Brooks CTI-Cryogenics Installation, Operation And Maintenance Instructions Download

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Introduction

High Capacity Helium Compressor

Typical On-Board 8F Cryopump for 300mm PVD System

Manual

8040600

Brooks Automation

1-18

Revision A

Typical On-Board 8F Cryopump for 300mm PVD System

The High Capacity Helium Compressor equipped with two modules can
provide a helium supply to a maximum of 8 On-Board 8F Cryopumps for
300mm PVD as shown in

Figure 1-10

. The three module configuration can

provide a helium supply to a maximum of 12 On-Board 8F Cryopumps for
300mm PVD as shown in

Figure 1-11

Figure 1-10: Typical On-Board 8F Cryopump for 300mm PVD System Helium Connections (Two

Module Configuration)

HELIUM SUPPLY

HELIUM RETURN

Summary of Contents for CTI-Cryogenics

Page 1: ...CTI Cryogenics High Capacity Helium Compressor Installation Operation and Maintenance Instructions 8040600 Revision A ...

Page 2: ...pfrog MagnaTran MapTrak Marathon Marathon 2 Marathon Express Micro Ion MiniConvectron On Board Polycold Razor Simplicity Solutions the Simplicity Solutions logo Stabil Ion TrueBlue TurboPlus Vision Zaris and the Brooks Automation logo are registered U S trademarks of Brooks Automation Inc All other trademarks are properties of their respective owners 2013 Brooks Automation Inc All Rights Reserved ...

Page 3: ...5 Weight 1 6 Electrical 1 6 Cooling Water 1 7 General 1 9 Electrical Box Front Panel Component Description 1 11 Low Helium Pressure 1 11 Power On 1 12 CB2 1 12 Module 1 2 and 3 Status Indicators 1 12 Emergency Off Button 1 12 Supply Pressure Gauge 1 12 Electrical Box Rear Panel Component Description 1 13 Logic Module Panel 1 13 RS 232 1 13 LED Indicator 1 13 ID 1 14 P2 and MNS LED 1 14 MAC ID 1 14...

Page 4: ...uction 2 2 Signal Word Descriptions 2 3 Safety Shape Descriptions 2 4 References 2 4 Unpacking and Inspection Shipping Carton Inspection 3 2 Removal from Shipping Carton 3 2 Alternate Removal Method 3 4 High Capacity Helium Compressor Inspection 3 6 Compressor 3 6 Helium Static Pressure Verification 3 6 Shipping Carton Contents 3 6 Removing the Wheel Assemblies Optional 3 6 Installation Introducti...

Page 5: ... 2 Shutdown 5 3 Replacement of Helium Circuit Components 5 3 Maintenance Scheduled Maintenance 6 2 Suggested Maintenance Equipment 6 2 Adsorber Replacement 6 2 Adjusting System Helium Pressure 6 5 Reducing Helium Pressure 6 5 Increasing Helium Pressure 6 5 Adding Helium 6 5 Troubleshooting Troubleshooting the High Capacity Helium Compressor 7 2 Technical Inquiries 7 2 Appendices Appendix A Custome...

Page 6: ...Contents High Capacity Helium Compressor Installation Operations and Maintenance 8040600 Brooks Automation 4 Revision A This Page Intentionally Left Blank ...

Page 7: ... 3 4 2 High Capacity Helium Compressor Power Cable Connections 4 6 4 3 Power Cord Installation 4 7 4 4 Proper Connection Disconnection Technique for Helium Line Couplings 4 11 6 1 Disconnecting Connecting Self Sealing Couplings 6 3 6 2 Adsorber Location within the High Capacity Helium Compressor Rear Panel Removed 6 4 B 1 Logic Module Connector P2 Pinout Diagram 8 3 B 2 EMO Connector Schematic 8 4...

Page 8: ...Figures High Capacity Helium Compressor Installation Operations and Maintenance 8040600 Brooks Automation viii Revision A This Page Intentionally Left Blank ...

