Brooks CTI-Cryogenics, Installation, Operation And Maintenance Instructions

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Introduction High Capacity Helium Compressor
High Capacity Helium Compressor Rear Panel Component Description Manual
8040600 Brooks Automation
1-16
Revision A
High Capacity Helium Compressor Rear Panel Component Description
Helium In Return
The Helium In Return coupling returns the helium, which has been cycled
through the On-Board 8F Cryopump for 300mm PVD, back to the High
Capacity Helium Compressor. Refer to
Figure 1-9 .
Helium Out Supply
The Helium Out Supply coupling provides a connection for high pressure
compressed helium to the On-Board 8F Cryopump for 300mm PVD cold head.
Refer to
Figure 1-9 .
Water Out
The Water Out connector returns the water that has been used to cool the High
Capacity Helium Compressor to your facility. The connector is a 3/4 inch male
ORS fitting. Refer to
Figure 1-9 .
Water In
The Water In connector provides water to the High Capacity Helium
Compressor from your facility to cool the High Capacity Helium Compressor
during operation. The connector is a 3/4 inch male ORS fitting. Refer to
Figure 1-9 .
NOTE: Refer to Section 6, Troubleshooting, for more information if the
Reverse Phase indicator is illuminated.
Return Pressure Gauges
The Return Pressure Gauges indicate the helium pressure being returned from
each compressor module within the rack. Refer to
Figure 1-9 .
Helium Charge
The Helium Charge fitting and charge valve are used to add helium to the High
Capacity Helium Compressor when helium charging is required. Refer to
Figure 1-9 . The charge port is a 1/4 inch 45º male flare fitting, and mates with
the CTI-CRYOGENICS’ charge line P/N 7021002P001. Refer to Adjusting
System Helium Pressure in Section 5
for additional information.