CKD FLUEREX WFK2 Series, Manual

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Supports fluorine liquids
Supports fluorine liquids with excellent electrical insulation.
Ideal for controlling coolant in semiconductor manufacturing equipment.
Fluids with low global warming potential are also supported.
Compatible with flow rates of 0.4 to 250 L/min
Compatible with a wide range of flow rates.
Easy flow rate adjustment (Option)
Needle: Fine adjustment is possible with the manual valve.
Cock: Valve can be easily opened and closed.
All models equipped as standard with
fluid temperature measuring function
Saves space and wiring time with no need for a
separately installed temperature sensor. As the
temperature sensor is inside the product, it is not
easily affected by ambient temperatures.
Various output functions available
OUT1 OUT2
Analog Output
Switch Output
NPN/PNP can be switched
Pulse Output External Input
Analog Output
Switch Output
NPN/PNP can be switched
Pulse Output
IO-Link
Instantaneous flow rate
Temperature
Instant flow rate1/2 Temp1/2
Accumulated flow
Instant flow 1/2 Temp 1/2
Accumulated flow
Accumulated flow Accumulated flow reset
Peak hold reset
Accumulated flow
Instantaneous flow rate
Temperature
Needle type Cock type
Fluorinert
™
FC-3283 HT135
Novec7300 SF10
FC-40 HT200
Galden
®
Novec
™
Opteon
™
* Compatible models: WFK2-005, WFK2-020, WFK2-050
* Fluorinerts ™ and Novec™ are trademarks of 3M Corporation.
* Galden
®
is a registered trademark of Solvay Special Polymers Japan.
* Opteon ™ is a trademark of Mitsui/Kemaz Fluoroproducts.
Temperature sensor