Page 9: ...essor Weight 1 6 1 2 Electrical Input Specifications 1 6 1 3 General High Capacity Helium Compressor Operating Specifications 1 9 1 4 MNS LED Status Indications 1 14 2 1 Safety Signal Words 2 3 2 2 Safety Shapes 2 4 4 1 Required Components for High Capacity Helium Compressor Installation 4 2 6 1 Suggested Maintenance Equipment 6 2 B 1 Helium Flow Diagram Three Modules 8 7 ...

Page 10: ...Tables High Capacity Helium Compressor Installation Operations and Maintenance 8040600 Brooks Automation x Revision A This Page Intentionally Left Blank ...

Page 11: ...l to ensure safe and reliable system performance Refer to Appendix A Customer Support Information to contact the local Customer Support Center for information about connecting 9600 Compressors to a manifold with other CTI Cryogenics compressors Chapter Contents CTI CRYOGENICS Helium Refrigeration System 1 3 Specifications 1 5 Dimensions 1 5 Weight 1 6 Electrical 1 6 Cooling Water 1 7 General 1 9 E...

Page 12: ...input voltages The two module configuration shown in Figure 1 10 provides enough compressed helium to supply eight 8 On Board 8F Cryopumps for PVD Operation The three module configuration shown in Figure 1 11 provides enough compressed helium to supply twelve 12 On Board 8F Cryopumps for PVD Operation Refer to Table 1 1 1 2 1 3 and 1 4 for specifications on each configuration System Documentation ...

Page 13: ... is compressed into the necessary high pressure to be returned to the cold head A large portion of the energy required to compress the helium is rejected as heat through the High Capacity Helium Compressor cooling water High pressure room temperature helium is transferred to the cold head through the helium supply lines After expansion in the coldhead low pressure helium is returned at or near roo...

Page 14: ...Introduction High Capacity Helium Compressor CTI CRYOGENICS Helium Refrigeration System Manual 8040600 Brooks Automation 1 4 Revision A Figure 1 1 High Capacity Helium Compressor Front View ...

Page 15: ...Introduction Manual Specifications Brooks Automation 8040600 Revision A 1 5 Specifications Dimensions The dimensions of the High Capacity Helium Compressor are shown in Figure 1 2 Figure 1 2 High Capacity Helium Compressor Dimensions ...

Page 16: ... Voltage 3 Compressor Modules 820 372 High Voltage 3 Compressor Modules 830 376 Low Voltage 2 Compressor Modules 640 290 High Voltage 2 Compressor Modules 650 295 Table 1 2 Electrical Input Specifications Parameter Low Voltage 3 Compressor Modules High Voltage 3 Compressor Modules Low Voltage 2 Compressor Modules High Voltage 2 Compressor Modules Input Voltage and Frequency 180 253 VAC 50 60Hz 342...

Page 17: ...aximum Inlet Temperature 90 F 32 C 90 F 32 C Minimum Inlet Temperature 50 F 10 C 50 F 10 C Flow Rate 5 50 2 50 gpm 20 8 9 5 lpm 8 25 3 75 gpm 31 2 14 2 lpm Pressure Drop inlet to outlet Refer to Figure 1 4 10 5 psi 0 72 bar 5 5 gpm 20 8 lpm 10 psi 0 69 bar 8 25 gpm 31 2 lpm Maximum Inlet Pressure 100 psi 6 9 bars 100 psi 6 9 bars Alkalinity 6 0 8 0 pH 6 0 8 0 pH Calcium Carbonate 75 ppm 75 ppm NOT...

Page 18: ...re drop 2 3 4 5 6 7 8 9 10 11 12 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 Pressure drop psi Flow rate gpm 3 Compressors 2 Compressors High Capacity High Voltage Compressor Cooling Water Flow Rate vs Inlet Temperature 60 Hz Operation 2 compressor unit 2 00 2 50 3 00 3 50 4 00 4 50 5 00 5 50 6 00 6 50 7 00 50 55 60 65 70 75 80 85 90 Cooling Water Inlet Temperature degrees F Recommended Minimum Flo...

