BRONKHORST FLOW-SMS Series Instruction Manual Download

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Instruction manual

FLOW-SMS series

Surface Mount System for Digital

Mass Flow / Pressure

Meters and Controllers

Doc. no.: 9.17.057K Date: 07-04-2020

ATTENTION:

Please read this instruction manual carefully before installing and operating the instrument.

Not following the guidelines could result in personal injury and/or damage to the equipment.

Summary of Contents for FLOW-SMS Series

Page 1: ...Mass Flow Pressure Meters and Controllers Doc no 9 17 057K Date 07 04 2020 ATTENTION Please read this instruction manual carefully before installing and operating the instrument Not following the guidelines could result in personal injury and or damage to the equipment ...

Page 2: ...l carrier must be notified at once regarding his liability if so required At the same time a report should be submitted to your distributor Carefully remove the equipment from the packing box Verify that the equipment was not damaged during shipment Should the equipment be damaged then the local carrier must be notified at once regarding his liability if so required At the same time a report shoul...

Page 3: ...bronkhorst com files corporate_headquarters sales_conditions en_general_terms_of_sales pdf The warranty includes all initial and latent defects random failures and undeterminable internal causes It excludes failures and damage caused by the customer such as contamination improper electrical hook up physical shock etc Re conditioning of products primarily returned for warranty service that is partl...

Page 4: ...2 13 7 Needle valves 14 2 13 8 Pneumatic operated shut off valves 14 2 13 9 Pneumatic operated shut off 3 2 valves 15 2 13 10 Filter modules 15 2 13 11 Blind Flow plates 16 2 14 Model key 17 3 BASIC OPERATION 18 3 1 General 18 3 2 Analog operation 18 3 3 Manual interface micro switch and LED s 18 3 4 RS232 FLOW BUS operation 18 3 5 Fieldbus operation 20 4 ADVANCED OPERATION 21 4 1 Using mass flow ...

Page 5: ...em will be assembled tested and packaged in a cleanroom Example 1 2 References to other applicable documents FLOW SMS instruments have modular instruction manuals consisting of FLOW SMS series document nr 9 17 057 Operation instructions digital instruments document nr 9 17 023 Optional fieldbus interface descriptions FLOW BUS interface document nr 9 17 024 PROFIBUSDP interface document nr 9 17 025...

Page 6: ... conditions stipulated by the customer with a minimum of 8 bar Pressure Testing Sticker Each instrument is helium leak tested to at least 2 10 9 mbar l s Helium outboard 2 3 Check piping For reliable measurement always make sure the fluid stream is clean Use filters to assure a moisture oil and particle free gas stream Recommended pore size 7 µm If back flow can occur a downstream filter and a che...

Page 7: ... than horizontal zeroing of the instruments is advised The zeroing procedure is described in paragraph 2 10 Avoid installation in close proximity of mechanic vibration and or heat sources 2 5 Leak check Check the system for leaks before applying fluid pressure Especially if toxic explosive or other dangerous fluids are used 2 6 Electrical connection Electrical connections must be made with standar...

Page 8: ...ass Flow or Pressure Meter Controller to the power supply readout unit using a cable with 9 pin sub D connector 2 7b Digital Fieldbus operation For this procedure see description for RS232 or the applicable fieldbus operation RS232 connection cable 7 03 366 enables to use free Bronkhorst tooling programs for Windows 2 8 Multi functional switch operation Using the 2 colored LEDs and the switch on t...

Page 9: ...ease the micro switch The zeroing procedure will start at that moment and the green LED will blink fast The zeroing procedure waits for a stable signal and saves the zero If the signal is not stable zeroing will take long and the nearest point to zero is accepted The procedure will take approx 10 seconds When the indication is showing 0 signal and the green indication LED is burning continuously a...

Page 10: ...ets and hexagon bolts before reassembling functional modules FLOW SMS manifold components base bodies distribution and mixing chamber etc should only be removed or replaced by qualified personnel 2 13 3 Flow modules General information The gas flow sensor operates on a principle of heat transfer by sensing the temperature difference along a heated section of a capillary tube Part of the total flow...

Page 11: ...nector Now the Flow module has to be tested for leakage and function Available Mass Flow Controller Mass Flow Meter modules Type Type Nominal Range Description Controller MFC Meter MFM Range based on N2 1 bara FS 200CV FS 100C 005 0 06 3 up to 0 18 9 mln min FS 201CV FS 101C 020 0 16 8 up to 0 6 30 mln min FS 201CV FS 101C 050 0 4 20 up to 1 5 75 mln min FS 201CV FS 101C 100 0 8 40 up to 3 150 mln...

Page 12: ...oid dust Replace the Pressure module and tighten the M4 bolts with hexagon head by turning clockwise tighten crosswise with 2 0 Nm Replace the electrical connector Now the Pressure module has to be tested for leakage and function Available Pressure Controller Pressure Meter modules Pressure Module Description Model number Function Smallest range Highest range PS 502C Meter 2 100 mbar 0 2 10 bar PS...

Page 13: ...ge and function 2 13 6 Toggle valves Removal Ensure that the system is pressure less before taking the toggle valve apart Loosen the 4 bolts with hexagon head counter clockwise to release the toggle valve Replacement Replace the gaskets AS 007 and AS 017 Viton EPDM or Kalrez All wetted parts have to be absolutely clean don t use oil or grease and avoid dust Replace the toggle valve centre before t...

