QNP3 Hardware Manual
Mechanical Specifications and Installation
2.3. Securing the Stage to the Mounting Surface
W A R N I N G : The QNP3 must be mounted securely. Improper mounting can result in injury
and damage to the equipment.
The mounting surface must be flat and have adequate stiffness in order to achieve the maximum
performance from the QNP3 stage. When it is mounted to a non-flat surface, the stage can be distorted as
the mounting screws are tightened. This distortion will decrease overall linearity. Adjustments to the
mounting surface must be done before the stage is secured.
Inspect the mounting surface for dirt or unwanted residue and clean if necessary. Use precision flatstones
on the mounting surface to remove any burrs or high spots. Clean the mounting surface with a lint-free cloth
and acetone or isopropyl alcohol and allow the cleaning solvent to completely dry. Gently place the stage on
the mounting surface.
N O T E :
To maintain linearity, the mounting surface must be flat to within 5 µm.
N O T E :
The QNP3 is precision machined and verified for flatness prior to product assembly at the
factory. If machining is required to achieve the desired flatness, it should be performed on the mounting
surface rather than the QNP3. Shimming should be avoided if possible. If shimming is required, it should
be minimized to retain maximum rigidity of the system.
QNP3 series stages have a fixed mounting pattern as shown in
and
The M4 screws
and 3 mm hex wrench required to mount the stage are included in the shipping box. If the the optional solid
tabletop was ordered (-TT1), the M3x0.5, 8 mm long low head cap screws required to mount it to the stage
will also be included in the shipping box.
Tightening torque values for the mounting hardware are dependent on the properties of the surface to which
the stage is being mounted. Values provided in
are typical values and may not be accurate for your
mounting surface. Refer to
for specific model mounting locations and dimensions.
Table 2-1:
Stage to Mounting Surface Hardware
Mounting Hardware
Typical Screw
Torque
QNP3-100XYAZ-030-10
M4 x 0.7 by 25 mm socket head cap screws (with 3
mm hex wrench)
2 N·m
Mounting the optional tabletop to the stage (-TT1): M3 x
0.5 by 8 mm low head cap screws
1 N·m
QNP3-100XYAZ-100-10
M4 x 0.7 by 25 mm socket head cap screws
(with 3 mm hex wrench)
2 N·m
Mounting the optional tabletop to the stage (-TT1):
M3 x 0.5 by 8 mm low head cap screws
1 N·m
QNP3-150XYAZ-200-20
M6 x1.0 by 30 mm socket head cap screws
(with 5 mm hex wrench)
7 N·m
Mounting the optional tabletop to the stage (-TT1):
M4 x 0.7 by 8 mm low head cap screws
2 N·m
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Chapter 2
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