Page 19: ...3 modules 8128904G004 2 modules 8128903G004 3 modules Input Power Cable Check local electrical codes 3 conductor cable with ground Rated 600 VAC Check local electrical codes 3 conductor cable with ground Rated 600 VAC Check local electrical codes Helium Static Pressure 325 335 psig 22 4 23 1 bars 325 335 psig 22 4 23 1 bars Ambient Operating Temperature Range 50 100º F 10 38º C 50 100º F 10 38º C ...

Page 20: ...for 300mm PVD is in a regeneration cycle Gas Supply Connector Gas Return Connector 3 4 in Aeroquip self sealing coupling female 3 4 in Aeroquip self sealing coupling male 3 4 in Aeroquip self sealing coupling female 3 4 in Aeroquip self sealing coupling male Adsorber Replacement Schedule Every 3 Years Every 3 Years Table 1 3 General High Capacity Helium Compressor Operating Specifications Continue...

Page 21: ...hs Figure 1 7 Electrical Box Front Panel Components Low Helium Pressure The Low Helium Pressure indicator illuminates when the helium operating pressure return pressure drops below 140 psig 9 6 bar The High Capacity Helium Compressor will automatically shut down if the helium return pressure drops below 20 psig 1 38 bar NOTE Refer to Section 7 Troubleshooting for more information if the Low Helium...

Page 22: ...s when the High Capacity Helium Compressor pump is automatically turned OFF due to a over temperature condition within the High Capacity Helium Compressor pump module NOTE Refer to Section 6 Troubleshooting for more information if one of these indicators are illuminated The Water Over Temperature Indicator illuminates when the High Capacity Helium Compressor pump is automatically turned OFF due to...

Page 23: ...ity Helium Compressor using RS 232 or DeviceNet connections RS 232 The RS 232 port allows a host computer to be connected to the High Capacity Helium Compressor The RS 232 port supports a 9600 baud rate NOTE To meet regulatory compliance the RS 232 cable must be fully shielded through to the connector shell Use cable CTI CRYOGENICS P N 8132157GXXX or equivalent The RS 232 cable must also pass thro...

Page 24: ...onnection The pin out diagram is shown in Figure B 1 in Appendix B NOTE The cable used for the P2 connector must be fully shielded by a drain wire and outer braid connected to the connector shell NOTE Refer to Allen Bradley Publication DN 2 15 for more information on shielding the cable NOTE Refer to DeviceNet documentation for more information on DeviceNet states and status messages MAC ID Media ...

Page 25: ...n on the front panel of the High Capacity Helium Compressor is pressed the power to the entire process tool and High Capacity Helium Compressor system will be turned OFF The schematic diagram for the connectors is shown in Figure B 3 If the EMO is not connected to the process system EMO pushing the High Capacity Helium Compressor EMO will shut down the compressor Reverse Phase The Reverse Phase in...

Page 26: ...ty The connector is a 3 4 inch male ORS fitting Refer to Figure 1 9 Water In The Water In connector provides water to the High Capacity Helium Compressor from your facility to cool the High Capacity Helium Compressor during operation The connector is a 3 4 inch male ORS fitting Refer to Figure 1 9 NOTE Refer to Section 6 Troubleshooting for more information if the Reverse Phase indicator is illumi...

Page 27: ...omponent Description Brooks Automation 8040600 Revision A 1 17 Figure 1 9 High Capacity Helium Compressor Rear Panel Component Location MAIN CIRCUIT BREAKER ACCESS PANEL RETURN PRESSURE GAUGES AND CHARGE VALVE HELIUM IN RETURN WATER IN WATER OUT HELIUM OUT SUPPLY WINDOWS ELECTRICAL BOX REAR PANEL ...

