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Sales and Service Offices 

 
 

United States and Canada 
Varian, Inc. 

121 Hartwell Avenue 
Lexington, MA 02421 
USA 
Tel.: +1 781 861 7200 
Fax: +1 781 860 5437 
Toll-Free: +1 800 882 7426 

 
Benelux 
Varian Vacuum Technologies 

Herculesweg 8 
4338 PL Middelburg 
The Netherlands 
Tel.: +31 118 671570 
Fax: +31 118 671569 

 
 
China 
Varian Technologies China, Ltd. 

Rm 1648 Central Tower South Wing 
Beijing Junefield Plaza 
No. 10 XuanWuMenWai Street 
Beijing 100052, P.R. China 

Tel.: +86 (10) 6310 8550 
Fax: +86 (10) 6310 0141 
Toll-Free: 800 820 6556 

 
France  
Varian s.a.

 

7 Avenue des Tropiques 
Z.A. de Courtaboeuf - B.P. 12 
Les Ulis cedex (Orsay) 91941 France 
Tel:   +33 1 69 86 38 84 
Fax:  +33 1 69 86 29 88 
 

Germany and Austria 
Varian Deutschland GmbH 

Alsfelder Strasse 6 
Postfach 11 14 35 
64289 Darmstadt 
Germany 
Tel:   +49 6151 703 353 
Fax:  +49 6151 703 302 

 
India 
Varian India PVT Ltd. 

205-A, “A” wing of Galleria, 
2nd floor, Hiranandani Gardens, 
Powai, Mumbai-400 076, India 
Tel.: +91 22-2570 8595 / 8597 
Fax: +91 22- 2570 8599 

 
Italy 
Varian S.p.A. 

Via F.lli Varian, 54 
10040 Leinì  (Torino) 
Italy 
Tel:   +39 011 997 9111 
Fax:  +39 011 997 9350

 

 
 

 
 
 
02/09 

Japan 

Varian Technologies Japan, Ltd. 

Sumitomo Shibaura Building, 8th Floor 
4-16-36 Shibaura Minato-ku  
Tokyo 108, Japan 

Tel.: +81 3 5232 1253 
Fax: +81 3 5232 1710 
Toll-Free: 0120 655 040 

 
Korea 
Varian Technologies Korea, Ltd. 

Shinsa 2nd Bldg. 2F, 966-5 Daechi-dong 
Kangnam-gu, Seoul 
Korea 135-280 

Tel.: +82 2 3452 2452 
Fax: +82 2 3452 2451 
Toll-Free: 080 222 2452 

 
Mexico 
Varian, S. de R.L. de C.V. 

Concepcion Beistegui No 109 
Col Del Valle 
C.P. 03100 
Mexico, D.F. 

Tel.: +52 5 523 9465 
Fax: +52 5 523 9472 

 

 
South East Asia 
Varian Vacuum Technologies 

South East Asia (SEA) 
Tel.: +601 2213 1253 
Fax: +603 6733 8121 

 

 
Singapore 
Varian Vacuum Technologies 
Singapore 

Unit 10-04 Helios 
Biopolis @ one-north 
11 Biopolis Way, 138667 Singapore 
Tel.: +65 92364988 
Fax: +65 64789603 

 
Taiwan 
Varian Technologies Asia Ltd.  

14F-6, No.77, Hsin Tai Wu Rd., Sec. 1 
Hsi chih, Taipei Hsien 
Taiwan, R.O.C. 

Tel.: +886 2 2698 9555 
Fax: +886 2 2698 9678 
Toll Free: 0800 051 342 

 
UK and Ireland 
Varian Ltd. 

