Alcatel C1 User Manual Download Page 62

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Summary of Contents for C1

Page 1: ...5 to 21 m3 h PASCAL Series I SO C1 C2 Series ROTARY VANE PUMPS User s manual High Vacuum Technology I II II I I I Ii I r ...

Page 2: ...s In a world where adapting to customer requirements quality quick response and service are operational standards Alcatel has equipped itself with exceptional resources in R D manufacturing and quality in order to be able to reach its goal total quality Alcatel High Vacuum Technology has been ISO 9001 certified since 1993 Alcatel s commitment to supplying high quality products has contributed to i...

Page 3: ...tc VARIOUS SEMICONDUCTOR PROCESSES Welcome Dear customer You have just bought an Alcatel rotary vane pump We would like to thank you and are proud to count you among our customers This product is a result of experience acquired over many years by Alcatel in the design of rotary vane pumps We sug gest that you 1 _t1i read this manual particularly the chapter on installation and operation before you...

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Page 5: ...2 Operation Precautions Operating temperature Before starting up the pump Start up Operation of gas ballast Particular uses Oxygen pumping High pressure pumping and cycling Maintenance Precautions Troubleshooting and corrective actions Maintenance frequency Draining the oil Flushing the pump Change of type of oil Replacement of front shaft seal Tools and consumable products Disassembling the pump ...

Page 6: ...nstrumentation and R D Mass spectrometer electronic microscopes GC MS LC MS gas analyzers leak detectors sterilizers etc C1 series Pumps suited to the pumping of corrosive gases 54 R O laboratories freeze drying pumping of solvents etc C2 series Pumps with increased resistance to meet the requirements of the more aggressive processes of the semiconductor industry Hl series Ion implantation sputter...

Page 7: ... ballast control 8 Inlet end fitting 3 Base 9 Exhaust end fitting 4 Oil level sight glass 10 Fold away handle 5 Filling plugs 11 Electric motor 6 Draining plug 12 IEC electric socket The inlet and exhaust end fittings are PNEUROP ISO KF standardized They are fitted vertically on the pump at delivery but can be positioned on the horizontal openings if required by operating conditions They can also ...

Page 8: ...et orifice an increasing space is formed into which the gas from the chamber to be evacuated expands When the second vane passes the space is closed The gas trapped in the space between the two vanes is transferred to the exhaust orifice as the rotor rotates The space communicates with the exhaust which is fitted with a valve the gas is compressed until the safety valve is opened The gas is expell...

Page 9: ...sure stage and discharged through the high pressure HP valve In Low pressure stage High pressure stage Application Two stage rotary vane pumps are the best choice for application requiring an ultimate vacuum as low as 10 3 Torr 1 33 x 10 3 mbar Note when operating a two stage vane pump continously greater than half an hour above 1 0 Torr the unit should be equipped with an oil mist eliminator and ...

Page 10: ...pumped gas is compressed beyond its saturated vapour pressure in the compression phase and can condense impairing pump performance The gas ballast can be used to inject a certain quantity of air neutral or dry COMPRESSION gas into the last stage of the pump during the compression phase so that the partial pressure of the pumped gas is less than its saturated vapour pressure at the temperature of t...

Page 11: ... 7 5 10 5 1 10 4 Pa 1 10 2 Torr mbor 1 5 10 3 2 10 3 Pa 2 10 1 Torr mbor 7 5 10 3 1 10 2 Pa 1 I 0 83 0 950 0 950 mbor 35 25 20 15 12 10 Po 35 102 25 102 2 103 15 102 12 102 1 103 g h 120 110 125 100 110 100 kg Ibs 25 55 26 57 27 59 5 ISO KF DN 25 Unit 2005 SO 2010 SO 2015 SO Hz 50 1 60 50 1 60 50 1 60 2 2 2 rpm 1500 1800 1500 1800 1500 1800 m3 h 5 4 6 5 9 7 11 6 15 18 cfm 3 8 6 8 10 6 m3fh 4 8 5 7...

