to 001 Hz 2 Thermocouple Input s K type thermocouple inputs accurate to 0 25 C 2 Rackmount Dimension...

Page 57: ...figuration Rendering illustrates basic connections of Eon ID system Thin Film Sensor Thin Film Controller Remote oscillator Make sure this distance marked in red DOES NOT exceed 36 914 mm substrate so...

Page 58: ...for any injury resulting from product misuse modification or disassembly Warranty Label If the warranty label has been tampered with VOID will appear where the warranty label was originally placed If...

Page 59: ...t help improve measurement accuracy for better process control Software Updates The Eon ID interface software can be upgraded on site to provide software improvements There will be notifications when...

Page 60: ...625 N Gilbert Road Suite 205 Gilbert AZ 85234 480 634 1449 support colnatec com colnatec com 60 Appendix B Safety Handling Support Contact Colnatec Support...

Page 61: ...alculation Method 1 C Appendix 61 Appendix C Tooling Factor Calculation Method 1 Crystal Source dc distance to crystal ds distance to sensor c angle of crystal to source s angle of crystal to the norm...

Page 62: ...ing Factor Calculation Method 2 D Appendix 62 Appendix D Tooling Factor Calculation Method 2 Crystal Source 100 Substrate Thickness Sensor Thickness Tooling Factor 100 3 K Substrate 150 Example 2 K Se...

Page 63: ...quation modified Sauerbrey equation modified Mass to Frequency Correlation Formula Nat Frequency Constant 166100 Hz cm dq Density of Quartz 2 649 gm cm3 df Density of film gm cm3 Fc Coated Frequency H...

Page 64: ...F Appendix 64 Appendix F Input Control Input Control GETTING TO INPUT CONTROL SCREEN 1 First press the Settings button 2 Press the Relay Settings button in the settings screen INPUT CONTROL...

Page 65: ...ut tried to start the process but that the process could not be started as it is already activated This option enables disables these noti cations Use the controls on the Input Settings page to progra...

Page 66: ...t occurs Step into next layer Placeholder for future implementation Do nothing Does not perform any action This is used when no state change is requested NOTE Some of these actions require additional...

Page 67: ...G Appendix 67 Appendix G Quick Setup Quick Setup...

Page 68: ...68 Appendix G Quick Setup...

Page 69: ...69 Appendix G Quick Setup...

Page 70: ...70 Appendix G Quick Setup...

Page 71: ...71 Appendix G Quick Setup...

Page 72: ...72 Appendix G Quick Setup...

Page 73: ...73 Appendix G Quick Setup...

Page 74: ...74 Appendix G Quick Setup...

Page 75: ...H Appendix 75 Appendix H Using RS 232 Setting Up RS232 1 Plug the accompanying RS 232 adapter into the USB port on back panel 2 Connect the RS232 adapter to your external RS232 device...

Page 76: ...t already been powered on press the power button now On completion of the startup routine Eon software will open to the main Status Screen Press on the Settings button to enter the Settings menu 4 On...

Page 77: ...dropdown menu and select Refresh to reload the list 6 Select the open COM port which is the COM port that DOES NOT contain a yellow icon beside it This open COM port will be assigned to the external...

Page 78: ...ion menu When the white X is displayed RS232 communication is active 8 The External RS232 Settings screen features a field that displays the command last received from the exernal RS232 device This in...

Page 79: ...Device Status Command Structure E Get Data Command Structure GL Get Layer Comma GP Get Process Command Structure HA Heater Activate Command Structure HO Heater Off Command Structure IL Insert Layer Co...

Page 80: ...d D W d d Z Important Notes Between the command e g C and the first command parameter e g 0 there is Between every command parameter there is a separator i e i e there is always an additional separato...

Page 81: ...81 Appendix I RS232 Commands Command Parameters d d W s s s Checksum d of the characters before the checksum An indicates that transmission has ended and the next value t Example Checksum d...

Page 82: ...82 Appendix I RS232 Commands C Command Example d d W W s d d d d d d D...

Page 83: ...83 Appendix I RS232 Commands d d d Z d d d d d E y Z...

Page 84: ...232 Commands Application Notes E d d d d Z d E he tables Please refer to the Command Parameters and Message Structure E Legacy commands are still available but it is highly recommended that their repl...

Page 85: ...85 Appendix I RS232 Commands Command Structure d d d d h E E Z E E E E s E d d t s E t s E h E E E E E Z E E E E E E E s s d d D d d...

Page 86: ...86 Appendix I RS232 Commands A Abort Command Structure d d d h E E Z E E E E d h E E Z E E E E...

