Contents
Alcatel - High Vacuum Technology - User’s Manual ADP/ADS
ADP/ADS
User’s manual
2/3
Edition 04 - May 98
C - Operation
D - Maintenance
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Safety instructions related to maintenance .....................
D 00
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First level of maintenance...........................................
D 10
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Maintenance frequency .............................................
D 20
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Diagnosis and troubleshooting ....................................
D 30
■
Pump does not start ..................................................
D 40
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The pump is running and then is showing
an alert or alarm message (followed by pump stopping) .
D 50
■
Pump is running - No message ..................................
D 60
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«Breaker …» Alarm ..................................................
D 70
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«Pressure»/«Purge N
2
» Alert and alarm .......................
D 80
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«Gas temp.» Alert ..................................................
D 90
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«Pump temp.» Alert .................................................
D 91
■
«Consumption» Alert and alarm ................................
D 100
■
«Water flow» Alert .................................................
D 110
■
«Motor temp.» Alert or alarm....................................
D 120
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«Analogic input» Alert or alarm.................................
D 130
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«E1 logic»/«E2 logic» Alert or alarm ........................
D 140
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«Valve option» Alert and alarm ................................
D 150
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«Variator» Alarm.....................................................
D 160
■
Start-up of the M3 monitoring system............................
C 10
■
Setting the M3 monitoring system parameters ................
C 20
■
M3 Monitoring system function table............................
C 30
■
Use of the M3 monitoring system ................................
C 40
■
Use of the M1 monitoring system ................................
C 50