Page 12: ... 60 2 1500 1800 5 4 6 5 3 8 4 8 5 7 3 4 0 83 25 55 35 25 35 102 25 102 120 110 2010 C2 50 I 60 2 1500 1800 9 7 11 6 6 8 8 5 10 2 6 0 950 26 57 2010 C1 2015 C1 50 I 60 50 I 60 2 2 1500 1800 1500 1800 9 7 11 6 15 18 6 8 10 6 8 5 10 2 12 5 15 6 8 8 7 5 10 5 1 10 4 1 10 2 1 5 10 3 2 10 3 2 10 1 7 5 10 3 1 10 2 1 0 950 0 950 26 57 27 59 5 20 15 12 10 2 103 15 102 12 102 1 103 125 100 110 100 DN 25 2015...

Page 13: ... Cl l i qiiehcy Hz 50 I 60 50 I 60 50 1 60 50 I 60 Number of tages 1 1 1 1 R9ia ti9 pe 9 rpm 1500 1800 1500 iSOO 1500 1800 1500 1800 Nominal flow rate m3 h 5 4 6 5 9 7 11 6 15 18 20 7 24 8 cfm 3 8 6 8 10 6 14 6 FI9f rati PneQtop method m3 h 4 8 5 5 8 5 10 12 5 15 16 5 20 cfm 3 2 5 8 8 8 11 8 Uiti t pr s re Torr mbar 3 75 10 2 5 10 2 with gas ballast closed Pa 5 Uitin1ate prd sure Torr mbar 3 4 5 2...

Page 14: ...37 45 37 t 1r r 1 Ifwei 1 ir I c J I ffi 0 r 1 0 t c N c N II 101 r N II 0 2 95 5 98 J 1 II I I 226 t 141 259 164 B 237 4 x 8 mm diam holes Pump type 1005 1 1010 1 2005 1015 1 2010 1021 1 2015 2021 9 229 9 8 249 10 6 270 11 5 291 7 183 8 204 8 9 225 9 7 246 4 55 115 5 15 4 136 5 14 55 115 5 6 2 157 5 15 4 136 5 7 03 178 5 16 2 157 5 7 03 178 5 J ...

Page 15: ...m entering the pump or traps condensable vapors at the exhaust Prevents dust particles larger than 6 microns from entering the pump Protects the pump against condensable vapours Prevents oil from backstreaming into pumped chamber Prevents oil backstreaming when pumping in a clean vacuum Remote control for gas ballast Allows the gas ballast to be closed when the pump is off ensuring that the pump i...

Page 16: ...64 I I I I i 1 I ...

Page 17: ...the pump with oil during storage For this fill the pump and run it at ultimate vacuum inlet orifice blocked for approximately 1 hour in order to lubricate all the parts of the functional block see page 76 Then stop the pump and store it with the inlet and exhaust orifices sealed clamping ring centring ring plug etc The shaft should be rotated by hand or by starting the pump every six months follow...

Page 18: ...t with mains filter frequency converter monitor etc Vane roughing pumps use lubricants it is recommended to request information from the manufacturer on the safety data sheets concerning the product used Our pumps are tested in the factory with ALCATEL 120 oil or Alcatel 119 for the USA Alcatel 113 oil for the C2series It is recommended to use the same oil during operation If changing the type of ...

Page 19: ...rom 0 1 to 0 2 bar In Exh Condensate trap Vapor pumping procedure Valve off the pump from the system and increase the pump temperature 30 minutes with gas ballast see page 76 Start pumping and check the oil level the level drops oil is being lost the level rises condensates have been added to the oil After pumping regenerate the oil using gas ballast if it is cloudy or discoloured if the level is ...

Page 20: ...he pump temperature and the quantity of air introduced by the gas ballast Thus for high vapour levels in a system the single stage pump is more suitable However when not pumping vapours its ultimate pressure is higher Care should be taken to limit the inlet pressure of the pump to its maximum admissible water vapor pressure with the pumped product This is obtained by reading the pump characteristi...

