Agilent Technologies IMG-500, Manual

Page: 14 / 34

Compact Cold Cathode Gauge IMG-500
14
Measuring Signal vs. Pressure
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
ove
rr
a
ng
e
Measurement signal U [V]
0.0 0.5 1.0 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.5 2.0 3.0 4.0 5.0 6.0 7.0 8.0 9.0 10.0
1E–06
1E–07
1E–08
1E–09
1E–10
sen
sor
e
rr
o
r
un
d
er
ran
g
e
Pressure p
Pa
mbar
torr
p = 10
U-c 
U = c + log
10
p
mbar Pa Torr
c 10.5 8.5 10.625
valid in the range 2×10
-9
mbar < p < 1×10
-2
mbar
1.5×10
-9
Torr < p < 7.5 ×10
-3
Torr
2×10
-7
Pa < p < 1 Pa