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Installation and Operation Manual

X-TMF-5861E-MFM-eng
Part Number: 541B107AAG
November, 2008

Model 5861E

Model 5861E
Mass Flowmeter

Summary of Contents for 5861E

Page 1: ...Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E Model 5861E Mass Flowmeter ...

Page 2: ...titutions may result in fire electrical hazards or improper operation Ensure that all equipment doors are closed and protective covers are in place except when maintenance is being performed by qualified persons to prevent electrical shock and personal injury Pressure Equipment Directive PED All pressure equipment with an internal pressure greater than 0 5 bar g and a size larger than 25mm or 1 in...

Page 3: ...d chemicals to medical devices analytical instrumentation semiconductor manufacturing and more The Brooks product you have just received is of the highest quality available offering superior performance reliability and value to the user It is designed with the ever changing process conditions accuracy requirements and hostile process environments in mind to provide you with a lifetime of dependabl...

Page 4: ...Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 5: ...llation 2 2 2 6 In Line Filter 2 4 2 7 Electrical Interfacing 2 5 Section 3 Operation 3 1 Theory of Operation 3 1 3 2 Operating Procedure 3 2 3 3 Zero Adjustment 3 2 3 4 Calibration Procedure 3 3 3 5 Response Flow Output Signal 3 6 Section 4 Maintenance 4 1 General 4 1 4 2 Troubleshooting 4 1 4 3 Sensor Tube 4 4 4 4 Disassembly and Assembly 4 4 4 5 Use of the Conversion Tables 4 6 4 6 Restrictor S...

Page 6: ...nnections 3 4 3 3 Adjustment Potentiometer Location 3 4 3 4 Fast Response Adjustment 3 4 4 1 Restrictor Element Assembly 4 10 4 2 Restrictor Orientation in Meter Body 4 10 5 1 Model 5861E Parts Drawing 5 2 Tables Table Page Number Number 2 1 Recommended Filter Size 2 4 4 1 Bench Troubleshooting 4 2 4 2 Sensor Troubleshooting 4 2 4 3 Conversion Factors Nitrogen Base 4 7 4 4 Restrictor Selection Gui...

Page 7: ... widely in the Semiconductor as well as many other industries where manual electronic or computer controlled gas handling occurs The Model 5861E consists of two basic units a flow sensor and an integral electronic signal control system This combination produces a stable gas flow indication which eliminates the need to continuously monitor and compensate for changing gas pressures and temperatures ...

Page 8: ...0 C range Pressure Sensitivity 0 03 per PSI up to 200 PSIG Power Supply Sensitivity 0 09 full scale per power supply voltage variation Output Signal 0 to 5 Vdc into 3000 ohms or greater load Maximum ripple 3 mV Leak Integrity 1 x 10 9 atmosphere scc sec Helium Power Requirements 15 Vdc 5 at 35 mA dc 15 Vdc 5 at 35 mA dc 1 05 watts power consumption Materials of Construction Fittings and Transducer...

Page 9: ... Brooks Instrument Brooks Instrument Neonstraat 3 1 4 4 Kitasuna Koto Ku 6718 WX Ede Netherlands Tokyo 136 0073 Japan P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 318 549 309 E mail BrooksEu BrooksInstrument com 2 2 Recommended Storage Practice If intermediate or long term storage is required for equ...

Page 10: ...P O Box 428 Tel 011 81 3 5633 7100 6710 BK Ede Netherlands Fax 011 81 3 5633 7101 Tel 31 318 549 300 Email BrooksAs BrooksInstrument com Fax 31 318 549 309 E mail BrooksEu BrooksInstrument com Also completion of Form RPR003 1 Brooks Instrument Decontamination Statement as well as a Material Safety Data Sheet MSDS for the fluid s used in the meter is required before any Brooks Personnel can begin p...

Page 11: ...pply Voltage Common Grn Blk 10 0 5 Volt Signal Common Org Blk 11 5 Volt Reference Output Command Pot CW Blu Blk 12 Valve Override Blk Wht 13 Not Used Red Wht 14 Chassis Ground Grn Wht 15 Remote Transducer Input Blu Wht Factory Activated Option These connections are used for the 5850E and 5851E Mass Flow Controllers Make no connections to these pins NOTE 1 Cable shield tied to chassis ground in met...