Page 21: ...heats up These noises will no longer be heard when the fill plug has been replaced Under normal temperature conditions the oil circuit should start less than 1 minute after start up this time may vary with the type of oil and its degree of contamination Using the gas ballast to decontaminate the pump s oil to accelerate heating It is normal for the oil level to change as can be seen through the oi...

Page 22: ...start up before switching on the motor check that the oil bath temperature is greater than 53 F 12 q The ambient operating temperature for the pump must be between 53 F 12 C and 113 F 45 C Under these conditions the stabilized pump temperature at the front of the oil case will be between 140 F and 158 F 60 and 700 q depending on operating conditions Special case Synthetic oils Synthetic oils are m...

Page 23: ...blocked Operation at high pressure P 22 Torr 30 mbar Excess pressure at exhaust Motor i over voltage or Motor in short circuit oiT ont Tnated p not prepared for the Oi I I used or oil unsuitable _ _ _ _ _ __ _ Corrective actions Check the installation i 1 1 Replace I Drain and fill with a new oil 1 D i n 1T s h r e1i n ith r j oil j Check the pump configuration or the type of oil Check the power S...

Page 24: ...h oil recovery e 1 Close 2 Use a condensate collector Check the assembly and replace the seals if necessary open ______ S Relopslaec e l l Safety va _da _ J ged I kb em _ f e a embly ___ ___ _______ ________________ ___1 _ r_I _o c_ _ _ _ _ a I h O 1 1 1 Oil in base I Oil case and frame cleaned I Remove the base and clean I I poorly during reassembly OiT case seaTPi hecr F onTseaida maged orfelt s...

Page 25: ...ods the oil should be changed at intervals of 6 months to a maximum of 1 year oil may become sticky Note Every pumping operation is different This oil must therefore be changed at intervals adapted to each specific application The use of certain accessories see page 63 can reduce the frequency of these maintenance operations Thedraj in ope ation plac s e con in ted pumping circuit in mcomr1umcatio...

Page 26: ...s Compatible oils Mineral oil can be replaced by another type of mineral oil Simply flush the pump see above using the new oil and fill the pump see page 68 Mineral oils are also compatible with mineral based synthetic oils see page 67 Incompatible oils This is the case when for example a mineral oil is replaced by a synthetic oil e g ALCATEL 120 by ALCATEL 113 Synthetic oils are considered to be ...

Page 27: ...an the key and the support washer With a screwdriver remove the shaft sleeve and its O ring Unscrew the two seal holder fastening screws and remove the seal holder Remove the seal from the seal holder as described on page 95 and discard it Clean the metal parts Inspect the wearing side of the shaft sleeve after cleaning the sleeve may show a perfectly normal trace of rubbing caused by polishing Sh...

Page 28: ...ar period under normal operating conditions PU lP modtlls Part Nc Pump models Part No 2010 C2 104614 2005 SO 103902 2015 C2 104615 2010 SO 103903 2021 C2 104616 2015 SO 103904 1005 Cl 104617 2021 SO 103905 1010 Cl 104618 2005 I 103906 1015 Cl 104619 2010 I 103907 1021 Cl 104620 2015 I 103908 1005 SO 104622 2021 I 103909 1010 SO 104623 2005 Cl 104976 1015 SO 104643 2010 Cl 104977 1021 SO 104644 201...

Page 29: ... Disassembling the bubbler C2 pump Il Remove the gas ballast cover 2 screws the adjustment button the spring and the sleeve Remove the tank feed through 2 screws and its seal I JJ Remove the sight glass cover Remove the plate the sight glass and the O ring rn Remove the oil case and its O ring after removing the 4 fastening screws rg Disconnect the nitrogen inlet Remove the nitrogen inlet and disc...