Page 87: ...87 Appendix I RS232 Commands AL All Layers Command Structure d d d h E E Z E E E E AL Layer 0 Layer n d h E E E Z E E E E E E...

Page 88: ...88 Appendix I RS232 Commands AP All Processes Command Structure d W d W d W h E E Z E E W E E W Process 0 Process n d W W h E E E Z E E E W W E E E...

Page 89: ...89 Appendix I RS232 Commands CP Continue Process Command Structure W d W d W h E E Z E E W E E W d W h E E Z E E W E E...

Page 90: ...90 Appendix I RS232 Commands DL delete layer command structure DL Delete Layer Command Structure d t d d E d E h E E E Z E E E E E d h E E Z E E E E...

Page 91: ...91 Appendix I RS232 Commands DP Delete Process Command Structure d W d W W E d W W E h E E E Z E E E W E E E W d W h E E Z E E W E E...

Page 92: ...ice Status Command Structure d Z the device This returns the same Process Status found in the E command d d h E E Z E E W E E d h E E E Z E E W E E E E d W E D D W Z D d Z d d process and set the proc...

Page 93: ...93 Appendix I RS232 Commands DS Device Status Command Structure W d Z...

Page 94: ...ndix I RS232 Commands E Get Data Command Structure d Z checksum E d d h E E Z E E E E D Z D Z d d d d d d Zd d Zd d W W W Z Z W W W W W D W D W D W W W d h E E E Z E E E E E E E D Z D Z d d d d h Z E...

Page 95: ...95 Appendix I RS232 Commands E Get Data Command Structure d d Zd d Zd d W W h Z E E E s s W Z Z W W h E E E E Z E KE K KE K KE K W D W D W h E E E E E E Z KE K KE K D W W W h E E E E Z KE K...

Page 96: ...96 Appendix I RS232 Commands E Get Data Command Structure E W W W E D W DK K W DK KE W d t W W W W W W E D K Z d Z d W W W K K K W d W W W d W E D D W Z D d Z...

Page 97: ...r example if the EON device s period is set to 1 second KE several E Checksum responses from the EON unit until the EON unit updates every one second It will then transmit the new data once it updates...

Page 98: ...ty Z Factor Tooling P I D Source Sensor Max Power End Of Layer Action Rise to Soak Soak Time Soak Power Rise to Predeposit Predeposit Predeposit Power Delay Rate Warning Rate Warning Delay Rate Abort...

Page 99: ...99 Appendix I RS232 Commands GL Get Layer Command Structure d W Z W W W W h W W Z E E E E E Z t Z t Z Z h W W Z E E E E E...

Page 100: ...100 Appendix I RS232 Commands GP Get Process Command Structure d W d d W d W h E E Z E E W E E W d W W E h E E E Z E E E W E E E...

Page 101: ...101 Appendix I RS232 Commands HA Heater Activate Command Structure d d W D W D d d W h E E E E E Z E E E E E E E D W D d h W E Z Z Z E E Z Z E d h E E Z E E E E...

Page 102: ...ppendix I RS232 Commands HA Heater Activate Command Structure E Z Z t Z d argument K reached the heater will remain on for the specified amount of time designated by Clean Time d K Clean Time K d d D...

Page 103: ...103 Appendix I RS232 Commands HO Heater Off Command Structure d K d K d K h E E Z E E K E E K d K h E E Z E E K E E...

Page 104: ...ture d h h W d K W E E Z d d K W E E h E E E E E E Z E E z E E E z E E E E E E Z d h E Z E E E d h E E Z E E E E E K When N is sent for overwrite When Y is used the layer at the specified location wil...

Page 105: ...ame Density Z Factor Tooling P I D Source Sensor Max Power End Of Layer Action Rise to Soak Soak Time Soak Power Rise to Predeposit Predeposit Predeposit Power Delay Rate Warning Rate Warning Delay Ra...

Page 106: ...106 Appendix I RS232 Commands Z t Z Z h W Z E E E W d W h E E Z E E W E E E d h d d z...

Page 107: ...107 Appendix I RS232 Commands NL Next Layer Command Structure d E t d E d E h E E Z E E E E E E d E h E E Z E E E E E E d KE d W W W E W D...

Page 108: ...108 Appendix I RS232 Commands P Set Period Command Structure d W d W d W W h E E Z E E W E E E W d W h E E Z E E W E E...

Page 109: ...ommands PL Process Layers Command Structure d W d W W E d W W E h E E E Z E E E W W E E E W Layer 1 Name Layer 1 Rate Layer 1 Thickness Layer n Name Layer n Rate d d W h E E E Z E E E W E E E E Z d d...

