1-1
Section 1 Introduction
Installation and Operation Manual
X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008
Model 5861E
1-1 Purpose
The Brooks
®
Model 5861E Flowmeter is a mass flow measurement device
designed for accurately measuring flows of gases. This instruction manual
is intended to provide the user with all the information necessary to install,
operate and maintain the Brooks 5861E
Mass Flowmeter. This manual is
organized into five sections:
Section 1 - Introduction
Section 2 - Installation
Section 3 - Operation
Section 4 - Maintenance
Section 5 - Parts List
It is recommended that this manual be read in its entirety before
attempting to operate or repair the Model 5861E.
1-2 Description
The Brooks Model 5861E Mass Flowmeter is used widely in the
Semiconductor, as well as many other industries where manual, electronic,
or computer controlled gas handling occurs. The Model 5861E consists of
two basic units: a flow sensor and an integral electronic signal control
system. This combination produces a stable gas flow indication, which
eliminates the need to continuously monitor and compensate for changing
gas pressures and temperatures.
1-3 Specifications
Flow Ranges
Any full scale flow rate from 10 slpm* to 100 slpm, Nitrogen equivalent (200
slpm H
2
).
*Standard pressure and temperature in accordance with SEMI (Semiconductor Equipment
and Materials Institute) standard: 0°C and 101.3 kPa (760 Torr).
Ratings
Maximum Operating Pressure: 1500 psi (103 bar)
Ambient/Operating Temperature: 40°F to 150°F (5°C to 65°C)
Non-operating: -13°F to +212°F (-25°C to 100°C)
Performance
Accuracy: ±1% full scale including linearity at calibrated conditions.
Repeatability
0.25% of rate
Response Time
Less than 3 seconds
