Vacuum Equipment
DOC-M88-EXX268_V1_12.2016
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Vacuum Equipment
Two examples for the installation of vacuum pumps for heating chambers are presented.
One concerns the Edwards turbomolecular pump and its mounting in the front of the D8
enclosure and the second shows how to install the Edwards backing pump.
3.1
Installation of the Edwards High Vacuum Stage with TIC
3.1.1
Mounting of the Edwards High Vacuum Stage
Connecting the vacuum tubes and the components
1. Connect vacuum tubes and components, see the next 3 pictures)
2. Mount the Edwards turbomolecular pump to the flexible bellow
3. Mount the Edwards backing-pump (backing pump) to the flexible vacuum line.
Summary of Contents for Anton Paar
Page 6: ...Contents 6 DOC M88 EXX268_V1_12 2016 ...
Page 12: ...List of Figures 12 DOC M88 EXX268_V1_12 2016 ...
Page 26: ...General Remarks 26 DOC M88 EXX268_V1_12 2016 ...
Page 34: ...Vacuum Equipment 34 DOC M88 EXX268_V1_12 2016 ...
Page 135: ...DOC M88 EXX268_V1_12 2016 135 ...
Page 136: ...Bruker Corporation info baxs bruker com www bruker com Order No DOC M88 EXX268 ...