Page 28: ...um Compressor equipped with two modules can provide a helium supply to a maximum of 8 On Board 8F Cryopumps for 300mm PVD as shown in Figure 1 10 The three module configuration can provide a helium supply to a maximum of 12 On Board 8F Cryopumps for 300mm PVD as shown in Figure 1 11 Figure 1 10 Typical On Board 8F Cryopump for 300mm PVD System Helium Connections Two Module Configuration HELIUM SUP...

Page 29: ...Automation 8040600 Revision A 1 19 Figure 1 11 Typical On Board 8F Cryopump for 300mm PVD System Helium Connections Three Module Configuration Refer to Chapter 3 Installation for more information on connecting On Board 8F Cryopump for 300mm PVD to the High Capacity Helium Compressor HELIUM SUPPLY HELIUM RETURN ...

Page 30: ...Introduction High Capacity Helium Compressor Typical On Board 8F Cryopump for 300mm PVD System Manual 8040600 Brooks Automation 1 20 Revision A This Page Left Blank Intentionally ...

Page 31: ...e of the product must be familiar with the safety precautions outlined in this section NOTE These safety recommendations are basic guidelines If the facility where the Prod uct is installed has additional safety guidelines they should be followed as well along with the applicable national and international safety codes Chapter Contents Introduction 2 2 Signal Word Descriptions 2 3 Safety Shape Des...

Page 32: ...lation normal operation and when servic ing CTI Cryogenics products This chapter explains the safety conventions used throughout this manual CTI Cryo genics uses a specific format for cautions and warnings which includes standard sig nal words and safety shapes See also the Customer Support appendix or call your local Customer Support Center for assistance ...

Page 33: ...ion CAUTION A signal word that indicates a situa tion or unsafe practice which if not avoided may result in equipment damage A CAUTION is highlighted in yellow CAUTION A signal word accompanied by a safety shape that indicates a poten tially hazardous situation or unsafe practice If not avoided the action may result in minor or moderate personal injury or equipment damage A CAUTION is highlighted ...

Page 34: ...ards see the following documents ISO 7010 2003 E Graphic symbols Safety colours and safety signs Safety signs used in workplaces and public areas ISO 3864 1 2002 E Graphic symbols Safety colours and safety signs Part 1 Design principles for safety signs in workplaces and public areas Table 2 2 Safety Shapes Example Term Shape Definition General Warning Indicates a general hazard Details about this...

Page 35: ...porates a ramp system to facilitate the removal of the High Capacity Helium Compressor from the carton Chapter Contents Shipping Carton Inspection 3 2 Removal from Shipping Carton 3 2 Alternate Removal Method 3 4 High Capacity Helium Compressor Inspection 3 6 Compressor 3 6 Helium Static Pressure Verification 3 6 Shipping Carton Contents 3 6 Removing the Wheel Assemblies Optional 3 6 ...

Page 36: ...et 3 Cut the strap and remove the bolts that attach the ramp to the shipping pallet 4 Attach the ramp to the pallet and install the ramp pins in the pallet holes as shown in Figure 3 3 1 5 Remove any excess shipping material from around the High Capacity Helium Compressor 6 Disengage the locks on the wheel assemblies Tipover Hazard Injury to personnel may result if the High Capacity Helium Compres...

Page 37: ... High Capacity Helium Compressor Unpacking and Inspection Manual Shipping Carton Inspection Brooks Automation 8040600 Revision A 3 3 Figure 3 1 Removing the High Capacity Helium Compressor from the Shipping Carton ...

Page 38: ...lt to the central lifting point The lifting device and strap leg assembly must have a minimum capacity rating of 900 pounds 405kg 1 Cut the straps on the exterior of the shipping pallet 2 Lift the cardboard carton straight up and remove it from the pallet 3 Cut the strap and remove the bolts that attach the ramp to the shipping pallet 4 Remove any excess shipping material from around the High Capa...

Page 39: ...High Capacity Helium Compressor Unpacking and Inspection Manual Alternate Removal Method Brooks Automation 8040600 Revision A 3 5 Figure 3 2 Alternate High Capacity Helium Compressor Removal Method ...

