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TriScroll 320 Series Vacuum Pump 

Technical Information

Table 1 Specifications

Model

TriScroll™ 320 Dry Scroll Vacuum Pump

Interface dimensions

See Figure 1

Peak pumping speed

50 Hz: 210 l/m, 12.6 m

3

/hr (7.4 cfm)

60 Hz: 250 l/m, 15 m

3

/hr (8.8 cfm)

Media

Clean air. No toxic, corrosive, explosive or particulate forming gases

Ultimate pressure (Torr)

1.0 x 10

-2

 Torr (1.3 x 10

-2

 mbar)

Maximum inlet pressure

1.0 atmosphere (0 psig)

Maximum continuous inlet pressure

100 Torr

Maximum outlet pressure

1.1 atmosphere (1.5 psig)

Inlet connection

NW25

Exhaust connection

Female 1/4" National Pipe Thread (NW16 adapter provided)

Gas ballast

Female 1/4" National Pipe Thread (40 Micron sintered filter provided)

Ambient operating temperature

5 °C to 40 °C (41 °F to 104 °F)

Storage temperature

–20 °C to 60 °C (–4 °F to 140 °F)

Motor rating

0.75 HP (0.56 kW)

Operating voltages

Single phase models:

50-60 Hz/100-115:200-230 VAC ±10%

Motor full load currents

See Table 2 on page 7

Motor thermal protection

Type U automatic

Operating speed

60 Hz: 1725 RPM, 50 Hz: 1425 RPM

Cooling system

Air-cooled

Weight

Pump only: 26.4 kg (58 lbs)
Shipping weight: 34.2 kg (75 lbs)

Noise level (per ISO 11201)

68 dB(A)

Vibration level at inlet (per ISO 10816-1)

6.3 mm/sec

Installation

Pollution Degree: 2
Installation Category: II
Altitude: 2000 m, indoor usage and storage

Summary of Contents for TriScroll 320 Series

Page 1: ...INSTALLATION AND OPERATION MANUAL Vacuum Products Division TriScrollTM 320 Series Dry Scroll Vacuum Pump Manual No 699904342 Revision F October 2014...

Page 2: ...Copyright 2014 Agilent Inc TriScroll 320 Dry Scroll Vacuum Pump TriScroll is a trademark of Agilent Inc...

Page 3: ...earing Purge 9 Purge Kit 9 Troubleshooting 10 Maintenance 11 General Information 11 Related TriScroll Manuals 11 Maintenance and Tooling Kits 11 Factory Service Options 12 Accessories 12 Contacting Ag...

Page 4: ...TriScroll 320 Series Vacuum Pump This page intentionally left blank...

Page 5: ...ocol Storage When transporting and storing the pump the following environmental requirements should not be exceeded Preparation for Installation The pump is supplied in a special protective packing If...

Page 6: ...ance with specific national and local standards Temperature 5 C to 40 C 41 F to 104 F Relative humidity 0 to 95 non condensing CAUTION As supplied from the factory the pump is configured for low volta...

Page 7: ...n Female 1 4 National Pipe Thread NW16 adapter provided Gas ballast Female 1 4 National Pipe Thread 40 Micron sintered filter provided Ambient operating temperature 5 C to 40 C 41 F to 104 F Storage t...

Page 8: ...TriScroll 320 Series Vacuum Pump 4 Figure 1 Interface Drawing with Dimensions Figure 2 Pumping Speed Curves...

Page 9: ...13 Motor Electrical Cover Unpacking and Inspection The shipping container is a double carton 1 After opening the outer box remove the foam packing 2 Slit open the inner box 3 Lift the pump with the p...

Page 10: ...er capacity The circuit breaker must be suitably located and easily reached The circuit breaker must be marked at the disconnecting device for the equipment with the on off symbol I O and meet the rel...

Page 11: ...ct the motor to match your supply voltage Two options are available to strain relieve the electrical supply cable The cable can be mechanically held under the electrical cover in the groove provided T...

Page 12: ...the vacuum chamber Use a bellows to provide both vibration isolation and strain relief between the pump and the vacuum chamber Pump Exhaust A female 1 4 National Pipe Thread exhaust fitting is located...

Page 13: ...Scroll motor s inter nal thermal switch to actuate the VPI Valve Gas Ballast The gas ballast port item 9 on Figure 3 on page 5 is sealed on the TriScroll 320 For applications where a lot of water is b...

Page 14: ...power supply cable Defective motor Inspect Contact Agilent Poor ultimate pressure System leak Locate and repair leak Water in pump Flush pump with air or dry nitrogen Gas ballast plugged Replace breat...

Page 15: ...maintenance on TriScroll pumps is provided in kit form A description of each kit and ordering information is provided in Table 6 Table 5 Other Related Manuals Title Applicable TriScroll Model Part Num...

Page 16: ...anual Contacting Agilent In the United States you can contact Agilent Customer Service at 1 800 882 7426 See the back cover of this manual for a listing of our sales and service offices Visit our web...

Page 17: ...re product e g inlet screens vent valves x Prior to shipment drain any oils or other liquids purge or flush all gasses and wipe off any excess residue x If ordering an Advance Exchange product p pleas...

Page 18: ...or been exposed to any toxic or hazardous materials OR HAS pumped or been exposed to the following toxic or hazardous materials If this box is checked the following information must also be filled ou...

Page 19: ...ther Vacuum leak Other Section 6 ADDITIONAL TERMS Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent Technologies Vacuum Product Division Produc...

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Page 22: ...n 54 10040 Leini Torino ITALY Tel 39 011 997 9111 Fax 39 011 997 9350 Toll Free 00 800 234 234 00 Japan Agilent Technologies Japan Ltd Vacuum Products Division 8th Floor Sumitomo Shibaura Building 4 1...

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