Page 30: ...bled without modifying the setting Remove the spinner cam 8 by removing the circlip Do not disassemble the nozzle to clean it During the reassembly check that it is not blocked by sending a jet of compressed air through it mRemove the cover from the oil pump 9 Release the cylinder 15 equipped with the washer piston and spring Release the stop valve 10 from its housing 1 i 1 1 Unscrew the seat of t...

Page 31: ...HP stator and the rotor rotor two stage pumps Disassembling the intermediate flange two stage pumps Disassembling the LP stator and the rotor Release the rotor and the vanes Insert two screwdrivers in the notches and release the flange in the axis Remove the LP stator Remove the rotor and the vanes equipped with the springs J_ _ __I_I_ 93 I I I I I I ...

Page 32: ...using a cloth Dry the components in the air or with compressed air After use in non perfluorinate synthetic or mineral oil clean the metal components with a solvent such as alcohol and proceed as follows Clean when cold by dipping or using a cloth Dry the components in the air ndustrial washing solutions can also be used The cleaning operation should be followed by vacuum drying Cleaning the oil l...

Page 33: ... using a screwdriver resting on the plate or washer so as not to damage the seal housing The seal housing and the seal lip are lubricated with the lubricant used in the pump The flange is resting on a flat surface According to the direction of assembly 1lJ l 4__ specific to each pump the seal is fitted on the assembly mandrel Using a press or a hammer the seal is inserted in its housing They are f...

Page 34: ...l on the tube and connect the assembly to the frame Position the tube attachment on the pin and tighten the nut on the rear flange maximum clamping torque 0 8 mdaN 5 8 ft Ibs In the sleeve fit the ball and the spring and fasten the connector Then fasten the assembly on the side of the frame SO series pump except 1015 SO 1021 SO Offset the spinner cam 1 by pressing on the blades Turn the shaft up t...

Page 35: ...ing it on the gas ballast tube Assemble using the screws Equip the adjustment knob with the sleeve and the spring Posit on the assembly in the cover and secure on the oil case feed through Replace the O ring included in the seal kit Fit the sight glass and assemble with screws clamping torque 0 3 mdaN 2 14 ft Ibs o5 f t iO t fo a c 11r 1hhl ste under stress See page 89 Fit the fan 1 2 sleeve Fit t...

Page 36: ...98 I 1 t I I I I I I 1 ...

Page 37: ...bulleur Oil casing and central housing assembly plan Oil casing and central housing part list Moving part plan C Moving part parts list Oil pump system plan A Oil pump system part list A Oil system plan B Oil system part list B Motor assembly plan M Motor assembly part list M Bubbler system plan Bubbler system part list Gesamtplan Olbehalter und Pumpentrager 150 152 154 Nomenklatur 1 Olbehalter un...

Page 38: ...c o Q c 2 c c _ E E Q 0 I I I Q 0c 0 _ C Q O iii 0 c 0 0 J Q c C Q 0 c J E v C Q Q a O V C C C C C CO E 0 C Q iii 0 CO C C v Q o 9 a 0 0 150 I j I I ...

Page 39: ...chauglassdeckel Olsc 1auglas Dichtung c 3 53 d 63 1 Olbehalier 11 Olbehalter Olbeholter Olbehalter Olbehiilter Olbehalter OlbehiillEir Olbehalter Dichtung c 2 7 d 6 9 Ring R13 Blindstoplen G 3 8 Schroube CHe M6 x20 Unterlegscheibe Dichtung c 3 d 16 5 Dichlung c 2 5 d 33 5 Blindstoplen G 1 8 Schroube FHC M6 x 12 Detkel M30 x 1 3 I 3 I 3 I 3 2 3 2 3 2 3 2 3 4 4 4 4 4 7 4 7 4 7 4 7 1 1 1 2 4 2 4 2 4 ...

Page 40: ...c o Q c 0 2 c c _ E E cu 0 I I I CU OC 0 8 c 0 _ 0 CU c C CU CU E c E u c CU 8 c C e c c c c c 0 0 E C c CU I o c c u CU o 9 a 0 0 152 ...