Page 40: ...to Section 4 Operation for more information on the static helium charge pressure of the High Capacity Helium Compressor Shipping Carton Contents The shipping carton should contain the following items High Capacity Helium Compressor Installation Operation and Maintenance manual Crush Hazard Do not remove the leveling screws from the compressor rack The unit may become unsteady and possibly crush ob...

Page 41: ...Assembly Bolt Locations 1 Using the leveling screws lower and level the High Capacity Helium Compressor 2 Use a 9 16 inch wrench to tighten the leveling screw lock nuts 3 Store the wheel assemblies on the shoulder bolts on the side of the rack as shown in Figure 3 3 3 4 Save the wheel assembly bolts WHEEL ASSEMBLY BOLTS LEVELING SCREWS STORE WHEEL ASSEMBLIES ON SIDE OF RACK SHOULDER BOLT ...

Page 42: ...Unpacking and Inspection High Capacity Helium Compressor High Capacity Helium Compressor Inspection Manual 8040600 Brooks Automation 3 8 Revision A This Page Left Blank Intentionally ...

Page 43: ...tiple On Board 8F Cryopumps for 300mm PVD configurations Chapter Contents Introduction 4 2 Supply and Return Water Line Connections 4 4 Hard Water Lines 4 4 Flexible Water Lines 4 4 Electrical Connections 4 5 Power Cable Preparation 4 5 Phase Check 4 8 RS 232 Cable Connections Optional 4 9 Emergency Off EMO System Connections 4 9 Multiple On Board 8F Cryopump for 300mm PVD Flexline Connections 4 1...

Page 44: ... High Capacity Helium Compressor installation and refers to the appropriate installation procedures within this section Table 4 1 Required Components for High Capacity Helium Compressor Installation Item number Description Quantity 1 Input power cable as described in Table 1 2 length as required 2 Input power cable strain relief 1 3 1 4 inch ring tongue terminal lugs 4 4 3 4 inch female ORS water ...

Page 45: ...e 4 1 High Capacity Helium Compressor Installation Flowchart Supply and Return Water Line Connections refer to page 4 4 Electrical Connections refer to page 4 5 Phase Check refer to page 4 8 START Refer to Chapter 4 Operation END Multiple On Board 8F Cryopump for 300mm PVD Flexline Connections refer to page 4 10 ...

Page 46: ...n hard line into the OUT connection on the rear panel of the High Capacity Helium Compressor Tighten the fitting by hand 5 Using a wrench tighten the fittings 6 Turn on the water and verify that there are no water leaks Fittings Damage Do not overtighten the fittings Damage to the input and output connector threads can occur Flexible Water Lines 1 Remove the protective cap from the male ORS fittin...

Page 47: ...ual Electrical Connections Brooks Automation 8040600 Revision A 4 5 Electrical Connections The following procedures provides information for making the input power connections to the High Capacity Helium Compressor Power Cable Preparation 1 Remove the electrical panel cover by turning the four captive 1 4 turn screws as shown in Figure 4 2 2 Remove the terminal block cover by turning the two 1 4 t...

Page 48: ...4 2 High Capacity Helium Compressor Power Cable Connections 3 Refer to Table 1 4 and cut the appropriate cable with ground to an appropriate length Electrical Panel Cover Terminal Block Cover Conductor Isolator Circuit Breaker Power Cable Entrance Power Cable with captive screws with captive screws and Strain Relief Blocks ...

Page 49: ...Capacity Helium Compressor through the customer provided strain relief then through the lower hole as shown in Figure 4 3 High Voltage High voltage electric shock could cause severe injury or loss of life 8 Remove the 1 4 x 20 nut and install the grounding wire on the ground stud Install the nut and tighten to 30 35 in lbs 3 4 4 0Nm 9 Remove the screws from the High Capacity Helium Compressor circ...