Page 110: ...110 Appendix I RS232 Commands PP Process Properties Command Structure d WW d d d d WW W E D d WW W E D h E E E E Z E E E W E E E WW d WW h E E Z E E W E E E d d D s...

Page 111: ...ayer Command Structure d Z d Z d Z W h E E E E Z E E E Z E E E E Z d Z h E E Z E E Z E E E Z the process s list of layers It does not remove it from the device d Delete Layer completely deletes the la...

Page 112: ...112 Appendix I RS232 Commands RP Run Process Command Structure d ZW d ZW d ZW h E E Z E E ZW E E ZW d ZW h E E Z E E ZW E E...

Page 113: ...113 Appendix I RS232 Commands SP Set Process Command Structure d W d W d W h E E Z E E W E E W d W W E h E E E Z E E E W E E E...

Page 114: ...nds SS Set Source Command Structure d d h W d W d W h E E E W Z E E E E E E d h E E Z E E E E E E W E D Freezing a source s power t W from the E command then use this command to set its power This wil...

Page 115: ...115 Appendix I RS232 Commands ZS Zero Sensor Command Structure d d d h E E E Z E E E E E d h E E Z E E E E E W E D...

Page 116: ...116 Appendix I RS232 Commands Error Response Command Structure d d d h E E Z E E E E d D h E E E E E Z E E E h E E E E E...

Page 117: ...se Command Structure W E D h h s W Z W E Z W t E s K K Z E W K h E K h E W E E W E K K Z t E K E E E This error occurs when the is missing at the beginning of the command t E K t d D 117 Appendix I RS...

Page 118: ...sponse Command Structure h d d does not match any known commands W Z d W E Z d Z t an will be used in replace of the command name however an error number and message will still be 118 Appendix I RS232...

Page 119: ...ut 6 22 Input 7 21 Input 8 20 19 Abort N O 18 Output 1 N O 17 Output 2 N O 16 Output 3 N O 15 Output 4 N O 14 Output 5 N O 13 Output 6 N O 12 Output 7 N O 11 Output 8 N O 10 Unused 9 Output 1 N C 8 In...

Page 120: ...urce Control PIN Description 1 Relay 2 Out N O 2 Relay 1 Out N O 3 24 vdc for Mirage use only 4 0 5 vdc Source 2 Control 5 0 5 vdc Source 1 Control 6 Relay 2 Return N O 7 Relay 1 Return N O 8 Ground S...

Page 121: ...M Appendix Source Power Supply Signal 121 Appendix M Source Power Supply Signal Source Power Supply 0 5 VDC Analog Signal via DB9 I O cable Power to Source Deposition Control Source Substrate Eon ID...

Page 122: ...ss 15 Adding a Material 19 Adjusting Min Max Range of Graphs 46 Adjusting Source 33 Assembly 10 Auto Abort 29 Auxiliary Thermocouple 44 B BNC Sensor Inputs 7 C Coating 53 Color Key 46 47 Communication...

Page 123: ...al Oscillator 9 51 F Frequency 25 42 43 46 47 51 54 63 Fuse 7 G Getting Started 10 11 12 Graph 46 47 Graphs 46 47 Graph Screen 46 Green Status Bar 45 Grounding Post 7 H Health Crystal 42 43 I Input Co...

Page 124: ...anual Mode 32 33 34 36 Manual Zeroing 44 Mass to Frequency Correlation Formula 63 Material 18 19 20 42 43 45 47 Max Power 20 22 22 29 Measurement 25 54 59 N New Edit Layer Screen 15 16 O Oscillator 7...

Page 125: ...ogram Control 13 14 15 16 17 18 19 20 21 22 Program Control Screen 13 Proportional 20 22 22 53 Q Quick Reference 8 Quick Setup 67 68 69 70 71 72 73 74 R Rate Abort Deviation 22 Rate Warning Delay 22 R...

Page 126: ...76 78 Settings Screen 23 Soak Power 21 22 53 Soak Time 21 22 53 Software Monitor Screen 29 Source Power 32 33 42 43 Source s 7 18 20 22 21 22 32 33 34 42 43 47 120 Specifications 53 54 55 56 Starting...

Page 127: ...Index 127 Index U Updates 59 USB Connector 7 Use Stored Layer 15 16 V Vertical Tool Bar 35 36 37 38 39 40 41 W Warranty 58 59 Z Zeroing the Sensors 36 Zero Sensor 42 43 44 Z Factor 18 19 20 22 22 53...

Page 128: ...dition or warranty expressed or implied about the fitness of this technical manual or accompanying hardware product Colnatec reserves the right to make changes to this technical manual or accompanying...

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