Page 41: ...12 Eh iafo i ii lIPpPe h SW f 1 Shalt seal 15 x 25 5 x 4 6 i t c 3 i q i F ill i iG c c 1 j 2j J l1 t FIJ f Central housing tr rh u1 RgW i Q65j4 103386 _ Socle Bose 1 1 1 1 1 1 1 1 103506 Iq A6 S a I ni i l 217 i l wi t 2l t 2 7 qJC Vis CHCM6x16 ScrewCHCM6x16 SchraubeCHCM6x16 22 2 2 2 2 2 2 0 TU9 le lct i i G c sJ b I Wf i P9 t O ki 9 W 1Q4 6 f Tube lest d air Gas ballast tube GasbaliasHrohr 06584...

Page 42: ...c o i5 c o i5 c _ E E Q 0 II II II Q OC m c Q m 0 II 0 c _ 0 _ Q c c Q 0 a J E u c Q eQ m 0 0 R c c CO o E m J c_ Q in 0 o0 i c U c o 0 O Q 154 ...

Page 43: ... 52 Ebenso 52 58 Couvercle lest d air asballastdeckel 58 Couvercle lest d air Gasballastdeckel 59 Idem Eb rse 8 L 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 2 1 1 1 1 1 1 1 11 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 I 1 I 1 I 1 1 1 1 1 1 1 1 l 1 1 11 11 2 4 2 4 2 42 4112 4 12 4 12 4 12 4 2 4 2 4 2 4 2 4 2 4 2 4 2 4 2 4 1 1 j 1 1 1 1 I 1 I 1 I 1 1 I 1 I 1 I 1 2 41 2 4 1 2 412 4 112 412 412 4112 412 412 412 ...

Page 44: ... f Q 0 u Q c Q 2 2 e ouE e t C u c 5 2 a u o u _ 0 0 a a C 0 c 0 c Q c a o E CL c CL 156 si Tn ITrfn mmm 1 0 I I l I I l l 1 1 j ...

Page 45: ... f Ventilgehausedeckel W i lt f 1 t Dichtung c 2 7 t14 V 4 t4 1l4 4 li 11 4 1 J 4 l M 14 1 1 4 1 4 1 4 1 1 4 1 4 1 4 1 4 1 4 1 4 T 1141 4 1 14 1 11 t W 4 114 4PV4 3 4 1 1 1 1 1 1 1 1 1 1 1 itJAfji 3 3 1 11 3 W 1 73 rA flJ 1 1 1 1 1 1 1 1 1 1 1 1 1 1 1 iiZiJ i 4 J141 M jV4Iq4 1 74 q rFi4 iI4i Ir 4 l iI ll 4 fii k i I i F 1 tt d 12 1 Ring R9 q Haus ck iffaJter dl ri j i 4 Ebenso 1 Eben o2 r _ 1 2 1 ...

Page 46: ...u c 2 c c c e oU e c C v c I c c Q C v o v _ C 0 Q c Q C c c c c a c e g Q c Q 158 I I I I i C i ...

Page 47: ... 1 1 103881 26 Stator BP lP stator Niederdruckstator 1 1 103882 26 Stator BP LP stator Niederdruckstator 1 1 103883 27 Idem 20 Idem 20 Ebenso 20 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 28 Idem 21 Idem 21 Ebenso 21 1 4 1 4 1 4 1 4 1 4 1 4 1 4 1 4 1 2 1 2 1 2 1 2 1 4 1 4 1 4 1 4 1 4 1 4 1 4 1 2 1 2 1 2 1 2 29 Flasque median Central plate Zwischenflansche 1 1 1 1 1 1 1 1 103408 29...

Page 48: ... I I I I I I I 1 I I I I I I I I I I q s 5 c 0 1 c E o c c 2 o c C 0 c E c E C1 2 0 c c vt 1 C1 E E E vt C1 vtc E a c E c c o c 6 0 0 160 I ...