Page 50: ...o the tray within the terminal block cover as shown in Figure 4 2 15 Reinstall the terminal block cover by rotating the screws 1 4 turn 16 Reinstall the electrical panel cover by rotating the screws 1 4 turn 17 Connect the power source end of the power cable according to the local electrical codes 18 Proceed with Phase Check High Voltage High voltage electric shock could cause severe injury or los...

Page 51: ...er h Install the circuit breaker terminal cover i Repeat steps 1 2 of this procedure RS 232 Cable Connections Optional Use the following procedure to connect the High Capacity Helium Compressor to the host computer RS 232 network NOTE To meet regulatory compliance the customer provided RS 232 cable must be fully shielded through to the connector shell Use cable 1 Connect the RS 232 cable to the RS...

Page 52: ...onnector and verify that there is no gasket in the female connector 2 Connect the Gas Return line to the GAS RETURN connector on the rear of the High Capacity Helium Compressor and then to the GAS RETURN connector on the system helium manifold as shown in Figure 4 4 Tighten the connector 3 Connect the Gas Supply line to the GAS SUPPLY connector on the rear of the High Capacity Helium Compressor an...

Page 53: ...or 300mm PVD Flexline Connections Brooks Automation 8040600 Revision A 4 11 Figure 4 4 Proper Connection Disconnection Technique for Helium Line Couplings TO TIGHTEN TO LOOSEN TURN WITH 1 3 16 INCH WRENCH HOLD WITH 1 INCH WRENCH HOLD WITH 1 1 8 INCH WRENCH TURN WITH 1 3 16 INCH WRENCH ...

Page 54: ...Installation High Capacity Helium Compressor Multiple On Board 8F Cryopump for 300mm PVD Flexline Connections Manual 8040600 Brooks Automation 4 12 Revision A This Page Left Blank Intentionally ...

Page 55: ...omprised of several pressurized components i e High Capacity Helium Compressor flex lines and On Board 8F Cryopumps for 300mm PVD Each component is charged with helium before shipment After all cryopumps helium lines and manifolds are attached to the High Capacity Helium Compressor the system static helium charge pressure must be verified before system operation Once the static helium system press...

Page 56: ... Cryopump for 300mm PVD 10 If the static helium charge pressure is not within the ranges as indicated in Table 1 4 adjust the charge pressure as described in Section 5 Maintenance Start up Once the High Capacity Helium Compressor has been installed the dynamic helium pressure must be verified to ensure proper High Capacity Helium Compressor operation This procedure should be performed after High C...

Page 57: ...If there is a decrease in system performance check the normal system operating pressure which was determined in step 6 If the operating pressure is not within the normal value check the system for leaks Once the leaks have been repaired add helium to return the system to normal operating system pressure Refer to Section 5 Maintenance for helium charging procedures Shutdown 1 Refer to the On Board ...

Page 58: ...Operation High Capacity Helium Compressor Static Helium System Pressure Verification Manual 8040600 Brooks Automation 5 4 Revision A This Page Left Blank Intentionally ...

Page 59: ...iew This chapter provides maintenance directions for the Brooks Automation Product Chapter Contents Scheduled Maintenance 6 2 Suggested Maintenance Equipment 6 2 Adsorber Replacement 6 2 Adjusting System Helium Pressure 6 5 Reducing Helium Pressure 6 5 Increasing Helium Pressure 6 5 Adding Helium 6 5 ...

Page 60: ... Remove the 8 screws that secure the rear panel to the High Capacity Helium Compressor and remove the rear panel NOTE Use two wrenches in Step 3 to prevent loosening the body of the coupling See Figure 6 1 Table 6 1 Suggested Maintenance Equipment Supply CTI CRYOGENICS P N Helium 99 999 pure Pressure regulator 0 3000 0 400 psi Assy 8031403 Helium charging line terminating in a 1 4 inch female flar...

