Vacuum Equipment
30
DOC-M88-EXX268_V1_12.2016
1. Connect the cables:
Figure 3.4: Back sides of: Edwards turbomolecular instrument controller (TIC, left side) and Edwards
relay box (right side)
1
Mains supply
6
Terminator plug
2
WRG
7
Connection to TIC
3
Vent valve
8
Mains supply
4
Turbo pump
9
Backing pump
5
Connection to relay box
2. Check the oil level for the backing-pump.
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The vacuum stage is ready.
Summary of Contents for Anton Paar
Page 6: ...Contents 6 DOC M88 EXX268_V1_12 2016 ...
Page 12: ...List of Figures 12 DOC M88 EXX268_V1_12 2016 ...
Page 26: ...General Remarks 26 DOC M88 EXX268_V1_12 2016 ...
Page 34: ...Vacuum Equipment 34 DOC M88 EXX268_V1_12 2016 ...
Page 135: ...DOC M88 EXX268_V1_12 2016 135 ...
Page 136: ...Bruker Corporation info baxs bruker com www bruker com Order No DOC M88 EXX268 ...