Brooks On-Board 8, Installation And Maintenance Instructions Manual

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©2013 Brooks Automation Inc. Pub. No. 8040564, Rev. AA, 01/15/13 ECO No. 64541 Index-1
A
Arrays and vacuum vessels 1-10
Auxiliary (AUX) TC Gauge
installation 2-4
B
Brooks Automation
contact information Front-ii
C
Cold head 1-10
Compressor gas and oil flows 1-10
Controlling pump remotely 1-7
D
Decontaminating helium circuit 4-1
Decontamination process
alternatives 4-10
tools required 4-3
H
Helium circuit
decontaminating 4-1
Helium line connection 2-4
Helium lines
connecting 2-4
I
Installation 2-1
K
Keypad, remote
mounting 2-7
M
Maintenance 4-1
Microprocessor system 1-1
O
Oil flows and compressor gas 1-10
On-Board 8 GLE Cryopump
Installation, operation, and maintenance
1-1
specifications 1-8
On-Board GLE Cryopump
description 1-1
installation 2-1
maintenance 4-1
On-board vacuum network controller module
1-6
P
PCM 1-4
Power conditioning module 1-4
Purge gas connection 2-4
Purge gas supply line
connecting 2-4
R
Relays, setpoint
connecting 2-4
Remote control operation 1-7
Remote keypad
mounting 2-7
Rough valve gas connection 2-3
Roughing pump connection 2-3
S
Safety precautions S-1
Setpoint relays
connecting 2-4
Specifications 1-8
T
Theory of operation 1-9
Troubleshooting 3-1
V
vacuum network controller module 1-6
Vacuum vessel and arrays 1-10
Valve gas, rough
connection 2-3
Vent pipe connection 2-2
Index