Page 61: ...and secure them into place with the bolt removed during Step 4 7 Check for the presence of a flat gasket in the male connector and verify that there is no gasket in the female connector 8 Using two wrenches see Figure 6 1 connect the two self sealing couplings on each adsorber 9 Record the adsorber replacement date on the adsorber label 10 Install the High Capacity Helium Compressor rear panel 11 ...

Page 62: ...0600 Brooks Automation 6 4 Revision A Figure 6 2 Adsorber Location within the High Capacity Helium Compressor Rear Panel Removed SELF SEALING MOUNTING BOLT COUPLINGS ADSORBER ADSORBER ADSORBER NOTE The third top compressor module is not present in two compressor configurations ...

Page 63: ...ll the gas charge fitting access panel Helium Leaks If helium is being added more than once every several months check for leaks caused by improperly connected self sealing connections or any mechanical joint in the Compressor Increasing Helium Pressure Use the following procedure to increase the helium pressure if the indicated pressure is below the value as shown in Table 1 4 Adding Helium This ...

Page 64: ...harge port on the rear of the High Capacity Helium Compressor e Loosely connect the charge line to the charge port of the compressor f Open any additional valves between the regulator and the charge port g Slowly open the helium bottle valve and purge the regulator and line for 30 seconds h Tighten the charge line flare fitting onto the compressor gas charge fitting while the helium is flowing 7 S...

Page 65: ... Automation 8040600 Revision A 7 1 7 Troubleshooting Overview The chapter includes information for troubleshooting the High Capacity Helium Compressor Chapter Contents Troubleshooting the High Capacity Helium Compressor 7 2 Technical Inquiries 7 2 ...

Page 66: ...roubleshooting High Capacity Helium Compressor Troubleshooting the High Capacity Helium Compressor Manual 8040600 Brooks Automation 7 2 Revision A Troubleshooting the High Capacity Helium Compressor The High Capacity Helium Compressor troubleshooting procedures are summarized in Table 6 1 Technical Inquiries Refer to Appendix A of this manual for a complete list of the CTI Cryogenics world wide cu...

Page 67: ...t off the compressor and restart Monitor the compressor to verify that the condition does not return 3 Install the water lines cor rectly 3 Water flow light is flash ing May also see a loss of system refrigeration capacity 1 Lack of cooling water 2 Cooling water temperature is too high 3 Compressor water lines con nected backwards 1 Adjust water flow to specifi cation Refer to Table 1 3 Shut off t...

Page 68: ...ntrol cir cuit 1 Check source fuses circuit breakers and wiring asso ciated with the power source Repair as needed 2 Verify adequate phase to phase input voltage Refer to Table 1 3 3 Twist the EMO button 1 8 turn counterclockwise to reset the EMO 4 Turn off CB 2 Remove the compressor logic module Turn CB 2 on If unit runs without the logic module refer to Appendix A to con tact the Customer Suppor...

Page 69: ...nd remains OFF and none of the Status Indicators lights are illuminated 1 Very cold water has caused a restriction of oil flow through the oil injection orifice dur ing start up 2 Compressor overload tripped 1 Adjust water temperature to specification Refer to Table 1 3 Restart High Capacity Helium Compressor repeat edly until continuous opera tion is achieved 2 Lift the top electrical chassis cov...

Page 70: ...overload reset buttons on the compressor overload switch Restart the compres sor Verify adequate phase to phase input voltage Refer to Table 1 2 If the problem occurs again refer to Appendix A to con tact the Customer Support Center 13 System circuit breaker CB1 trips after a period of running 1 Loss or degradation of com pressor input power 2 Damaged component in the High Capacity Helium Com pres...

Page 71: ...wing appendices are included to provide the user with a single location for specific information related to the Brooks Automation Product Contents Appendix A Customer Support Information 9 2 Customer Support Center Locations 9 2 Guaranteed Up Time Support GUTS 9 2 Product Information 9 2 E mail 9 2 Appendix B Diagrams 9 3 ...

