Operation
MagnaTran 7.1 User’s Manual
Wafer Presence Sensors-Extend and Retract
MN-003-1600-00
Brooks Automation
6-32
Revision 2.2
Wafer Presence Sensors-Extend and Retract
Overview
The MagnaTran 7 robot provides an optically isolated interface for discrete external
sensors. The firmware of the robot will accept sensor inputs and use them to verify:
•
wafer status
•
determine the success of any wafer transfer operations
•
collect servo position data for all three axes of the robot
NOTE:
Each sensor is configured for use with a specific arm. Any wafer handling per-
formed with a different arm will be ignored by that sensor.
In addition to the wafer present data provided by the sensor interface, the position of
the robot's radial (R), rotational (T), and vertical (Z) motion servos may be recorded
when the state of any specified sensor changes. Once this positional data is recorded
it may be reviewed at any time by issuing the appropriate software command.
The Multiple Sensor Interface accepts inputs from discrete external sensors, providing
full optical isolation of all signals and multiplexing of data for use by the robot. The
Multiple Sensor Interface has been designed to monitor wafer handling, servo data
collection, and signal buffering.
High speed parallel I/O enables direct interfacing to substrate sensors and other
modules such as slot valves. Real time information enables position referencing by
leading and trailing edge sensing of moving components. Dynamic sensing in user
specified radial positions enable independent wafer sensing on Leapfrog arms. Wafer
presence may be referenced in macro sequences for safety.
