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Vacuum System
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5977B Series MSD Troubleshooting and Maintenance Manual
155
Vacuum System Components
The parts of the vacuum system are identified in
.
•
Foreline (rough) pump
•
High vacuum pump (diffusion or turbo pump)
•
Analyzer chamber
•
Side plate (analyzer door), and front and rear end plates
•
Vacuum seals
•
Calibration valve(s) and vent valve
•
Vacuum control electronics
•
Vacuum gauges and gauge control electronics
Each of these is discussed in more detail in this chapter.
Figure 25
Example vacuum system components (MSD with turbo pump shown)
High vacuum
High vacuum
Analyzer
GC/MSD
Ion vacuum gauge (if present)
CI flow control
Vent valve
cooling fan
pump
pump
interface
chamber
(not shown)
Summary of Contents for 5977B Series
Page 1: ...Agilent Technologies Agilent 5977B Series MSD Troubleshooting and Maintenance Manual ...
Page 8: ...8 5977B Series MSD Troubleshooting and Maintenance Manual ...
Page 33: ...Introduction 1 5977B Series MSD Troubleshooting and Maintenance Manual 33 ...
Page 34: ...34 5977B Series MSD Troubleshooting and Maintenance Manual 1 Introduction ...
Page 88: ...88 3 CI Troubleshooting ...
Page 152: ...152 5977B Series MSD Troubleshooting and Maintenance Manual 5 CI Maintenance ...
Page 180: ...180 5977B Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System ...
Page 226: ...226 5977B Series MSD Troubleshooting and Maintenance Manual 8 Electronics ...
Page 241: ...Parts 9 5977B Series MSD Troubleshooting and Maintenance Manual 241 EI ion source ...
Page 256: ...256 5977B Series MSD Troubleshooting and Maintenance Manual 9 Parts ...
Page 257: ......