Page 12: ...er than the original factory calibration see data sheet will result in a 0 5 maximum full scale shift after re zeroing e When installing Flowmeters be aware that sharp abrupt angles in the system piping directly upstream of the controller may cause a small shift in accuracy If possible have at least 10 pipe diameters of straight tubing upstream of the Model 5861E Mass Flowmeter 2 6 In Line Filter ...

Page 13: ...re several functions on the printed circuit board which are not used by the Model 5861E Avoid making connections marked in Figure 2 2 which are marked Also the plug in jumpers on printed circuit board are not used by the Model 5861E and have no effect on performance The following minimum electrical connections must be made for new installations Chassis Ground 0 5 Volt Signal Common 0 5 Volt Signal...

Page 14: ...2 6 Model 5861E Section 2 Installation Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 15: ...s flow The equation is ΔT A P Cp m Where ΔT temperature difference T2 T1 O K Cp specific heat of the gas at constant pressure kJ kg O K P heater power kJ s m mass flow kg s A constant of proportionality S2 O K2 kJ2 A bridge circuit interprets the temperature difference and a differential amplifier generates a linear 0 5 Vdc signal directly proportional to the gas mass flow rate The flow restrictor...

Page 16: ...one are found refer to the re zeroing procedure in Section 3 3 d Open valve to allow flow to pass through the meter Monitor the flow output signal 3 3 Zero Adjustment Each Model 5861E is factory adjusted to provide a 0 10mVdc signal at zero flow After initial installation and warm up in the gas system the zero flow indication may be other than the factory setting This is primarily caused by change...

Page 17: ...the potentiometer This will provide a rough adjustment of this circuit and make the flow signal stable for calibration b Connect the DVM positive lead to the 0 5V signal output pin 2 D connector refer to Figure 3 2 and the negative lead to circuit common TP4 Adjust the zero potentiometer for an output of 0mV 2mV c Increase the flow rate until the flow signal output equals 5 000V Connect the DVM po...

Page 18: ...tallation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Figure 3 2 Model 5861E Calibration Connections Figure 3 3 Adjustment Potentiometer Location Figure 3 4 Fast Response Adjustment Note Not used for a 5861E ...

Page 19: ...in step g x 0 450 volts Example Error 1 5 TP2 correction voltage 1 5 x 0 450 0 675 volts New TP2 voltage 0 volts 0 675 0 675 volts i Adjust flow rate for a flow signal output of 100 5 000V Connect the DVM positive lead to TP2 and the negative lead to TP4 j Adjust the linearity potentiometer for an output equal to the new calculated TP2 voltage Note the output signal should be kept at 5 000 V durin...

Page 20: ... valve will do Keep the length of interconnecting tubing as short as possible between the valves and the Model 5861E since the tubing can have a dampening effect on the flow and the gas may not stop flowing the instant the downstream valve is closed as desired Adjustment of the fast response circuit will not alter the steady state accuracy of the flowmeter as adjusted in Section 3 4 Note This proc...

Page 21: ... for it s original calibration Regulate the Setpoint to 100 flow and adjust the inlet and outlet pressures to calibration conditions Verify that the output signal reaches its full scale value and stabilizes at that value Vary the command voltage over the 1 to 100 range and verify that the output signal follows the Setpoint If possible connect a flow measurement device to monitor the actual flow be...

Page 22: ...fective Sensor Replace Sensor Assembly Refer to Section 4 4 Meter grossly out of calibration Partially clogged sensor Clean sensor refer to the cleaning procedure Flow is higher than indicated Meter grossly out of calibration Partially clogged restrictor Replace restrictor Refer to Section 4 4 Flow is lower than indicated Meter output oscillates Anticipate potentiometer out of adjustment Adjust an...

Page 23: ...ommended to Pins 2 and 10 D connector Refer to Figure 2 2 Apply power and allow the flowmeter to warm up for 45 minutes Do not connect to a gas source at this time Observe the output signal and if necessary perform the zero adjustment procedure Section 3 3 If the output signal will not zero properly refer to the sensor troubleshooting section and check the sensor If the sensor is electrically func...