6 Mead Road 
Oxford Industrial Park - Yarnton 
Oxford OX5 1QU - England 

Tel.: +44 (0) 1865 291570 
Fax: +44 (0) 1865 291571 

 
 
 
 

Other Countries 
Varian S.p.A. 
Vacuum Technologies 

Via F.lli Varian, 54 
10040 Leinì  (Torino) 
Italy 
Tel:   +39 011 997 9111 
Fax:  +39 011 997 9350

 

 
 

 
Customer Support & Service: 

 

North America 

Toll-Free: 1 800 882 7426 
[email protected] 

 
 

Europe 

Toll-Free: 00 800 234 234 00 
[email protected] 

 
 

China 

Toll-Free: 800 820 8266 
[email protected]

 

 
 
Japan 

Toll-Free: 0120 655 040 
[email protected] 

 
 

Korea 

Toll-Free: 080 222 2452 
[email protected] 

 
 

Taiwan 

Toll-Free: 0 800 051 342  
[email protected] 

 

 
Worldwide Web Site, Catalog 
and Order On-line: 

www.varianinc.com 

 
 

Representative in most countries 

 
 

 

Summary of Contents for 929-0196

Page 1: ...87 900 053 01 F MARCH 2009 I MANUALE DI ISTRUZIONI D BEDIENUNGSHANDBUCH F NOTICE DE MODE D EMPLOI GB INSTRUCTION MANUAL MiniVac Controller Model 929 0196 Model 929 0197 vacuum technologies ...

Page 2: ...MiniVac Controller ...

Page 3: ......

Page 4: ......

Page 5: ...OLLER SPECIFICATIONS 19 CONTROLLER OUTLINE 20 INSTALLATION 21 Output Polarity Selection 21 Input Output Interconnections 22 Pump Connection 22 OPERATION 23 Pressure Determination 23 Power Failure 23 Remote Control Mode Operation 23 MAINTENANCE 24 Troubleshooting 24 Controller Spares and Accessories 24 Controller to Vacion Pump Cables 24 ...

Page 6: ...atica specifica che se non eseguita in modo corretto potrebbe provocare gravi lesioni personali ATTENZIONE I messaggi di attenzione sono visualizzati prima di procedure che se non osservate potrebbero causare danni all apparecchiatura NOTA Le note contengono informazioni importanti estrapolate dal testo IMMAGAZZINAMENTO Durante il trasporto e l immagazzinamento dei MiniVac devono essere soddisfatt...

Page 7: ...li altri collegamenti e l installazione degli accessori opzionali vedere la sezione Technical Information USO In questo paragrafo sono riportate le principali procedure operative Per ulteriori dettagli e per procedure che coinvolgono collegamenti o particolari opzionali fare riferimento al paragrafo Use della sezione Technical Information Prima di usare il controller effettuare tutti i collegament...

Page 8: ...l cavo di interlock del controller 4 al plug 5 3 Accendere il controller Accensione del Controller Per accendere il controller portare l interruttore principale in posizione ON dopo aver inserito il cavo di alimentazione nella presa di rete Avvio della Pompa La pompa si avvia solo se il controller è acceso e la pompa è connessa al connettore di uscita Per ulteriori informazioni fare riferimento al...

Page 9: ...ettata in fabbrica con polarità di uscita negativa Per un eventuale cambio far riferimento al paragrafo Output Polarity Selection Qualora un controller dovesse essere rottamato procedere alla sua eliminazione nel rispetto delle normative nazionali specifiche SMALTIMENTO Significato del logo WEEE presente sulle etichette Il simbolo qui sotto riportato è applicato in ottemperanza alla direttiva CE d...

Page 10: ...te Prozedur oder Praktik die bei unkorrekter Ausführung schwere Verletzungen hervorrufen können ACHTUNG Die Die Warnhinweise vor bestimmten Prozeduren machen den Bediener darauf aufmerksam daß bei Nichteinhaltung Schäden an der Anlage entstehen können ANMERKUNG Die Anmerkungen enthalten wichtige Informationen die aus dem Text hervorgehoben werden LAGERUNG Beim Transport und bei der Lagerung der Co...

Page 11: ...ontroller gehörende Kabel benutzt werden Andere Anschlüsse und die Installation optionalen Zubehörs ist im Abschnitt Technical Information beschrieben GEBRAUCH In diesem Kapitel sind die wichtigsten Betriebsvorgänge aufgeführt Für weitere Hinweise bezüglich Anschlüsse und Montage des bestellbaren Zubehörs siehe Kapitel Use im Anhang zu Technical Information Vor Benutzung des Controllers sämtliche ...

