260
5975 Series MSD Troubleshooting and Maintenance Manual
9
Parts
Consumables and Maintenance Supplies
through
) lists parts available for cleaning and
maintaining your MSD.
Table 28
EI maintenance supplies
Description
Part number
Abrasive paper, 30 µm
5061-5896
Alumina powder, 1 kg
8660-0791
Cloths, clean (qty 300)
05980-60051
Cloths, cleaning (qty 300)
9310-4828
Cotton swabs (qty 100)
5080-5400
Diffusion pump fluid (2 required)
6040-0809
Foreline pump oil, P3, 0.5 L
6040-0621
Gloves, clean – Large
8650-0030
Gloves, clean
–
Small
8650-0029
Grease, Apiezon L, high vacuum
6040-0289
Summary of Contents for 5975C TAD VL MSD
Page 1: ...Agilent Technologies Agilent 5975 Series MSD Troubleshooting and Maintenance Manual...
Page 8: ...8 5975 Series MSD Troubleshooting and Maintenance Manual...
Page 56: ...56 5975 Series MSD Troubleshooting and Maintenance Manual 2 General Troubleshooting...
Page 82: ...82 5975 Series MSD Troubleshooting and Maintenance Manual 3 CI Troubleshooting...
Page 196: ...196 5975 Series MSD Troubleshooting and Maintenance Manual 6 Vacuum System...
Page 230: ...230 5975 Series MSD Troubleshooting and Maintenance Manual 8 Electronics...
Page 270: ...270 5975 Series MSD Troubleshooting and Maintenance Manual 9 Parts...