11 Trouble Check List
Table 7 Trouble Check List
Trouble
Causes
Processing method
The pump
does not run
Motor connection is wrong
Check the connection
The motor malfunction
Replace the motor
The pump is stuck
Conduct the overhaul
Oil viscosity got higher
Replace the oil
Temperature is low
Warm up or replace the pump oil
Exhaust filter or exhaust pipe is clogged
Clean exhaust filter or exhaust pipe
Problem with power supply voltage
Set the power supply voltage to within 10%
Parts inside the pump are damaged
Overhaul(replace the damaged part)
Press the reset button
Press the reset button
Pressure does
not come
down
Gas ballast valve is open
Close gas ballast valve
The pipe connected to the inlet port is
thin or connection distance is long
Connect a pipe wider than inlet diameter and
shorten the distance between the vacuum
chamber
Leakage occurs from the pipe connected
to the pump
Locate the leakage with a leak age detector
and stop the leak age
Metal mesh at the inlet port is clogged
Remove the pipe above the inlet and clean
the mesh
Specified oil is not being used
Overhaul the pump and replace the oil
specified by us
The oil is deteriorated or not supplied to
the specified volume
Replace the oil or add the oil to the specified
volume
Oil does not circulate
Overhaul
a) Oil hole of the cover the like is
clogged
a) Clean the oil hole
b) Oil distributor valve has a trouble
b) Check and repair the oil distributor valve
Pumping speed is too small to the
volume of the chamber
Select another pump
The pressure measurement method is
not correct
Measure the pressure correctly
The vacuum gauge is not suitable
Measure with a calibrated vacuum gauge
suitable for the pressure range
Pump surface
temperature
is abnormally
high
Area around the pump is enclosed
Make the ventilation available
The temperature of the evacuated gas is
high
Mount cooling equipment such as a gas
cooler at the inlet side
The environment temperature is high
Use pump in environment with air
conditioner