Page 12: ...terlock des Hochspannungskabels mit dem Stecker 5 verbinden falls das Hochspannungs kabel keinen Interlock haben sollte das Interlock Kabel des Controllers 4 mit dem Stecker 5 verbinden 3 Controller einschalten Einschalten des Controllers Zum Einschalten des Controllers genügt es das Netzkabel an die Steckdose anzuschließen Pumpenstart Die Pumpe startet nur wenn der Controller eingeschaltet und di...

Page 13: ...ker montiert ist ANMERKUNG Fabrikseitig ist die Einheit mit negativer Ausgangspolung eingestellt Soll das geändert werden den Absatz Output Polarity Selection zu Rate ziehen Eine eventuelle Verschrottung muß unter Einhaltung der einschlägigen landesüblichen Vorschriften erfolgen ENTSORGUNG Bedeutung des WEEE Logos auf den Etiketten Das folgende Symbol ist in Übereinstimmung mit der EU Richtlinie W...

Page 14: ...ent risque de provoquer de graves lésions ATTENTION Les messages d attention apparaissent avant certaines procédures qui si elles ne sont pas observées pourraient endommager sérieusement l appareillage NOTE Les notes contiennent des renseignements importants isolés du texte EMMAGASINAGE Pendant le transport et l emmagasinage des Mini Vac contrôleurs il faudra veiller à respecter les conditions env...

Page 15: ...es autres connexions et pour l installation des accessoires en option voir la section Technical Information UTILISATION Ce paragraphe décrit les principales procédures de fonctionnement Pour tout autre complément d information et pour les procédures concernant des connexions ou des éléments en option se reporter au paragraphe Use de la section Technical Information Avant d utiliser le contrôleur e...

Page 16: ...terlock du contrôleur 4 sur la prise 5 3 Allumer le contrôleur Mise sous tension du Contrôleur Pour mettre le contrôleur sous tension il suffit de mettre l interrupteur principal sur ON après avoir branché le câble d alimentation sur la prise du réseau Mise en marche de la Pompe La pompe démarre uniquement si le contrôleur est allumé et la pompe est reliée au connecteur de sortie Pour d ultérieurs...

Page 17: ...signée à l usine avec polarité de sortie négative Pour un changement éventuel se référer au paragraphe Output Polarity Selection Si un contrôleur doit être mis au rebut l éliminer conformément aux réglementations nationales en la matière MISE AU REBUT Signification du logo WEEE figurant sur les étiquettes Le symbole ci dessous est appliqué conformément à la directive CE nommée WEEE Ce symbole uniq...

Page 18: ...attention of the operator to a particular procedure or practice which if not followed correctly could lead to serious injury CAUTION The caution messages are displayed before procedures which if not followed could cause damage to the equipment NOTE The notes contain important information taken from the text STORAGE When transporting and storing the MiniVacs the following environmental requirements...

Page 19: ...ion about the above mentioned and the other connections and about the options installation USE This paragraph describes the fundamental operating procedures Detailed information and operating procedures that involve optional connections or options are supplied in the paragraph USE of the section Technical Information Make all vacuum manifold and electrical connections and refer to the pump instruc...

Page 20: ...nterlock cable connect the interlock cable of the controller 4 to the plug 5 3 Switch on the controller Controller Start up To start up the controller turn the main switch to ON after plugging the power cable into a suitable power source Starting the Pump The pump is activated only if the controller is powered on and the pump itself is connected to the output connector For further information refe...

Page 21: ...ory set with a negative output polarity Refer to the section Output Polarity Selection for instructions on how to change the output polarity If a pump is to be scrapped it must be disposed of in accordance with the specific national standards DISPOSAL Meaning of the WEEE logo found in labels The following symbol is applied in accordance with the EC WEEE Waste Electrical and Electronic Equipment Di...

Page 22: ...ium pumps 20 l s to 60 l s can be operated at any pressure up to 1 x 10 5 mbar Torr continuous operation Large pumps 120 l s to 400 l s can be operated at any pressure up to 2 x 10 6 mbar Torr continuous operation Medium larger ion pumps must first be started with an appropriate control unit and pumped to a sufficiently low pressure where the current demand is below 8 mA The MiniVac controller is ...