Page 72: ...e page Guaranteed Up Time Support GUTS For 24 hour 7 day per week Guaranteed Up Time Support GUTS dial 1 800 367 4887 Inside the United States of America 1 508 337 5599 Outside the United States of America Product Information Please have the following information available when calling so that we may assist you Product Part Number Product Serial Number Product Application Specific Problem Area Hou...

Page 73: ...vision A 8 3 Appendix B Diagrams This appendix contains the various harware wiring and Helium flow diagrams Figure B 1 Logic Module Connector P2 Pinout Diagram Table B 1 P2 Wiring Data Pin Signal Wire Color 1 Drain Bare 2 V Red 3 V Black 4 CAN_H White 5 CAN_L Blue 1 2 4 5 Males pins Females sockets 3 1 2 4 5 3 ...

Page 74: ...x B Diagrams Operations Manual 8040600 Brooks Automation 8 4 Revision A Figure B 2 EMO Connector Schematic EMO SWITCH 1 2 3 4 1 4 1 4 2 3 1 4 1 4 2 3 2 3 FROM MAIN AC BOX REF AMAT J2 P2 EMO IN J1 EMO OUT 0150 201160 REF AMAT 0150 20578 CRYO COMPRESSOR ...

Page 75: ...Manual Appendix B Diagrams Brooks Automation 8040600 Revision A 8 5 Figure B 3 Tower Compressor Electrical Chassis Top View Cover Removed Circuit Board Module 5 VDC Power Supplies Phase Monitor 24 VDC Power Supply RESET BUTTON Pump Motor Overload Contactor ...

Page 76: ...D DESIGN DISCLOSED HEREIN CTI CRYOGENICS AND MUST NOT BE COPIED OR DISTRIBU TED OUTSIDE CTI CRYOGENICS PERSONS WITH A GENUINE NEED TO KNOW WHO BY THE USE HEREOF ACKNOWLEDGE CTI CRYOGENICS OWNERSHIP AND AGREE TO MAINTAIN THIS INFORMATION AND DESIGN IN EXCEPT TO AUTHORIZED STRICT CONFIDENCE ARE THE PROPERTY OF C D 4 3 TI HELIX TECHNOLOGY CORPORATION 31949 INTERPRET GEOMETRIC TOLERANCING PER ASME Y14...

Page 77: ...High Capacity Helium Compressor Appendices Operations Manual Appendix B Diagrams Brooks Automation 8040600 Revision A 8 7 Table B 1 Helium Flow Diagram Three Modules ...

Page 78: ...Appendices High Capacity Helium Compressor Appendix B Diagrams Operations Manual 8040600 Brooks Automation 8 8 Revision A Figure B 5 Low Voltage Electrical Schematic ...

Page 79: ...High Capacity Helium Compressor Appendices Operations Manual Appendix B Diagrams Brooks Automation 8040600 Revision A 8 9 Figure B 6 High Voltage Electrical Schematic ...

Page 80: ...Appendices High Capacity Helium Compressor Appendix B Diagrams Operations Manual 8040600 Brooks Automation 8 10 Revision A This Page Intentionally Left Blank ...

Page 81: ... off button 1 12 EMO 1 12 EMO Connector Schematic 8 4 EMO connector schematic 8 4 EMO In 1 15 EMO Out 1 15 F Flex lines helium connecting 4 10 Flexible water lines installing 4 4 H Hard water lines installing 4 4 Helium adding 6 5 Helium charge fitting and charge valve 1 16 Helium circuit components replacing 5 3 Helium flex lines connecting 4 10 Helium flow diagram three modules 8 7 two modules 8...

Page 82: ...RS 232 cables connecting 4 9 RS 232 port 1 13 S Safety precautions 2 2 Schematics EMO connector 8 4 helium flow diagram three modules 8 7 helium flow diagram two modules 8 6 high voltage electrical 8 9 low voltage electrical 8 8 tower compressor electrical chassis 8 5 Self sealing couplings connecting and disconnecting 6 3 Shutting down the compressor 5 3 Starting the compressor 5 2 Static helium ...

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