Page 49: ...I F 1 11 1 J1 l lir0 j M1i i i 1 1 1 lf f j j l f j i 0 iimtl IW N qh1 1 j l l kj 1 1 1 1 1 1 1 1 I 1 I 1 1 jl g 11 JJ s 1 ifM 1 t1 ftlf1 F O i lippendichtung 15 x 25 5 x4 6 jW E jf n 0f slli jf IJ f f t 11 lt 1 m t ci Hintererflansche 1 tggj1 rf ll 1 i1 1 1 1 r 1 T l I t jifi Y 1 1 1 1 gl J fg Ji1 iftd i 0 J L j y1D2J J if jj 1t i t 1 j fl 11 gfj t M ilfi Sitz 1 1 1 1 1 1 1 i i Jtr r 1 1 X jii g ...

Page 50: ... L ____ ___ ___ J 162 ...

Page 51: ...in M6 142 12 1 4 Gi U f6Q W 6j 4 7j2fH Piii MP lM 12 14 Goujon M6 187 12 Pin M6 187 12 14fqolli9RM i 2i7 J i in M6 7 2 19 14 M6 84 12 Pin M6 84 12 is l l em 2 16 Ecrou HM6 Screw nut HM6 Lot joints Minor kit Dichtungssotz Schraube CHC M6 x 16 Unterlegscheibe Hebel Hintererflansche lippendichtung 15 x 25 5 x 4 6 Flugelnocke Sprengring Unterlegscheibe Duse Dichtung c 1 9 d 5 7 Ring R5 Ventilsilz Klam...

Page 52: ... c o 0 6 _ 1It 0i C So 2 2 C o Q 0 E 0 Go JS E E 1 Go Go lit Go aC Go C 2 2 000 ii 164 J I I ...

Page 53: ...9fi bdEit 9 f ljrijqb c f i E Abdeckung mit elektrische Einrichtung i H X t q L n o 0 f Motorfahrgestell t J i f 103748 l t i fl j5 i jgt t 103751 J I t 1 q4 m j q 104922 r4 d IQ g Wg i ti 104920 P P f DESIGNATION SPECIACATION BENENNUNG L f ____ M t f h p Q 1 Q9 f it I JP tt I i rB L e p llij l n e QQ t f i it1i r 1 r z XX lK ij r1 l ji oi lirtgl lci timiir ft f lc2 f grj i l t Moteur triphase a b...

Page 54: ...anchon Ruban teflon Bille inox 18 8 d 5 8 R ss6rL Raccord G 1 8 1 8 NPT loiht toriquec l 9 d 7 2 Bulleur Buneur Attache tube Bubbler Tube fastener BliiJdStopfen 1 8 NPT Kupplung Teflqnband Kugel 18 8 d 5 8 d Verbindungselement Dichtung c 1 9 d 7 2 Bubier Bubier Rohrbefestigung Lot joints I Minor kit I Dichlungssatz Lot maintenance I Major kit I Warlungssatz _ L _ TYPES MODEL 7 ITl 11 REF PIN Beste...

Page 55: ...to Pneurop 6602 specifications on 2015 ALCATEL pump These values are given as a rough guide only They may vary according to the type of pump and the pumping conditions Requires special preparation of pump see page 88 However the following replacement fluids can be used Mineral oil ELF MOVIXA PV 100 TURBELF SA 100 BP CS 100 BP registered trademark SHELL VITREA 100 SHELL registered trademark TOTAL C...

Page 56: ...reparation procedure for the pump then remove the filling cap and fill with oil until the oil reaches the highest mark on the sight glass This operation must be performed with the pump switched off The second filling orifice is used if an external oil filtration device is connected see accessories p 63 Checking the oil level To use the pump in optimum conditions the oil level must be observed and ...