Page 23: ...F switch 5 Current voltage LED s bar graph indicator 6 H V ON LED 7 Recorder output connector 8 Pump current scale mA The MiniVac controller rear panel controls are shown in the following figure MODEL SERIAL VOLT A made in Italy varian S p a Label FUSE T3 15A HIGH VOLTAGE OUTPUT INPUT POWER 24 V DC PIN1 POS PIN2 NEG ACCESSORY Hz MiniVac Controller Rear Panel Controls 1 Controller power entry modul...

Page 24: ... 0 to 10 Vdc 10 V correspond to 1 mA resolution of 10 mV minimum corresponding to 1 µA Available at pins 2 and 6 of rear panel Accessory connector Voltage Recorder Output Rec Out 0 to 5 V corresponding to 0 to 5 kV with 1 V corresponding to 1 kV in linear mode Available at pins 4 and 8 of rear panel Accessory connector Operating temperature 0 C to 45 C Storage temperature 20 C to 70 C Radio interf...

Page 25: ...TECHNICAL INFORMATION 20 24 87 900 053 01 F Voltage Vs Current Diagram CONTROLLER OUTLINE The outline dimensions of the MiniVac controller are shown in the following figure MiniVac Outline Dimensions ...

Page 26: ... positioned so that free air can flow through the holes Output Polarity Selection The output polarity is selected by the high voltage multiplier card and is factory set for negative output voltage polarity If a change in output polarity is desired proceed as follows Switch off the power and unplug the power cord from the controller rear panel socket Undo the 9 screws and then remove the cover Disc...

Page 27: ...2 pin 2 signal out pin 6 ground The output voltage 0 to 10 Vdc is proportional to the pump current 0 to 1 mA e g 10 Vdc correspond to 1 mA The resolution is 10 mV minimum corresponding to 1 µA Pin 4 8 Voltage recorder output pin 4 signal out pin 8 ground The output voltage 0 to 5 V is proportional to the controller high voltage output 0 to 5 kV e g 1 V corresponds to 1 kV in linear mode Pin 5 9 Hi...

Page 28: ...oltage output is between 5 and 4 kV If only the first LED of the bar graph is lit the current drawn by the pump is less than 1 mA and the voltage output is 5 kV If ten LEDs are lit the current drawn by the pump is 10 mA and the voltage output is 2 kV For the correct determination of the voltage value use the voltage vs current diagram shown in the figure MiniVac Controller Rear Panel Controls Pres...

Page 29: ...essure below 1x10 7 mbar Ton and all LED are lit Switch power off and disconnect the high voltage cable Switch power on and verify that only one LED is lit If this happens the high voltage cable or the pump are shorted If not replace the unit Controller Spares and Accessories Description Part number Mating accessory connector P001 03 648487 24 Vdc mating connector CANNON XLR 3 11C Fuse T 3 15A 5x2...

Page 30: ...NTIFICATION Product Description Varian P N Varian S N Purchase Reference TYPE OF RETURN check appropriate box Paid Exchange Paid Repair Warranty Exchange Warranty Repair Loaner Return Credit Shipping Error Evaluation Return Calibration Other HEALTH and SAFETY CERTIFICATION Varian Vacuum Technologies CAN NOT ACCEPT any equipment which contains BIOLOGICAL HAZARDS or RADIOACTIVITY Call Varian Custome...

Page 31: ...ate No zero high backround Gauge tube not working Display problem Vacuum system unstable Cannot reach test mode Communication failure Degas not working Failed to start Other Error code on display Other Customer application Customer application PRIMARY PUMPS DIFFUSION PUMPS Pump doesn t start Noisy pump describe Heater failure Electrical problem Doesn t reach vacuum Over temperature Doesn t reach v...

Page 32: ...Ltd Shinsa 2nd Bldg 2F 966 5 Daechi dong Kangnam gu Seoul Korea 135 280 Tel 82 2 3452 2452 Fax 82 2 3452 2451 Toll Free 080 222 2452 Mexico Varian S de R L de C V Concepcion Beistegui No 109 Col Del Valle C P 03100 Mexico D F Tel 52 5 523 9465 Fax 52 5 523 9472 South East Asia Varian Vacuum Technologies South East Asia SEA Tel 601 2213 1253 Fax 603 6733 8121 Singapore Varian Vacuum Technologies Si...

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