Page 24: ...ay be removed by soaking the internal parts in solution of 5 of hydrofluoric acid 5 parts hydrofluoric acid HF 95 parts water H2 O followed by Freon TF 5 Sintered type restrictor elements should be replaced as it is not always possible to adequately remove deposits from them Wire mesh and A C L F E type restrictor elements can be cleaned in an ultrasonic bath Refer to Section 4 7 for the correct r...

Page 25: ... sensor lead wire to sensor assembly junction when removing the sensor connector from the PC board If the sensor lead wires are stressed an open in the sensor wiring could result 2 Unplug the sensor connector from the PC Board Remove the two screws securing the bracket 26 and PC Board 28 Remove the bracket and PC Board 3 Remove the two allen nuts 9 using an 1 8 allen wrench and washers 10 securing...

Page 26: ...assembly into body with an arbor press as it may damage the O ring 4 Place the end block O ring 6 in position and install end block 3 with the 4 hex socket screws 5 Tighten these screws to 34 inch lbs Do not over tighten 5 Install O rings 19 on inlet and outlet fittings Install fittings into body 1 and end block 3 6 Press the lubricated sensor O rings 8 into the flow meter body 1 7 Install the sen...

Page 27: ...output reading by the ratio of the gas factor for the desired gas to the gas factor for the calibration gas Actual gas Output x factor of the new gas flow rate reading factor of the calibrated gas Example The flowmeter is calibrated for 100slpm Nitrogen The desired gas is Carbon Dioxide The flowmeter output reading is 75 3 750 volts What is the actual carbon dioxide flow Actual CO2 75 slpm x 773 f...

Page 28: ...0 1 985 4 912 Cyanogen CN 2 0 498 1 366 2 322 Cyanogen Chloride CLCN 0 618 1 480 2 730 Cyclobutane C4 H8 0 387 1 413 2 491 Cyclopropane C3 H6 0 505 1 224 1 877 Deuterium D2 0 995 0 379 0 177 Diborane B2 H6 0 448 1 000 1 235 Diboromodifluoromethane f 12B2 CBr2 F2 0 363 2 652 8 768 1 2 Dibromotetrafluoroethane f 114B2 C2 Br2 F4 0 215 2 905 10 53 Dichlorodifluoromethane f 12 CCL2 F2 0 390 2 099 5 492...

Page 29: ...2 1 259 1 964 Octofluorocyclobutane C4 F8 0 169 2 672 8 933 Oxygen O2 0 988 1 067 1 429 Oxygen Difluoride OF2 0 672 1 388 2 402 Ozone O3 0 738 1 310 2 138 Pentafluorethane f 125 C2 HF5 0 287 2 070 5 360 Pentane n Pentane C5 H12 0 212 1 605 3 222 Perchloryl Fluoride CLO3 F 0 448 1 905 4 571 Perfluorobutane C4 F10 0 738 2 918 10 61 Perfluoro 2 Butene C4 F8 0 268 2 672 8 933 Perfluoromethyl vinylethe...

Page 30: ...e urged to review Section 3 1 Theory of Operation If the restrictor assembly has been contaminated with foreign matter the pressure drop vs flow characteristics will be altered and it must be cleaned or replaced It may also be necessary to replace the restrictor assembly when the mass flowmeter is to be calibrated to a new full scale flow rate Restrictor assembly replacement should be performed on...

Page 31: ...micron restrictor elements Note If the Nitrogen equivalent flow is between two sizes choose the larger size In the previous example the restrictor should be sized for a 60 24 slpm flow rate P N S 613 E 528 BMT If a restrictor assembly is being replaced because the original has become contaminated the original may be used as a guide to select the replacement assembly The porosity of the original el...

Page 32: ...5861E Section 4 Maintenance Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Figure 4 1 Restrictor Element Assembly Figure 4 2 Restrictor Element Orientation in Meter Body ...

Page 33: ...ation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 5 1 General When ordering parts please specify Brooks Serial Number Model Number Part Description Part Number Quantity Refer to Figure 5 1 and Tables 5 1 and 5 2 ...

Page 34: ...5 2 Model 5861E Section 5 Parts List Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Figure 5 1 Model 5861E Parts Drawing ...