Page 14: ...re Minimal 3 bar g Maximal 9 bar g Removing Ensure that the system is depressurised before taking the pneumatic shut off valve apart Remove the actuating pressure tubing and loosen the 4 bolts with hexagon head counter clockwise to release the valve Replacing Replace the gasket AS 007 and AS 017 Viton EPDM or Kalrez All wetted parts have to be absolutely clean don t use oil or grease and avoid dus...

Page 15: ...ssy by loosen the 4 bolts with hexagon head counter clockwise to release the assy For disassembling the filter use a needle nose pliers place it in the bottom part and turn the part counter clockwise for release the filter Replacement Replace the gaskets AS 007 AS 017 and when necessary AS 012 Viton EPDM or Kalrez When necessary replace the filter cup cartridge These can be ordered separately beca...

Page 16: ...roller meter with M4 2 0 Nm Now the Blind Flow plate has to be tested for leakage and function A Flow plate provides a flow path in case where a module is removed temporarily or continuously from a Base Body for a valve filter or a Base Body for a meter controller A Blind plate blocks the flow in case where a module is removed temporarily or continuously from a Base Body for a valve filter or a Ba...

Page 17: ...1CV FS 202CV EL PRESS P sensor PS 502C EL PRESS P sensor PS 702C adapter none actual models Nominal range option code pcb type A B Digital instrument NC with Analog I O Digital instrument NO with Analog I O D Digital instrument NC with DeviceNet E Digital instrument NO with DeviceNet I Digital instrument NC with EtherNet IP J Digital instrument NO with EtherNet IP K Digital instrument NC with CANo...

Page 18: ...ers only The type of installed analog interface 0 5 V 0 10 V 0 20 mA or 4 20 mA can be found in the model key of the instrument Refer to paragraph 2 14 Setpoints below 2 of the full scale will be interpreted as 0 setpoint When operating the instrument through the analog interface it is possible to connect the instrument simultaneously to RS232 for reading changing parameters e g controller respons...

Page 19: ...ed value of the flow controller and when the measured value changes it will be automatically updated in the Excel spreadsheet Examples of DDE client applications FlowPlot FlowView MS Office LabView Intouch Wizcon The FlowDDE server also offers a lot of test facilities and user adjustable settings for efficient communication with the connected flow pressure meter or controller How to setup a DDE li...

Page 20: ...s operation Instructions for the range of optional fieldbus interfaces for digital Bronkhorst instruments are separately described in the following instruction manuals Multibus manuals see document numbers 9 17 024 for FLOW BUS 9 17 025 for PROFIBUS DP 9 17 026 for DeviceNet 9 17 027 for RS232 9 17 035 for Modbus ASCII RTU TCP 9 17 063 for EtherCAT 9 17 095 for PROFINET 9 17 131 for CANopen 9 17 1...

Page 21: ...ln min to 2 ln min The 100 output is not affected Changing the capacity from 2000 mln min to 1000 mln min effects that the instruments full scale capacity 100 output changes to 1000 mln min The instrument is reranged 4 1 3 Conversion factor calculation using Fluidat software Bronkhorst gathered the physical properties of over 600 fluids in a database called FLUIDAT Application software such as FLO...

Page 22: ...ntrollers must be 1 5 times larger than total Kv value of the controllers Otherwise the pressure drop over the shut off valve will disturb the control performance Diameter mm Kv Normally closed p max bard Normally opened p max bard 0 05 0 07 0 10 0 14 0 20 0 30 0 37 0 50 0 70 1 00 1 30 1 50 1 70 2 00 4 33 x 10 5 8 48 x 10 5 1 73 x 10 4 3 39 x 10 4 6 93 x 10 4 1 56 x 10 3 2 37 x 10 3 4 33 x 10 3 8 ...

Page 23: ... that fluid pressure is to be applied in order to check behaviour If there should be suspicion of leakage in case of a gas unit do not check for bubbles with a leak detection liquid under the cover as this may lead to a short circuit in the sensor or p c board 5 2 LED indication The red LED on the instrument gives error or warning information Red LED Time Indication Off Continuously No error Flash...

Page 24: ...ens Sensor capillary failure Return to factory Maximum output signal Leakage of control valve Set control mode to valve close and check if it closes Sensor capillary failure Return to factory Output signal much lower than setpoint signal or desired flow Incorrect type of gas or too low inlet pressure Test instrument on conditions for which it was designed Oscillation Supply pressure diff pressure ...

Page 25: ...t you selecting the right product for your application Contact sales by e mail sales bronkhorst com For after sales questions our Customer Service Department is available with help and guidance To contact CSD by e mail support bronkhorst com No matter the time zone our experts within the Support Group are available to answer your request immediately or ensure appropriate further action Our experts...

Page 26: ...ake sufficient precautionary measures to safeguard the staff in their repair department Take proper care of packing if possible use the original packing box seal instrument in plastic etc All instruments must be dispatched with a completely filled in declaration on contamination form Instruments without this declaration will not be accepted Note If the instruments have been used with toxic or dang...

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