Page 57: ...nents prevelltfor lgn bodl sfrom entenng the pump dUring transport and sf9rdge iris dangeroustoJeav ethem thepumpduringoperation The pump inlet and exhaust orifices are equipped with DN 25 ISO KF end fittings which can be used to fit various line components made of stainless steel plastic etc see Alcatel catalog Inlet I f Make sure that all the components ill or chamber connected to the pump inlet...

Page 58: ...he end fitting to be removed U UH Unfasten the end fitting and remove it from its housing along with the O ring In the case of the inlet end fitting also remove the inlet filter Horizontal reassembly f 4 i Remove the attachment screw LIllI from the lateral cap and using a wide screwdriver remove the cap Position the end fitting in the corresponding lateral orifice taking care to fit the O ring Att...

Page 59: ...tion level IP 43 TEFC type must be protected by a customer supplied starter consisting of a suitably rated contactor and thermal overload Furthermore they are equipped with a dry contact NC thermal protection which is available in the therminal box Wire the motor according to the line voltage The connections to be made are shown on a diagram inside the terminal box or on its lid Check the directio...

Page 60: ...table on the following page gives for each pump the electrical characteristics in permanent operation and the proposed circuit breaker Specific internal protection Single phase motors have a thermal circuit switch with automatic starting device CSA standard when the internal motor temperature reaches a value over the preset limit value the motor stops However when the motor is cooled it will start...

Page 61: ...LTAGE CONNECTION 380 415 v50 Hz 380 480 V60 Hz Serial coupling vI 9 2 3 8 The characteristics and ratings of fuses and circuit breaker associated with standard ALCATEL pump motors S to 21 m3 h single phase or three phase Single phase motor 50 Hz 60 Hz 50 Hz 60 Hz Standard Type aM S O 3 S 30 0 4 0 2 S 2 0 14 0 2 0 3 S 8 0 Temperature 12 C aM Motor associated type fuse Three phase motor 34 0 3S 0 19...

Page 62: ... 74 ...

Page 63: ...il cold Warm pump insufficient oil in the oil case Fill up to the level Oil contaminated Drain flush and refill with clean oil c Oil pump inlet partially blocked Drain and clean the oil pump inlet duct 1 _ _ _ _ _ _ Lubrication holes blocked Disassemble and clean Vane or spinner cam SD models Replace them damaged Incorrect anti suckback system Repeat the assembly and the setting assembly Ultimate ...

Page 64: ...Maintenance General precautions For normal operation the maintenance of ALCATEL 5 to 21 m3 h series pumps only require regular oil changes 83 l 1 11 I 1 I I I 1 I ...

Page 65: ... oil consumption may reach sufficiently high levels according to the pumped volume and pumping cycle rates causing the level to drop in the oil case There is then a risk of seizure due to a lack of oil In addition the high flow of gas passing through the eliminator prevents oil from returning to the oil case In order to pump in these conditions the pump must be equipped with an OME 25 HP type oil ...

Page 66: ...nthetic oils must be used see list on page 67 The use of these oils requires a special pump preparation see page 88 The pump must be completely disassembled and all traces oil mineral oil removed Flushing the oil case is not adequate Any accumulation of oxygen in the installation should be avoided and the oxygen or combustible mixture should be diluted with a neutral gas at the exhaust the gas flo...

Page 67: ...for pumps operating at a constant inlet pressure 1 to 5 mbar they are adapted for each case of pumping Start up Start up the pump at ultimate vacuum When it is hot run the nitrogen purge Use it from the beginning and throughout pumping Stop When pumping stops allow the purge to operate for approximately 1 hour depending on the quantity of pumped gas at ultimate vacuum with the purge in order to de...

Page 68: ...ual operation of the gas ballast has been disabled However it is possible to disassemble it and connect it directly to a neutral gas line BSPP 1 8 Gas connection The nitrogen flow rate should be from 900 to 1000 I h with a pressure of 1 to 1 2 PSIG 0 05 to 0 1 relativ bar Use of the bubbler The bubble device is composed of an air tube with several holes located at the bottom of the oil case which ...

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