Page 35: ...375 B 906 QTA 2 for fittings Buna 375 B 906 SUA 2 Kalrez 375 B 906 TTA 26 1 Can Mtg Bracket Block 079 Z 135 EAA 27 5 Screws Cover to Block 753 L 056 AWZ 28 1 PCA D Conn S 097 Y 847 AAA 35 1 026 O ring Viton 375 B 026 QTA 1 for Header assy Buna 375 B 026 SUA 1 Kalrez 375 B 026 TTA 37 Restrictor Assembly Components Refer to Section 4 6 for sizing 40 1 Silkscreened Cover 219 Z 490EA 41 1 Blinding Str...

Page 36: ...ws convenient access to all signals for easy Contains troubleshooting of system 1 O ring Removal Tool 1 Potentiometer Adjustment Tool 1 Break Out PC Board 1 Ball Point Allen Wrench 1 5 foot Extension Cable 1 Phillips Screw Driver 1 Terminal PC Board 1 Nut Driver for Orifice 1 Restrictor Removal Tool 1 Common Screw Driver 5851 5861E Header Removal Tool P N S 817 Z 036 AAA 5861E O ring Kit P N S 375...

Page 37: ...lig hilsen Deutsch Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Nachtrag zur Bedienungsanleitung Referenz CE Zertifizierung für Massedurchflußgeräte Datum Januar 1996 Nach erfolgreichen Tests enstprechend den Vorschiften der Elektromagnetischen Verträglichkeit EMC Richtlinie 89 336 EEC erhalten die Brooks Geräte elektrische elektronische Komponenten das CE Zeichen Bei der Aus...

Page 38: ...refer to the enclosed Instruction Manual Español Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Asunto Addendum al Manual de Instrucciones Referencia Certificación CE de los Equipos de Caudal Másico Fecha Enero 1996 Los equipos de Brooks eléctricos electrónicos en relación con la marca CE han pasado satisfactoriamente las pruebas referentes a las regulaciones de Compatibilidad Electro ...

Page 39: ... label CE Qualité du câble des presse étoupes et des connecteurs Brooks fournit des câbles de haute qualité répondant aux spécifications de la certification CE Si vous approvisionnez vous même ce câble vous devez utiliser un câble blindé à 100 Les connecteurs D ou de type circulaire doivent être reliés à la terre Si des presse étoupes sont nécessaires ceux ci doivent être métalliques avec mise à l...

Page 40: ...an 100 om te voldoen aan de CE certificering Het scherm moet worden verbonden met aarde Voor pin configuraties a u b verwijzen wij naar het bijgesloten instruktie handboek Hoogachtend Italiano Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Oggetto Addendum al manuale di istruzioni Riferimento Certificazione CE dei misuratori termici di portata in massa Data Gennaio 1996 Questa strument...

Page 41: ...iktig pinne i pluggen for å møte CE sertifiseringskrav For tilkobling av medleverte plugger vennligst se håndboken som hører til utstyret Vennlig hilsen Português Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Assunto Adenda ao Manual de Instruções Referência Certificação CE do Equipamento de Fluxo de Massa Data Janeiro de 1996 O equipamento eléctrico electrónico Brooks com a marca CE ...

Page 42: ... maadoitettu Nastojen liittäminen katso liitteenä oleva manuaali Ystävällisin terveisin Svensk Brooks Instrument 407 West Vine St Hatfield PA 19440 U S A Subject Addendum to the Instruction Manual Reference CE certification of Mass Flow Equipment Date January 1996 Brooks elektriska elektronik utrustning som är CE märkt har testats och godkänts enligt gällande regler för elektromagnetisk kompabilit...

Page 43: ...Installation and Operation Manual X TMF 5861E MFM eng Part Number 541B107AAG November 2008 Model 5861E THIS PAGE WAS INTENTIONALLY LEFT BLANK ...

Page 44: ...is limited warranty is the only warranty made by Seller and can be amended only in a writing signed by an authorized representative of Seller BROOKS SERVICE AND SUPPORT Brooks is committed to assuring all of our customers receive the ideal flow solution for their application along with outstanding service and support to back it up We operate first class repair facilities located around the world t...

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